A Compact Optical MEMS Pressure Sensor Based on Fabry–Pérot Interference

• Published in: Sensors (Basel, Switzerland) Vol. 22; no. 5; p. 1973
• Main Authors: Qi, Yonghong, Zhao, Minghui, Li, Bo, Ren, Ziming, Li, Bing, Wei, Xueyong
• Format: Journal Article
• Language: English
• Published: Switzerland MDPI AG 03.03.2022; MDPI
• Subjects: Design; diaphragm; Fabry–Pérot (FP); Glass substrates; Lasers; Light; MEMS; pressure sensor; Sensors; pressure sensor; diaphragm; Fabry–Pérot (FP); MEMS

Pressure sensors have important prospects in wind pressure monitoring of transmission line towers. Optical pressure sensors are more suitable for transmission line towers due to its anti-electromagnetic interference. However, the fiber pressure sensor is not a suitable choice due to expensive and bu...