Three-Dimensional Focusing Measurement Method for Confocal Microscopy Based on Liquid Crystal Spatial Light Modulator
Micro-nano measurement represents a critical engineering focus in the advancement of micro-nano fabrication technologies. Exploring advanced micro-nano measurement methods is a key direction for driving progress in micro-nano manufacturing. This study proposes a confocal measurement method utilizing...
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| Published in | Sensors (Basel, Switzerland) Vol. 25; no. 8; p. 2620 |
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| Main Authors | , |
| Format | Journal Article |
| Language | English |
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21.04.2025
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| Abstract | Micro-nano measurement represents a critical engineering focus in the advancement of micro-nano fabrication technologies. Exploring advanced micro-nano measurement methods is a key direction for driving progress in micro-nano manufacturing. This study proposes a confocal measurement method utilizing a liquid crystal spatial light modulator (LC-SLM) to simulate a binary Fresnel lens for 3D focusing, enabling the non-mechanical measurement of spatial positions on sample surfaces. Specifically, it introduces a 3D focusing method based on LC-SLM, constructs a confocal microscopy 3D focusing system, and conducts lateral focusing experiments and axial focusing experiments. Experimental results demonstrate that the system can freely adjust lateral focusing positions. Within an axial focusing range of 900 μm, it achieves axial measurement accuracy exceeding 1 μm, with a maximum resolution capability of approximately 16.667 nm. Compared to similar confocal microscopy systems, this method allows rapid adjustment of lateral focusing positions without regenerating phase grayscale maps, achieves comparable axial measurement accuracy, and enhances measurement speed. |
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| AbstractList | Micro-nano measurement represents a critical engineering focus in the advancement of micro-nano fabrication technologies. Exploring advanced micro-nano measurement methods is a key direction for driving progress in micro-nano manufacturing. This study proposes a confocal measurement method utilizing a liquid crystal spatial light modulator (LC-SLM) to simulate a binary Fresnel lens for 3D focusing, enabling the non-mechanical measurement of spatial positions on sample surfaces. Specifically, it introduces a 3D focusing method based on LC-SLM, constructs a confocal microscopy 3D focusing system, and conducts lateral focusing experiments and axial focusing experiments. Experimental results demonstrate that the system can freely adjust lateral focusing positions. Within an axial focusing range of 900 μm, it achieves axial measurement accuracy exceeding 1 μm, with a maximum resolution capability of approximately 16.667 nm. Compared to similar confocal microscopy systems, this method allows rapid adjustment of lateral focusing positions without regenerating phase grayscale maps, achieves comparable axial measurement accuracy, and enhances