Evaluation of arsenical emission from semiconductor and opto-electronics facilities in Hsinchu, Taiwan

• Published in: Atmospheric environment (1994) Vol. 40; no. 10; pp. 1901 - 1907
• Main Authors: Chein, HungMin, Hsu, Yu-Du, Aggarwal, Shankar G., Chen, Tzu-Ming, Huang, Chun-Chao
• Format: Journal Article
• Language: English
• Published: Oxford Elsevier Ltd 01.03.2006; Elsevier Science
• Subjects: Air. Soil. Water. Waste. Feeding; Ambient concentration; Applied sciences; Arsenical emission; Atmospheric pollution; Biological and medical sciences; Environment. Living conditions; Exact sciences and technology; Medical sciences; Other pollution sources in industry; Pollution; Pollution sources. Measurement results; Public health. Hygiene; Public health. Hygiene-occupational medicine; Risk assessment; Semiconductor and opto-electronics facilities; Asia; Taiwan; Ambient concentration; Arsenical emission; Risk assessment; Semiconductor and opto-electronics facilities; Optoelectronics; Semiconductor materials; Arsenic compound; Microelectronics; Gaseous effluent; Health and environment; Electronics industry; Health hazards; Aerosols; Air pollution; Industrial area; Emission measure; Gas phase; Public health

Semiconductor and opto-electronics industries use many chemicals including arsenics in manufacturing processes. Thus, the process vent stream contains toxic air pollutants including arsine and other arsenic compounds, and poses a potential source for the atmospheric arsenic. Limited data are publish...