Initial oxidation kinetics of Si(113)-(3 × 2) investigated using supersonic seeded molecular beams
[Display omitted] The initial oxidation of silicon surfaces with (113) orientation has been investigated using high-resolution photoelectron spectroscopy with synchrotron radiation. In the present study, we investigated both the Si 2p state and the O 1s state to evaluate the oxide thickness and comp...
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| Published in | Surface Science Vol. 697; p. 121600 |
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| Main Authors | , , , , , |
| Format | Journal Article |
| Language | English |
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Amsterdam
Elsevier B.V
01.07.2020
Elsevier BV |
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The initial oxidation of silicon surfaces with (113) orientation has been investigated using high-resolution photoelectron spectroscopy with synchrotron radiation. In the present study, we investigated both the Si 2p state and the O 1s state to evaluate the oxide thickness and composition, and to assess the strain at the SiO2/Si interface. The oxidized components in the Si 2p state (Si1+, Si2+, Si3+, Si4+) were analyzed. In the O 1s state, a low-binding-energy component (LBC) and a high-binding-energy component (HBC) were analyzed. To investigate the non-thermal oxidation process, we utilized supersonic seeded molecular beam (SSMB) to obtain oxygen molecules with high translational kinetic energies (Et). We demonstrate that the oxide quality and oxidation kinetics are largely altered by changing the value of Et. |
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| AbstractList | The initial oxidation of silicon surfaces with (113) orientation has been investigated using high-resolution photoelectron spectroscopy with synchrotron radiation. In the present study, we investigated both the Si 2p state and the O 1s state to evaluate the oxide thickness and composition, and to assess the strain at the SiO2/Si interface. The oxidized components in the Si 2p state (Si1+, Si2+, Si3+, Si4+) were analyzed. In the O 1s state, a low-binding-energy component (LBC) and a high-binding-energy component (HBC) were analyzed. To investigate the non-thermal oxidation process, we utilized supersonic seeded molecular beam (SSMB) to obtain oxygen molecules with high translational kinetic energies (Et). We demonstrate that the oxide quality and oxidation kinetics are largely altered by changing the value of Et. [Display omitted] The initial oxidation of silicon surfaces with (113) orientation has been investigated using high-resolution photoelectron spectroscopy with synchrotron radiation. In the present study, we investigated both the Si 2p state and the O 1s state to evaluate the oxide thickness and composition, and to assess the strain at the SiO2/Si interface. The oxidized components in the Si 2p state (Si1+, Si2+, Si3+, Si4+) were analyzed. In the O 1s state, a low-binding-energy component (LBC) and a high-binding-energy component (HBC) were analyzed. To investigate the non-thermal oxidation process, we utilized supersonic seeded molecular beam (SSMB) to obtain oxygen molecules with high translational kinetic energies (Et). We demonstrate that the oxide quality and oxidation kinetics are largely altered by changing the value of Et. |
| ArticleNumber | 121600 |
| Author | Yoshigoe, A. Kodama, H. Ohno, S. Tanaka, K. Teraoka, Y. Tanaka, M. |
| Author_xml | – sequence: 1 givenname: S. surname: Ohno fullname: Ohno, S. email: ohno-shinya-mv@ynu.ac.jp organization: Department of Physics, Faculty of Engineering, Yokohama National University, 79-5 Tokiwadai, Hodogaya-ku, Yokohama 240–8501, Japan – sequence: 2 givenname: K. surname: Tanaka fullname: Tanaka, K. organization: Department of Physics, Faculty of Engineering, Yokohama National University, 79-5 Tokiwadai, Hodogaya-ku, Yokohama 240–8501, Japan – sequence: 3 givenname: H. surname: Kodama fullname: Kodama, H. organization: Department of Physics, Faculty of Engineering, Yokohama National University, 79-5 Tokiwadai, Hodogaya-ku, Yokohama 240–8501, Japan – sequence: 4 givenname: M. surname: Tanaka fullname: Tanaka, M. organization: Department of Physics, Faculty of Engineering, Yokohama National University, 79-5 Tokiwadai, Hodogaya-ku, Yokohama 240–8501, Japan – sequence: 5 givenname: A. surname: Yoshigoe fullname: Yoshigoe, A. organization: Materials Sciences Research Center, Japan Atomic Energy Agency, 1-1-1 Kouto, Sayo, Hyogo 679–5148, Japan – sequence: 6 givenname: Y. surname: Teraoka fullname: Teraoka, Y. organization: Materials Sciences Research Center, Japan Atomic Energy Agency, 1-1-1 Kouto, Sayo, Hyogo 679–5148, Japan |
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The initial oxidation of silicon surfaces with (113) orientation has been investigated using high-resolution photoelectron spectroscopy with... The initial oxidation of silicon surfaces with (113) orientation has been investigated using high-resolution photoelectron spectroscopy with synchrotron... |
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| SubjectTerms | Binding Binding energy Molecular beam Molecular beams Oxidation Photoelectrons Reaction kinetics Real-time monitoring Si surface Silicon dioxide Synchrotron radiation Synchrotrons XPS |
| Title | Initial oxidation kinetics of Si(113)-(3 × 2) investigated using supersonic seeded molecular beams |
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