measurement speed.Micro-nano measurement represents a critical engineering focus in the advancement of micro-nano fabrication technologies. Exploring advanced micro-nano measurement methods is a key direction for driving progress in micro-nano manufacturing. This study proposes a confocal measurement method utilizing a liquid crystal spatial light modulator (LC-SLM) to simulate a binary Fresnel lens for 3D focusing, enabling the non-mechanical measurement of spatial positions on sample surfaces. Specifically, it introduces a 3D focusing method based on LC-SLM, constructs a confocal microscopy 3D focusing system, and conducts lateral focusing experiments and axial focusing experiments. Experimental results demonstrate that the system can freely adjust lateral focusing positions. Within an axial focusing range of 900 μm, it achieves axial measurement accuracy exceeding 1 μm, with a maximum resolution capability of approximately 16.667 nm. Compared to similar confocal microscopy systems, this method allows rapid adjustment of lateral focusing positions without regenerating phase grayscale maps, achieves comparable axial measurement accuracy, and enhances measurement speed. Micro-nano measurement represents a critical engineering focus in the advancement of micro-nano fabrication technologies. Exploring advanced micro-nano measurement methods is a key direction for driving progress in micro-nano manufacturing. This study proposes a confocal measurement method utilizing a liquid crystal spatial light modulator (LC-SLM) to simulate a binary Fresnel lens for 3D focusing, enabling the non-mechanical measurement of spatial positions on sample surfaces. Specifically, it introduces a 3D focusing method based on LC-SLM, constructs a confocal microscopy 3D focusing system, and conducts lateral focusing experiments and axial focusing experiments. Experimental results demonstrate that the system can freely adjust lateral focusing positions. Within an axial focusing range of 900 μm, it achieves axial measurement accuracy exceeding 1 μm, with a maximum resolution capability of approximately 16.667 nm. Compared to similar confocal microscopy systems, this method allows rapid adjustment of lateral focusing positions without regenerating phase grayscale maps, achieves comparable axial measurement accuracy, and enhances measurement speed. |
| Audience | Academic |
| Author | Li, Yupeng Li, Yifan |
| AuthorAffiliation | College of Metrology Measurement and Instrument, China Jiliang University, Hangzhou 310018, China; p22020854061@cjlu.edu.cn |
| AuthorAffiliation_xml | – name: College of Metrology Measurement and Instrument, China Jiliang University, Hangzhou 310018, China; p22020854061@cjlu.edu.cn |
| Author_xml | – sequence: 1 givenname: Yupeng surname: Li fullname: Li, Yupeng – sequence: 2 givenname: Yifan orcidid: 0000-0002-6214-8428 surname: Li fullname: Li, Yifan |
| BackLink | https://www.ncbi.nlm.nih.gov/pubmed/40285308$$D View this record in MEDLINE/PubMed |
