Hybrid Cell Structure for Wideband CMUT: Design Method and Characteristic Analysis

Capacitive micromachined ultrasonic transducer (CMUT) is an ultrasonic transducer based on the microelectromechanical system (MEMS). Wideband CMUT has good application prospects in ultrasonic imaging, ultrasonic identification, flow measurement, and nondestructive testing due to its excellent charac...

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Published inMicromachines (Basel) Vol. 12; no. 10; p. 1180
Main Authors Wang, Hongliang, Huang, Xiao, Yu, Lijun, Ding, Qi, Zhang, Hanqiang, He, Changde, Zhang, Wendong
Format Journal Article
LanguageEnglish
Published Basel MDPI AG 29.09.2021
MDPI
Subjects
Bandwidths
Broadband
characteristic analysis
Design analysis
Design techniques
Electrodes
Flow measurement
hybrid cell structure
Manufacturing
Microelectromechanical systems
Micromachining
Nondestructive testing
Parameters
Silicon nitride
Simulation
Ultrasonic imaging
Ultrasonic testing
Ultrasonic transducers
wideband CMUT
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Abstract Capacitive micromachined ultrasonic transducer (CMUT) is an ultrasonic transducer based on the microelectromechanical system (MEMS). Wideband CMUT has good application prospects in ultrasonic imaging, ultrasonic identification, flow measurement, and nondestructive testing due to its excellent characteristics. This paper studies the method of increasing the bandwidth of the CMUT, proposes the structure of the wideband CMUT with a hybrid cell structure, and analyzes the design principles and characteristics of the wideband CMUT structure. By changing the cell spacing and the number of cells of different sizes composing the CMUT, we analyze the simulation of the effect of the spacing and number on the CMUT bandwidth, thereby optimizing the bandwidth characteristics of the CMUT. Next, the selection principle of the main structural parameters of the wideband CMUT is analyzed. According to the proposed principle, the CMUT in the air and water are designed and simulated. The results prove that both the air and water CMUT meet the design requirements. The design rules obtained in this paper can provide theoretical guidance for the selection of the main structural parameters of the wideband CMUT.
AbstractList Capacitive micromachined ultrasonic transducer (CMUT) is an ultrasonic transducer based on the microelectromechanical system (MEMS). Wideband CMUT has good application prospects in ultrasonic imaging, ultrasonic identification, flow measurement, and nondestructive testing due to its excellent characteristics. This paper studies the method of increasing the bandwidth of the CMUT, proposes the structure of the wideband CMUT with a hybrid cell structure, and analyzes the design principles and characteristics of the wideband CMUT structure. By changing the cell spacing and the number of cells of different sizes composing the CMUT, we analyze the simulation of the effect of the spacing and number on the CMUT bandwidth, thereby optimizing the bandwidth characteristics of the CMUT. Next, the selection principle of the main structural parameters of the wideband CMUT is analyzed. According to the proposed principle, the CMUT in the air and water are designed and simulated. The results prove that both the air and water CMUT meet the design requirements. The design rules obtained in this paper can provide theoretical guidance for the selection of the main structural parameters of the wideband CMUT.
Capacitive micromachined ultrasonic transducer (CMUT) is an ultrasonic transducer based on the microelectromechanical system (MEMS). Wideband CMUT has good application prospects in ultrasonic imaging, ultrasonic identification, flow measurement, and nondestructive testing due to its excellent characteristics. This paper studies the method of increasing the bandwidth of the CMUT, proposes the structure of the wideband CMUT with a hybrid cell structure, and analyzes the design principles and characteristics of the wideband CMUT structure. By changing the cell spacing and the number of cells of different sizes composing the CMUT, we analyze the simulation of the effect of the spacing and number on the CMUT bandwidth, thereby optimizing the bandwidth characteristics of the CMUT. Next, the selection principle of the main structural parameters of the wideband CMUT is analyzed. According to the proposed principle, the CMUT in the air and water are designed and simulated. The results prove that both the air and water CMUT meet the design requirements. The design rules obtained in this paper can provide theoretical guidance for the selection of the main structural parameters of the wideband CMUT.Capacitive micromachined ultrasonic transducer (CMUT) is an ultrasonic transducer based on the microelectromechanical system (MEMS). Wideband CMUT has good application prospects in ultrasonic imaging, ultrasonic identification, flow measurement, and nondestructive testing due to its excellent characteristics. This paper studies the method of increasing the bandwidth of the CMUT, proposes the structure of the wideband CMUT with a hybrid cell structure, and analyzes the design principles and characteristics of the wideband CMUT structure. By changing the cell spacing and the number of cells of different sizes composing the CMUT, we analyze the simulation of the effect of the spacing and number on the CMUT bandwidth, thereby optimizing the bandwidth characteristics of the CMUT. Next, the selection principle of the main structural parameters of the wideband CMUT is analyzed. According to the proposed principle, the CMUT in the air and water are designed and simulated. The results prove that both the air and water CMUT meet the design requirements. The design rules obtained in this paper can provide theoretical guidance for the selection of the main structural parameters of the wideband CMUT.
