Potassium persulfate as an oxidizer in chemical mechanical polishing slurries relevant for copper interconnects with cobalt barrier layers - Zhang, Lifei; Wang, Tongqing; Lu, Xinchun (Journal of materials science, 2020)
Keywords: Barrier layers; Benzotriazole; Characterization and Evaluation of Materials; Chemical-mechanical polishing; Chemistry and Materials Science; Classical Mechanics; Cobalt; Copper; copper nanoparticles; Crystallography and Scattering Methods; Electronic Materials; Etching; Hydrogen peroxide; Interconnections; Materials Science; Morphology; oxidants; Peroxides; Photoelectrons; Polymer Sciences; Potassium; Potassium persulfate; scanning electron microscopy; Selectivity; Silica; Silicon dioxide; Slurries; Solid Mechanics; triazoles; X-ray photoelectron spectroscopy; X-ray spectroscopy