| BookMark | eNpdkktv1DAQxyNURB9w4AugSFzgkOJXYueEykKh0lYcKGfLscdZr7Lx1k6Q9tsz2y2rFvkwo5mf__Y8zouTMY5QFG8pueS8JZ8yq4liDSMvijMqmKgUY-TkiX9anOe8JoRxztWr4lQQpmpO1Fkx360SQPU1bGDMIY5mKK-jnXMY-_IWTJ4TYGZCf1pFV_qYykUcfbQI3gabYrZxuyu_mAyujGO5DPdzcOUi7fKEyK-tmQLaZehXKBLdPJgpptfFS2-GDG8e7UXx-_rb3eJHtfz5_WZxtayskHSqvG-8AEEaaFvZUGDcO9kxompGrfOMOKdobWuKtkNEYr3GyhqAd046xi-Km4Oui2attylsTNrpaIJ-CMTUa5OmYAfQbdsY33ELihEhHO9o20nZ8rZRviPKo9bng9Z27jbgLHYlmeGZ6PPMGFa6j380ZQRbTWtU-PCokOL9DHnSm5AtDIMZIc5Zc9rWEudSE0Tf_4eu45xwOg-UaAQVrUTq8kD1BisIOBZ82OJxsAkWd8QHjF8prholmNpfePe0huPn_-0DAh8PwH6yOYE_IpTo_a7p467xv7VVxcY |
| Cites_doi | 10.1063/1.3574796 10.1117/12.402781 10.1364/AO.47.005400 10.1111/j.1467-8659.2008.01169.x 10.1063/1.99814 10.3390/app8112323 10.1016/j.nantod.2020.100980 10.1088/1361-6501/ac04df 10.1364/OL.23.000748 10.1364/OE.405418 10.1364/AO.55.004336 10.1002/sca.4950070205 10.3390/cryst9060292 10.1364/OE.26.032812 10.1364/AO.52.002610 10.1063/1.3643537 10.1002/jbio.200900110 10.1364/OE.16.018275 10.1364/OE.15.015656 10.1109/JMEMS.2003.809961 10.1117/1.3565046 10.1016/j.optlaseng.2022.107384 10.1007/s11263-005-3102-6 10.1002/adfm.202100535 10.3390/ma14154077 10.1364/OE.11.003080 10.1109/5.482231 |
| ContentType | Journal Article |
| Copyright | COPYRIGHT 2025 MDPI AG 2025 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License. 2025 by the authors. 2025 |
| Copyright_xml | – notice: COPYRIGHT 2025 MDPI AG – notice: 2025 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License. – notice: 2025 by the authors. 2025 |
| DBID | AAYXX CITATION NPM 3V. 7X7 7XB 88E 8FI 8FJ 8FK ABUWG AFKRA AZQEC BENPR CCPQU DWQXO FYUFA GHDGH K9. M0S M1P PHGZM PHGZT PIMPY PJZUB PKEHL PPXIY PQEST PQQKQ PQUKI PRINS 7X8 5PM DOA |
| DOI | 10.3390/s25082620 |
| DatabaseName | CrossRef PubMed ProQuest Central (Corporate) Health & Medical Collection ProQuest Central (purchase pre-March 2016) Medical Database (Alumni Edition) Hospital Premium Collection Hospital Premium Collection (Alumni Edition) ProQuest Central (Alumni) (purchase pre-March 2016) ProQuest Central (Alumni) ProQuest Central UK/Ireland ProQuest Central Essentials ProQuest Central ProQuest One Community College ProQuest Central Health Research Premium Collection Health Research Premium Collection (Alumni) ProQuest Health & Medical Complete (Alumni) ProQuest Health & Medical Collection Medical Database ProQuest Central Premium ProQuest One Academic Publicly Available Content Database ProQuest Health & Medical Research Collection ProQuest One Academic Middle East (New) ProQuest One Health & Nursing ProQuest One Academic Eastern Edition (DO NOT USE) ProQuest One Academic ProQuest One Academic UKI Edition ProQuest Central China MEDLINE - Academic PubMed Central (Full Participant titles) DOAJ Directory of Open Access Journals |
| DatabaseTitle | CrossRef PubMed Publicly Available Content Database ProQuest One Academic Middle East (New) ProQuest Central Essentials ProQuest Health & Medical Complete (Alumni) ProQuest Central (Alumni Edition) ProQuest One Community College ProQuest One Health & Nursing ProQuest Central China ProQuest Central ProQuest Health & Medical Research Collection Health Research Premium Collection Health and Medicine Complete (Alumni Edition) ProQuest Central Korea Health & Medical Research Collection ProQuest Central (New) ProQuest Medical Library (Alumni) ProQuest One Academic Eastern Edition ProQuest Hospital Collection Health Research Premium Collection (Alumni) ProQuest Hospital Collection (Alumni) ProQuest Health & Medical Complete ProQuest Medical Library ProQuest One Academic UKI Edition ProQuest One Academic ProQuest One Academic (New) ProQuest Central (Alumni) MEDLINE - Academic |
