Quantification of the Electromechanical Measurements by Piezoresponse Force Microscopy

• Published in: Advanced materials (Weinheim) Vol. 34; no. 47; pp. e2206237 - n/a
• Main Authors: Buragohain, Pratyush, Lu, Haidong, Richter, Claudia, Schenk, Tony, Kariuki, Pamenas, Glinsek, Sebastjan, Funakubo, Hiroshi, Íñiguez, Jorge, Defay, Emmanuel, Schroeder, Uwe, Gruverman, Alexei
• Format: Journal Article
• Language: English
• Published: Weinheim Wiley Subscription Services, Inc 01.11.2022
• Subjects: Capacitors; Coefficients; ferroelectric hafnium oxide; Ferroelectric materials; Ferroelectricity; Ferroelectrics; Hafnium oxide; Materials science; Microscopy; negative piezoelectric coefficient; PFM quantification; Piezoelectricity; piezoresponse force microscopy; Thin films

Piezoresponse force microscopy (PFM) is widely used for characterization and exploration of the nanoscale properties of ferroelectrics. However, quantification of the PFM signal is challenging due to the convolution of various extrinsic and intrinsic contributions. Although quantification of the PFM...