Thermal Evolution of WC/C Nanostructured Coatings by Raman and In Situ XRD Analysis
In this work, a series of WC/C nanostructured films were deposited on silicon substrates by changing the ratio of sputtering power applied to graphite and WC magnetron sources (PC/PWC: 0, 0.1, 0.5, 1). The thermal stability of WC/C coatings was followed in situ by means of X‐ray diffraction measurem...
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Published in | Plasma processes and polymers Vol. 6; no. S1; pp. S444 - S449 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
Weinheim
WILEY-VCH Verlag
01.06.2009
WILEY‐VCH Verlag |
Subjects | |
Online Access | Get full text |
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Summary: | In this work, a series of WC/C nanostructured films were deposited on silicon substrates by changing the ratio of sputtering power applied to graphite and WC magnetron sources (PC/PWC: 0, 0.1, 0.5, 1). The thermal stability of WC/C coatings was followed in situ by means of X‐ray diffraction measurements up to 1 100 °C in vacuum (10−1 Pa). Initially, the film microstructure is composed of nanocrystalline WC1−x and W2C phases. As the PC/PWC ratio increases the crystallinity decreases, and WC1−x becomes the predominant phase from PC/PWC = 0.1. The results show that the structural evolution with temperature of all studied layers depends essentially on their initial phase and chemical composition (determined by the synthesis conditions: ratio PC/PWC). The coating deposited at PC/PWC = 0 reveals a transformation of W2C phase into W and W3C phases at 400 °C. However, the samples with PC/PWC greater than 0 exhibits an improved thermal stability up to 600–700 °C where the WC1−x begins to transform into W2C and WC phases. At 900 °C, WC is the predominant phase, especially for those coatings prepared with higher ratios. Further annealing above 1 000 °C yields W as the foremost phase. The thermal behaviour was later studied by means of Raman spectroscopy measurements at certain temperatures where the main changes in phase composition were observed. Particularly, a fitting analysis was carried out on the D and G bands typical of disordered and amorphous carbon. The changes induced during heating are discussed in terms of the positions of D and G lines, and full width at half maximum (FWHM). |
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Bibliography: | ArticleID:PPAP200931004 Spanish Ministery of Science and Innovation - No. MAT2004-01052; No. MAT2007-66881-C02-01; No. CONSOLIDER CSD2008-00023 istex:3013E81EC9B99FA76ADADB84AD9791A59ADD1EEB I3 programme of CSIC and European Union - No. NOE EXCELL NMP3-CT-2005-515703 ark:/67375/WNG-Q1PQXMBN-M ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
ISSN: | 1612-8850 1612-8869 |
DOI: | 10.1002/ppap.200931004 |