| DatabaseTitleList | MEDLINE - Academic CrossRef Publicly Available Content Database PubMed |
| Database_xml | – sequence: 1 dbid: DOA name: DOAJ Directory of Open Access Journals url: https://www.doaj.org/ sourceTypes: Open Website – sequence: 2 dbid: NPM name: PubMed url: https://proxy.k.utb.cz/login?url=http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed sourceTypes: Index Database – sequence: 3 dbid: BENPR name: ProQuest Central url: https://www.proquest.com/central sourceTypes: Aggregation Database |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Engineering |
| EISSN | 1424-8220 |
| ExternalDocumentID | oai_doaj_org_article_996afb3ce82044d3b19b7793968fb08f PMC12030815 A838684287 40285308 10_3390_s25082620 |
| Genre | Journal Article |
| GrantInformation_xml | – fundername: National Natural Science Foundation of China grantid: 51905514 – fundername: National Key R&D Program of China grantid: 2024YFF0617002 |
| GroupedDBID | --- 123 2WC 53G 5VS 7X7 88E 8FE 8FG 8FI 8FJ AADQD AAHBH AAYXX ABDBF ABUWG ACUHS ADBBV ADMLS AENEX AFKRA AFZYC ALIPV ALMA_UNASSIGNED_HOLDINGS BENPR BPHCQ BVXVI CCPQU CITATION CS3 D1I DU5 E3Z EBD ESX F5P FYUFA GROUPED_DOAJ GX1 HH5 HMCUK HYE IAO ITC KQ8 L6V M1P M48 MODMG M~E OK1 OVT P2P P62 PHGZM PHGZT PIMPY PQQKQ PROAC PSQYO RNS RPM TUS UKHRP XSB ~8M NPM PJZUB PPXIY PMFND 3V. 7XB 8FK AZQEC DWQXO K9. PKEHL PQEST PQUKI PRINS 7X8 5PM PUEGO |
| ID | FETCH-LOGICAL-c471t-ff6f4e406e99761e23fd7b208521cdf20dd815c51dd8b9977424ac75ee3bd7d23 |
| IEDL.DBID | M48 |
| ISSN | 1424-8220 |
| IngestDate | Wed Aug 27 01:31:20 EDT 2025 Thu Aug 21 18:26:55 EDT 2025 Fri Jul 11 18:31:42 EDT 2025 Fri Jul 25 20:42:49 EDT 2025 Tue Jun 10 20:53:36 EDT 2025 Mon Jul 21 05:46:11 EDT 2025 Sun Jul 06 05:07:30 EDT 2025 |
| IsDoiOpenAccess | true |
| IsOpenAccess | true |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | 8 |
| Keywords | confocal microscopy three-dimensional focusing technology liquid crystal spatial light modulator |
| Language | English |
| License | https://creativecommons.org/licenses/by/4.0 Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-LOGICAL-c471t-ff6f4e406e99761e23fd7b208521cdf20dd815c51dd8b9977424ac75ee3bd7d23 |
| Notes | ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 14 content type line 23 |
| ORCID | 0000-0002-6214-8428 |
| OpenAccessLink | http://journals.scholarsportal.info/openUrl.xqy?doi=10.3390/s25082620 |
| PMID | 40285308 |
| PQID | 3194641497 |
| PQPubID | 2032333 |
| ParticipantIDs | doaj_primary_oai_doaj_org_article_996afb3ce82044d3b19b7793968fb08f pubmedcentral_primary_oai_pubmedcentral_nih_gov_12030815 proquest_miscellaneous_3195785350 proquest_journals_3194641497 gale_infotracacademiconefile_A838684287 pubmed_primary_40285308 crossref_primary_10_3390_s25082620 |
| PublicationCentury | 2000 |
| PublicationDate | 2025-04-21 |
| PublicationDateYYYYMMDD | 2025-04-21 |
