An abrasive-free chemical polishing method assisted by nickel catalyst generated by in situ electrochemical plating

• Published in: Review of scientific instruments Vol. 91; no. 4; p. 045108
• Main Authors: Toh, Daisetsu, Van Bui, Pho, Isohashi, Ai, Matsuyama, Satoshi, Yamauchi, Kazuto, Sano, Yasuhisa
• Format: Journal Article
• Language: English
• Published: United States 01.04.2020

An abrasive-free polishing method using water and a Pt catalyst, called catalyst-referred etching (CARE), has been developed for the finishing of optical and semiconductor surfaces. This method realizes well-ordered surfaces with a smoothness of several tens of picometers without crystallographic di...