Direct optical lithography of functional inorganic nanomaterials - Wang, Yuanyuan; Fedin, Igor; Zhang, Hao; Talapin, Dmitri V. (Science (American Association for the Advancement of Science), 2017)
Keywords: Carrier mobility; Crystals; Dielectric properties; Formulations; Impurities; Light; Lithography; Luminescence; Magnetic semiconductors; Manufacturing; Manufacturing industry; Metals; Nanocrystals; Nanomaterials; Nanotechnology; Optical properties; Oxides; Patterning; Photolithography; Photoresists; Polymers; Rare earth compounds; Solubility; Thin films; Ultraviolet radiation