Additive-Driven Phase-Selective Chemistry in Block Copolymer Thin Films: The Convergence of Top-Down and Bottom-Up Approaches

Several strategies are demonstrated for the use of additive‐driven chemistries that take place in only one type of the nanosized domains of all‐organic and organic–inorganic hybrid block copolymer thin films. Such an approach is used to examine the convergence of “top–down” and “bottom–up” fabricati...

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Published inAdvanced materials (Weinheim) Vol. 16; no. 12; pp. 953 - 957
Main Authors Du, P., Li, M., Douki, K., Li, X., Garcia, C. B. W., Jain, A., Smilgies, D.-M., Fetters, L. J., Gruner, S. M., Wiesner, U., Ober, C. K.
Format Journal Article
LanguageEnglish
Published Weinheim WILEY-VCH Verlag 17.06.2004
WILEY‐VCH Verlag
Subjects
Block copolymers
Lithography
Thin films
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Summary:Several strategies are demonstrated for the use of additive‐driven chemistries that take place in only one type of the nanosized domains of all‐organic and organic–inorganic hybrid block copolymer thin films. Such an approach is used to examine the convergence of “top–down” and “bottom–up” fabrication via light‐driven processes. Characterization is carried out with microscopies and grazing‐incidence small‐angle X‐ray scattering (see Figure and cover).
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We gratefully thank Dr. Kathryn W. Guarini and Dr. Charles T. Black for helpful discussions, Dr. Jochen S. Gutmann for stimulating discussions about GISAXS data collection and interpretation and Dr. Ernest Fontes for his help with the CHESS experimental setup and support. The financial support by the Cornell Center for Materials Research (CCMR), a Materials Research Science and Engineering Center of the National Science Foundation (DMR-0079992), the NSF-funded Cornell NIRT (ECS-0103297-NIRT), the National Science Foundation (Grants DMR-0072009 and DMR-0072009), the IBM Faculty Partnership Program, and JSR Corporation is acknowledged. CHESS is a national user facility supported by NSF/NIH-NIGMH grant DMR-9713424. This work was supported in part by the Nanobiotechnology Center (NBTC), an STC Program of the National Science Foundation under Agreement No. ECS-9876771.
We gratefully thank Dr. Kathryn W. Guarini and Dr. Charles T. Black for helpful discussions, Dr. Jochen S. Gutmann for stimulating discussions about GISAXS data collection and interpretation and Dr. Ernest Fontes for his help with the CHESS experimental setup and support. The financial support by the Cornell Center for Materials Research (CCMR), a Materials Research Science and Engineering Center of the National Science Foundation (DMR‐0079992), the NSF‐funded Cornell NIRT (ECS‐0103297‐NIRT), the National Science Foundation (Grants DMR‐0072009 and DMR‐0072009), the IBM Faculty Partnership Program, and JSR Corporation is acknowledged. CHESS is a national user facility supported by NSF/NIH‐NIGMH grant DMR‐9713424. This work was supported in part by the Nanobiotechnology Center (NBTC), an STC Program of the National Science Foundation under Agreement No. ECS‐9876771.
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ISSN:0935-9648
1521-4095
DOI:10.1002/adma.200306189