Induction of ferroelectricity in nanoscale ZrO2 thin films on Pt electrode without post-annealing - Lin, Bo-Ting; Lu, Yu-Wei; Shieh, Jay; Chen, Miin-Jang (Journal of the European Ceramic Society, 2017)
Keywords: Atomic layer deposition; Ferroelectricity; TEM; Thin films; Zirconia; Zirconia; Thin films; Ferroelectricity; Atomic layer deposition; TEM