An abrasive-free chemical polishing method assisted by nickel catalyst generated by in situ electrochemical plating

An abrasive-free polishing method using water and a Pt catalyst, called catalyst-referred etching (CARE), has been developed for the finishing of optical and semiconductor surfaces. This method realizes well-ordered surfaces with a smoothness of several tens of picometers without crystallographic di...

Full description

Saved in:
Bibliographic Details
Published inReview of scientific instruments Vol. 91; no. 4; p. 045108
Main Authors Toh, Daisetsu, Van Bui, Pho, Isohashi, Ai, Matsuyama, Satoshi, Yamauchi, Kazuto, Sano, Yasuhisa
Format Journal Article
LanguageEnglish
Published United States 01.04.2020
Online AccessGet more information

Cover

Abstract An abrasive-free polishing method using water and a Pt catalyst, called catalyst-referred etching (CARE), has been developed for the finishing of optical and semiconductor surfaces. This method realizes well-ordered surfaces with a smoothness of several tens of picometers without crystallographic disturbance. In this study, we propose a new CARE method using a Ni catalyst with in situ electrochemical plating and dissolution, which enable enhancing the catalytic capability of Ni. This method has advantages to realize more than ten times higher removal rate and better stability compared with the conventional CARE method.
AbstractList An abrasive-free polishing method using water and a Pt catalyst, called catalyst-referred etching (CARE), has been developed for the finishing of optical and semiconductor surfaces. This method realizes well-ordered surfaces with a smoothness of several tens of picometers without crystallographic disturbance. In this study, we propose a new CARE method using a Ni catalyst with in situ electrochemical plating and dissolution, which enable enhancing the catalytic capability of Ni. This method has advantages to realize more than ten times higher removal rate and better stability compared with the conventional CARE method.
Author Matsuyama, Satoshi
Toh, Daisetsu
Sano, Yasuhisa
Van Bui, Pho
Yamauchi, Kazuto
Isohashi, Ai
Author_xml – sequence: 1
  givenname: Daisetsu
  orcidid: 0000000338804154
  surname: Toh
  fullname: Toh, Daisetsu
  organization: Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
– sequence: 2
  givenname: Pho
  orcidid: 000000023107733X
  surname: Van Bui
  fullname: Van Bui, Pho
  organization: Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
– sequence: 3
  givenname: Ai
  surname: Isohashi
  fullname: Isohashi, Ai
  organization: Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
– sequence: 4
  givenname: Satoshi
  orcidid: 0000000195679690
  surname: Matsuyama
  fullname: Matsuyama, Satoshi
  organization: Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
– sequence: 5
  givenname: Kazuto
  surname: Yamauchi
  fullname: Yamauchi, Kazuto
  organization: Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
– sequence: 6
  givenname: Yasuhisa
  surname: Sano
  fullname: Sano, Yasuhisa
  organization: Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
BackLink https://www.ncbi.nlm.nih.gov/pubmed/32357724$$D View this record in MEDLINE/PubMed
BookMark eNpFz81KAzEUBeAgiv3RhS8geYGpuUkm01mW4h8U3Oi63MncdKKZTJmkQt_eghXP5iwOfHBm7DIOkRi7A7EAYdQDLErQoJZwwaYglnVRGakmbJbSpzilBLhmEyVVWVVST1laRY7NiMl_U-FGIm476r3FwPdD8Knzccd7yt3QckzJp0wtb448evtFgVvMGI4p8x1FGvE8-siTzwdOgWweh38xYD55N-zKYUh0e-45-3h6fF-_FJu359f1alNYbWQupMS2lAKUALSOwIKuNLZGCbkkkISIULvaaiFQt6Y2TVUKNM4Z7WSNUs7Z_a-7PzQ9tdv96Hscj9u_9_IH65Bclg
CitedBy_id crossref_primary_10_1063_5_0078593
crossref_primary_10_1088_1742_6596_1973_1_012087
crossref_primary_10_1016_j_cirpj_2023_09_001