| PublicationDate_xml | – month: 04 year: 2025 text: 2025-04-21 day: 21 |
| PublicationDecade | 2020 |
| PublicationPlace | Switzerland |
| PublicationPlace_xml | – name: Switzerland – name: Basel |
| PublicationTitle | Sensors (Basel, Switzerland) |
| PublicationTitleAlternate | Sensors (Basel) |
| PublicationYear | 2025 |
| Publisher | MDPI AG MDPI |
| Publisher_xml | – name: MDPI AG – name: MDPI |
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| SSID | ssj0023338 |
| Score | 2.4452708 |
| Snippet | Micro-nano measurement represents a critical engineering focus in the advancement of micro-nano fabrication technologies. Exploring advanced micro-nano... |
| SourceID | doaj pubmedcentral proquest gale pubmed crossref |
| SourceType | Open Website Open Access Repository Aggregation Database Index Database |
| StartPage | 2620 |
| SubjectTerms | Aperture Arrays confocal microscopy Efficiency Electric fields Light liquid crystal spatial light modulator Manufacturing Measurement techniques Methods Microscope and microscopy Microscopy three-dimensional focusing technology |
| SummonAdditionalLinks | – databaseName: DOAJ Directory of Open Access Journals dbid: DOA link: http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwrV1NT9wwELUQp_aA-t1QityqUk8W8UcS5wi0K1R1OYHEzYrtMV2pSmDZPfDvO5Nktxv10AunRLYPEz_bbya23zD2RRmtdRWjgFKDML5pRKOrWtTQGEOKRSrQbeT5ZXlxbX7cFDc7qb7oTNggDzx03An6403yOgBSlTFRe1n7CgdVXdrkc5to9UXO2wRTY6iFBthBR0hjUH_ygERvSXp9wj69SP-_S_EOF03PSe4Qz-wFOxg9Rn46WPqS7UH7ij3f0RF8zdZXiAiIb6TUP6hs8FkX6Ej7LZ___QmI75QumqOfyummH9EYn9OJPLqb8sjPkNEi71r-c3G_XkR-vnxE3_E3p7TFOEyxGAN5Pu8ipfzqlm_Y9ez71fmFGPMpiIDdvhIplckAMjjU6IRIUDrFylOSTiVDTCqP0coiFBKfvibHUJkmVAWA9rGKSr9l-23XwnvGowqFAuSy6MHYlKOTZftN1QrAyqQz9nnTz-5ukM1wGG4QGG4LRsbOCIFtA1K67gsQfzfi7_6Hf8a-En6O5iOCFJrxWgHaScpW7tRqS3uNtsrY0QZiN07UB4crkCkNholY_WlbjVOM9k2aFrp134YkgXSBFr8bRsTWZgy_sSa3GbOTsTL5qGlNu_jVy3hLRVpBsjh8im74wJ4pykycG6HkEdtfLdfwEd2llT_uZ8YfncQUsQ priority: 102 providerName: Directory of Open Access Journals – databaseName: ProQuest Technology Collection dbid: 8FG link: http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1Lb9QwELagXOCAKM9AiwxC4mQ1fiR2TqivpUIsp1bqzYpfZSWUtPs49N8zk2TTjZA4JYp9mHjG_mbs8TeEfBFKSqlDYLGUkSlX16yWumJVrJVCxiLh8Tby_Fd5caV-XBfXw4bbakir3K6J3UIdWo975EdgKqpU4M_rb7d3DKtG4enqUELjMXnCAWkwpcvMvo8BF4hhejYhCaH90Qrg3iAB-wSDOqr-fxfkHUSaZkvuwM_sBXk--I30uFf0PnkUm5fk2Q6b4CuyuQS9RHaGfP091wadtR4T22_o_GErEN6xaDQFb5XifT8EMzrHvDy8oXJPTwDXAm0b-nNxt1kEerq8Bw_yD8XixWCs8BnCeTpvAxb-apevydXs_PL0gg1VFZiHwV-zlMqkIuB4rMAV4VHIFLTDUp2C-5BEHoLhhS84PF2F7qFQtddFjNIFHYR8Q_aatonvCA3CFyICogUXlUk5uFqmO1rVMRqeZEY-b8fZ3vbkGRaCDlSGHZWRkRPUwNgB-a67D-3yxg7Tx0JUVicnfQSHRakgHa-chqWlKk1yuUkZ-Yr6szgrQUm-Hi4XgJzIb2WPjTR44mh0Rg62KrbDdF3ZB-PKyKexGSYanp7UTWw3XR8kBpIFSPy2t4hRZgjCoSU3GTETW5n81LSlWfzuyLy5QMYgXrz_v1wfyFOBlYdzxQQ_IHvr5SYegju0dh87m_8LeZMMVQ priority: 102 providerName: ProQuest |
| Title | Three-Dimensional Focusing Measurement Method for Confocal Microscopy Based on Liquid Crystal Spatial Light Modulator |
| URI | https://www.ncbi.nlm.nih.gov/pubmed/40285308 https://www.proquest.com/docview/3194641497 https://www.proquest.com/docview/3195785350 https://pubmed.ncbi.nlm.nih.gov/PMC12030815 https://doaj.org/article/996afb3ce82044d3b19b7793968fb08f |
