Ion-Beam Synthesis of Gallium Oxide Nanocrystals in a SiO2/Si Dielectric Matrix
A new method for creating nanomaterials based on gallium oxide by ion-beam synthesis of nanocrystals of this compound in a SiO2/Si dielectric matrix has been proposed. The influence of the order of irradiation with ions of phase-forming elements (gallium and oxygen) on the chemical composition of im...
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Published in | Nanomaterials (Basel, Switzerland) Vol. 12; no. 11; p. 1840 |
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Main Authors | , , , , , , , , , , , |
Format | Journal Article |
Language | English |
Published |
Basel
MDPI AG
27.05.2022
MDPI |
Subjects | |
Online Access | Get full text |
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