Design, Fabrication, Testing and Simulation of a Rotary Double Comb Drives Actuated Microgripper

• Published in: Micromachines (Basel) Vol. 12; no. 10; p. 1263
• Main Authors: Belfiore, Nicola Pio, Bagolini, Alvise, Rossi, Andrea, Bocchetta, Gabriele, Vurchio, Federica, Crescenzi, Rocco, Scorza, Andrea, Bellutti, Pierluigi, Sciuto, Salvatore Andrea
• Format: Journal Article
• Language: English
• Published: Basel MDPI AG 17.10.2021; MDPI
• Subjects: comb drives; compliant mechanisms; Design; Design parameters; DRIE; Etching; Flexing; Investigations; Kinematics; MEMS; microgripper; Reactive ion etching; Silicon wafers; Simulation; Vibration

This paper presents the development of a new microgripper actuated by means of rotary-comb drives equipped with two cooperating fingers arrays. The microsystem presents eight CSFH flexures (Conjugate Surface Flexure Hinge) that allow the designer to assign a prescribed motion to the gripping tips. I...