crossref_primary_10_1016_j_ijmecsci_2023_108374
crossref_primary_10_1016_j_mssp_2024_108232
crossref_primary_10_1016_j_precisioneng_2023_07_003
ContentType Journal Article
DBID NPM
DOI 10.1063/1.5141381
DatabaseName PubMed
DatabaseTitle PubMed
DatabaseTitleList PubMed
Database_xml – sequence: 1
  dbid: NPM
  name: PubMed
  url: https://proxy.k.utb.cz/login?url=http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed
  sourceTypes: Index Database
DeliveryMethod no_fulltext_linktorsrc
Discipline Sciences (General)
EISSN 1089-7623
ExternalDocumentID 32357724
Genre Journal Article
GroupedDBID ---
-DZ
-~X
.DC
123
1UP
2-P
29P
4.4
53G
5RE
5VS
85S
A9.
AAAAW
AABDS
AAEUA
AAPUP
AAYIH
ABFTF
ABJNI
ACBEA
ACBRY
ACGFO
ACGFS
ACLYJ
ACNCT
ACZLF
ADCTM
ADIYS
AEGXH
AEJMO
AENEX
AFATG
AFHCQ
AGKCL
AGLKD
AGMXG
AGTJO
AHSDT
AIAGR
AJJCW
AJQPL
ALEPV
ALMA_UNASSIGNED_HOLDINGS
AQWKA
ATXIE
AWQPM
BDMKI
BPZLN
CS3
DU5
EBS
ESX
F5P
FDOHQ
FFFMQ
HAM
L7B
M43
M6X
M71
M73
N9A
NPM
NPSNA
O-B
P2P
RIP
RNS
RQS
TAE
TN5
VQA
WH7
XSW
YNT
YZZ
~02
ID FETCH-LOGICAL-c462t-22ad5201301acfe1c1474ad63028e12eaaa19f9c400a4d696b750a6ff64f29a22
IngestDate Sat Sep 28 08:27:31 EDT 2024
IsDoiOpenAccess false
IsOpenAccess true
IsPeerReviewed true
IsScholarly true
Issue 4
Language English
LinkModel OpenURL
MergedId FETCHMERGED-LOGICAL-c462t-22ad5201301acfe1c1474ad63028e12eaaa19f9c400a4d696b750a6ff64f29a22
ORCID 0000000195679690
0000000338804154
000000023107733X
OpenAccessLink https://hdl.handle.net/11094/86964
PMID 32357724
ParticipantIDs pubmed_primary_32357724
PublicationCentury 2000
PublicationDate 2020-04-01
PublicationDateYYYYMMDD 2020-04-01
PublicationDate_xml – month: 04
  year: 2020
  text: 2020-04-01
  day: 01
PublicationDecade 2020
PublicationPlace United States
PublicationPlace_xml – name: United States
PublicationTitle Review of scientific instruments
PublicationTitleAlternate Rev Sci Instrum
PublicationYear 2020
SSID ssj0000511
Score 2.3922408
Snippet An abrasive-free polishing method using water and a Pt catalyst, called catalyst-referred etching (CARE), has been developed for the finishing of optical and...
SourceID pubmed
SourceType Index Database
StartPage 045108
Title An abrasive-free chemical polishing method assisted by nickel catalyst generated by in situ electrochemical plating
URI https://www.ncbi.nlm.nih.gov/pubmed/32357724
Volume 91
hasFullText
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1NT9wwELWWIlVcqkLpd5EPHFpFoRvH6yTHpWqFkOAEEjfkeG0RqWRRkz0sf4U_25mMnQ1bqFouURQn0SrzPH6enXnD2L6xDqMTML91nsYyl0VcmrSIZxNtYPUrU5lj7fDJqTo6l8cXk4vR6G6QtbRoywNz-2BdyVOsCtfArlgl-x-W7V8KF-Ac7AtHsDAc_8nG0zrSsNvFDPTY_bI2MqH8H3svUHCJWkRHwJHRoB3drCuYuj-jLnKzbFrsoozSyjRY1VFTtYvI98dZvRGT5vwyFwS9-7IXKqvErCNMbm9RkMFLRFEE-4rS56vGttRoxff4ig4XFYV15iuMzq-wwVPntKpVwBweXOprTVHsdg53DAMWYjzIc7HkZMd5EYMTTodemHp2ebTJgUtFAZxO-uFPbw_0CgMPB0D6kpQ6vwysfnPdmT1FQZ-MCrX_PromvB2GNthGlqMLPcVAUFjkgagGoSqVfu1_wxZ7Hp5b26h0hOXsJXvhdxp8SrDZZiNb77Bt78sb_tkLjn95xZppze_hiAer8x5HnHDEA454ueSEIx5wxHsc4WBVc8QRX8MR9zjaZec_vp99O4p9M47YSCXaWAg9mwj8nzvRxtnEJDKTeqZSIKg2EVZrnRSuMLAmaDlThSqBi2rlnJJOFFqI1-xZPa_tW8ZVMXZWAy9PhJMlqgE5bYF5jl2Wgcdw79gb-nCXN6S4chk-6ftHRz6wrRXWPrJNB1PcfgK-2JZ7neV-A6pNb5s
link.rule.ids 783
linkProvider National Library of Medicine
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=An+abrasive-free+chemical+polishing+method+assisted+by+nickel+catalyst+generated+by+in+situ+electrochemical+plating&rft.jtitle=Review+of+scientific+instruments&rft.au=Toh%2C+Daisetsu&rft.au=Van+Bui%2C+Pho&rft.au=Isohashi%2C+Ai&rft.au=Matsuyama%2C+Satoshi&rft.date=2020-04-01&rft.eissn=1089-7623&rft.volume=91&rft.issue=4&rft.spage=045108&rft_id=info:doi/10.1063%2F1.5141381&rft_id=info%3Apmid%2F32357724&rft_id=info%3Apmid%2F32357724&rft.externalDocID=32357724