Hybrid Cell Structure for Wideband CMUT: Design Method and Characteristic Analysis

• Published in: Micromachines (Basel) Vol. 12; no. 10; p. 1180
• Main Authors: Wang, Hongliang, Huang, Xiao, Yu, Lijun, Ding, Qi, Zhang, Hanqiang, He, Changde, Zhang, Wendong
• Format: Journal Article
• Language: English
• Published: Basel MDPI AG 29.09.2021; MDPI
• Subjects: Bandwidths; Broadband; characteristic analysis; Design analysis; Design techniques; Electrodes; Flow measurement; hybrid cell structure; Manufacturing; Microelectromechanical systems; Micromachining; Nondestructive testing; Parameters; Silicon nitride; Simulation; Ultrasonic imaging; Ultrasonic testing; Ultrasonic transducers; wideband CMUT

Capacitive micromachined ultrasonic transducer (CMUT) is an ultrasonic transducer based on the microelectromechanical system (MEMS). Wideband CMUT has good application prospects in ultrasonic imaging, ultrasonic identification, flow measurement, and nondestructive testing due to its excellent charac...