Three-Dimensional Focusing Measurement Method for Confocal Microscopy Based on Liquid Crystal Spatial Light Modulator

• Published in: Sensors (Basel, Switzerland) Vol. 25; no. 8; p. 2620
• Main Authors: Li, Yupeng, Li, Yifan
• Format: Journal Article
• Language: English
• Published: Switzerland MDPI AG 21.04.2025; MDPI
• Subjects: Aperture; Arrays; confocal microscopy; Efficiency; Electric fields; Light; liquid crystal spatial light modulator; Manufacturing; Measurement techniques; Methods; Microscope and microscopy; Microscopy; three-dimensional focusing technology; confocal microscopy; three-dimensional focusing technology; liquid crystal spatial light modulator

Micro-nano measurement represents a critical engineering focus in the advancement of micro-nano fabrication technologies. Exploring advanced micro-nano measurement methods is a key direction for driving progress in micro-nano manufacturing. This study proposes a confocal measurement method utilizing...