The Evolution of Manufacturing Technology for GaN Electronic Devices - Liu, An-Chen; Tu, Po-Tsung; Langpoklakpam, Catherine; Huang, Yu-Wen; Chang, Ya-Ting; Tzou, An-Jye; Hsu, Lung-Hsing; Lin, Chun-Hsiung; Kuo, Hao-Chung; Chang, Edward Yi (Micromachines (Basel), 2021)
Keywords: 5G mobile communication; CMOS; CMOS-compatible Au-free process; Commercialization; Communication; Contact resistance; Efficiency; Electronic devices; Energy; Evolution; gallium nitride; Gallium nitrides; Gold; High electron mobility transistors; high-electron mobility transistor; Manufacturing; Metallizing; Millimeter waves; MIS (semiconductors); Power amplifiers; R&D; Radio frequency; Receivers & amplifiers; Research & development; Review; Transistors