| Volume | 25 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwjV3Pb9MwFLb24wIHxG8yRmUQEidDYjuxc0BoHSsTIhNCq9RbFMf2qDQlLGul9b_nvSQNjeDApaniRHXzPft7L_b7HiFvuRRCKGuZS4Rj0hQFK4RKWeoKKVGxiJeYjZxdJOdz-XURL_bItsZm_wBv_xnaYT2peXP9_u5m8wkG_EeMOCFk_3ALNK5RWH2fHAIhKSxkkMlhMYFDb9qMOMklAz4MO4Gh8a0jWmrV-_-eo3dIaryBcoeRZg_Jg96VpCcd9o_Inqsek_s7AoNPyPoSoHLsM0r4d_IbdFaXuNf9imZ_3g7Cd6wjTcGBpZgCiPxGM9yqh0krGzoFqrO0rui35c16aelpswGn8ppiPWOwXzgNET7Naou1wOrmKZnPzi5Pz1lfaIGVgMeKeZ946YDaXQreSeS48FYZrN7Jo9J6Hlqro7iMIziaFD1GLotSxc4JY5Xl4hk5qOrKvSDU8jLmDkjOGie1D8H70u1qq3JOR14E5M32Oee_Oj2NHOIQBCMfwAjIFBEYLkAJ7PZE3Vzl_YjKIVArvBGlAx9GSitMlBoFs02aaG9C7QPyDvHL0XQApLLo8w2gnyh5lZ9ooXERUquAHG8hzrcGmMPUJBMJ8SM0vx6aYezhgkpRuXrdXoNaQSKGHj_vLGLoM8Tl0BLqgOiRrYz-1LilWv5s9b0jjiJCUXz0Hz_8ktzjWJE4lIxHx-Rg1azdK3CTVmZC9tVCwaeefZmQw-nZxfcfk_aVw6QdHr8BqfQV7Q |
| linkProvider | Scholars Portal |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwtV1Lb9QwELaqcgAOiHcDBQwCcbKa2E7iHBDqg2VLd3vaSr2ZxI_tSihp9yG0f4rfyEySTTdC4tZTojhK7Mx4HrHn-wj5yKUQIrWWuUQ4Jos8Z7lIM5a5XEpELOIGq5HH58nwQv64jC93yJ9NLQxuq9zYxNpQ28rgP_IDUBWZSIjn06_XNwxZo3B1dUOh0ajFmVv_hpRt8eX0BOT7ifPBt8nxkLWsAszAy5fM-8RLB37MZeCKI8eFt2mBVJU8Mtbz0FoVxSaO4FhkGB5xmZs0dk4UNrUIdAAm_x6MMcNkTw2-dwkeDFs16EXQGB4sILxQCPje83k1NcC_DmDLA_Z3Z265u8Fj8qiNU-lho1hPyI4rn5KHW-iFz8hqAnrg2AnyAzTYHnRQGdxIP6Xj21-PcI4k1RSiY4r1heg86Rj3AWJFzJoegR-1tCrpaHazmll6PF9DxPqLIlkyTA64PL2Ch1QWicaq-XNycSff-wXZLavS7RFquYm5Aw9qCyeVDyG0U_VSbuqcirwIyIfNd9bXDViHhiQHhaE7YQTkCCXQ3YD42vWFaj7V7XTVkAXmvhDGQYAkpRVFlBUpmLIsUb4IlQ_IZ5SfRisAQjJ5W8wA_UQ8LX2ohMIVTpUGZH8jYt2ah4W-VeaAvO-aYWLjak1eumpV34NARCKGHr9sNKLrMyT90BKqgKiervQG1W8pZ1c1eHjEEaEoil_9v1_vyP3hZDzSo9Pzs9fkAUfW41AyHu2T3eV85d5AKLYs3tb6T8nPu55wfwHZyEmJ |
| linkToPdf | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwtV1La9tAEB6CA6U9lL6jNm23paUnYWl3Za0OpcRxTNLEJpQEclMl7a5jKFLiB8V_rb-uM3rFotBbTjaSMOud1zfamW8APnEphAi1ds1AGFemSeImIozcyCRSEmMRz6gbeTIdHF_K71fB1Q78aXphqKyy8Ymlo9ZFRu_I-6gqciARz4d9W5dFnI_G325uXZogRSetzTiNSkVOzeY3pm_LrycjlPVnzsdHF4fHbj1hwM1wISvX2oGVBmOaiTAs-4YLq8OUxlZyP9OWe1orP8gCHz_TiKASl0kWBsaIVIeaSA_Q_e-GlBX1YHd4ND3_0aZ7uAmq4jISIvL6SwQbiujfOxGwHBTwbzjYiofdWs2t4Dd-Ao9r1MoOKjV7CjsmfwaPtrgMn8P6ArXCuCOaFlAxfbBxkVFZ_YxN7l5E4ncaWc0QKzPqNqRQyiZUFUj9MRs2xKiqWZGzs_nteq7Z4WKD-PUXo9HJaCp4eXaNP1JoGjtWLF7A5b3s-Evo5UVu9oBpngXcYDzVqZHKegj0VHmwGxqjfCsc-Njsc3xTUXfEmPKQMOJWGA4MSQLtA8S2XV4oFrO4Nt4Yc8LEpiIzCJek1CL1ozRExxYNlE09ZR34QvKLySegkLKkbm3AdRK7VnyghKLzThU6sN-IOK6dxTK-U20HPrS30czp7CbJTbEunyFaIhHgil9VGtGuWSJGDISnHFAdXen8qe6dfH5dUon7nPiK_OD1_9f1Hh6gscVnJ9PTN_CQ0whkT7rc34fearE2bxGXrdJ3tQEw-HnfNvcXdjpPGw |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Three-Dimensional+Focusing+Measurement+Method+for+Confocal+Microscopy+Based+on+Liquid+Crystal+Spatial+Light+Modulator&rft.jtitle=Sensors+%28Basel%2C+Switzerland%29&rft.au=Li%2C+Yupeng&rft.au=Li%2C+Yifan&rft.date=2025-04-21&rft.issn=1424-8220&rft.eissn=1424-8220&rft.volume=25&rft.issue=8&rft_id=info:doi/10.3390%2Fs25082620&rft.externalDBID=NO_FULL_TEXT |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=1424-8220&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=1424-8220&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=1424-8220&client=summon |