Characterization of very low thermal conductivity thin films

• Published in: Journal of thermal analysis and calorimetry Vol. 115; no. 2; pp. 1541 - 1550
• Main Authors: Alam, M. T., King, S., Haque, M. A.
• Format: Journal Article
• Language: English
• Published: Dordrecht Springer Netherlands 01.02.2014; Springer
• Subjects: Analysis; Analytical Chemistry; Chemical properties; Chemistry; Chemistry and Materials Science; Convective heat transfer; Dielectric constant; Dielectric films; Heat transfer; Inorganic Chemistry; Measurement Science and Instrumentation; Nanostructure; Oxide coatings; Physical Chemistry; Polymer Sciences; Silica; Temperature distribution; Thermal conductivity; Thin films; Infrared thermography; Thermal conductivity; Carbon doped oxide; Low dielectric constant materials

Characterization of thermal transport in nanoscale thin films with very low thermal conductivity (<1 W m −1 K −1 ) is challenging due to the difficulties in accurately measuring spatial variations in temperature field as well as the heat losses. In this paper, we present a new experimental techni...