Author Wang, Hongliang
Huang, Xiao
Zhang, Hanqiang
Zhang, Wendong
Yu, Lijun
Ding, Qi
He, Changde
AuthorAffiliation National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, North University of China, Taiyuan 030051, China; huangxiao.nuc.edu@outlook.com (X.H.); weilijun1997@foxmail.com (L.Y.); S1906184@st.nuc.edu.cn (Q.D.); zhqhmz@foxmail.com (H.Z.); hechangde@nuc.edu.cn (C.H.); wdzhang@nuc.edu.cn (W.Z.)
AuthorAffiliation_xml – name: National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, North University of China, Taiyuan 030051, China; huangxiao.nuc.edu@outlook.com (X.H.); weilijun1997@foxmail.com (L.Y.); S1906184@st.nuc.edu.cn (Q.D.); zhqhmz@foxmail.com (H.Z.); hechangde@nuc.edu.cn (C.H.); wdzhang@nuc.edu.cn (W.Z.)
Author_xml – sequence: 1
  givenname: Hongliang
  surname: Wang
  fullname: Wang, Hongliang
– sequence: 2
  givenname: Xiao
  surname: Huang
  fullname: Huang, Xiao
– sequence: 3
  givenname: Lijun
  surname: Yu
  fullname: Yu, Lijun
– sequence: 4
  givenname: Qi
  surname: Ding
  fullname: Ding, Qi
– sequence: 5
  givenname: Hanqiang
  surname: Zhang
  fullname: Zhang, Hanqiang
– sequence: 6
  givenname: Changde
  orcidid: 0000-0001-9897-1718
  surname: He
  fullname: He, Changde
– sequence: 7
  givenname: Wendong
  orcidid: 0000-0003-1762-9246
  surname: Zhang
  fullname: Zhang, Wendong
BookMark eNptkV1LHDEUhkOxVGu96S8Y6E0pbM3XZDK9KMjWVkERWqW9C_k42c0yO9EkI-y_b3SlVjEXSTjvc15eznmLdsY4AkLvCf7MWI8P14FQggmR-BXao7ijMyHEn53__rvoIOcVrqfr-nq9QbuMC8koI3vo58nGpOCaOQxD86ukyZYpQeNjan4HB0aPVTu_uvzSfIMcFmNzDmUZXXNfX-qkbYEUcgm2ORr1sMkhv0OvvR4yHDy8--jq-_Hl_GR2dvHjdH50NrOc92Vmfc-7VnMutBFgnfES944B88YDpVr2nLeUaU6kdb3VxglbZSvBtbTzhO2j062vi3qlrlNY67RRUQd1X4hpoXSqwQZQQrYedx4LQ3qOCchWdlZjwo3vKDO-en3del1PZg3OwliSHp6YPlXGsFSLeKtky7GgvBp8fDBI8WaCXNQ6ZFuHqkeIU1a0lbyTrGesoh-eoas4pTq8LcVbToio1KctZVPMOYH_F4Zgdbd59bj5CuNnsA1FlxDvwobhpZa_ISawbg
CitedBy_id crossref_primary_10_3390_mi15081001
crossref_primary_10_1109_ACCESS_2024_3359906
crossref_primary_10_3390_mi13111827
crossref_primary_10_1016_j_sna_2022_113965
crossref_primary_10_3390_s24103155
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ContentType Journal Article
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– notice: 2021 by the authors. 2021
DBID AAYXX
CITATION
7SP
7TB
8FD
8FE
8FG
ABJCF
ABUWG
AFKRA
AZQEC
BENPR
BGLVJ
CCPQU
DWQXO
FR3
HCIFZ
L6V
L7M
M7S
PHGZM
PHGZT
PIMPY
PKEHL
PQEST
PQGLB
PQQKQ
PQUKI
PRINS
PTHSS
7X8
5PM
DOA
DOI 10.3390/mi12101180
DatabaseName CrossRef
Electronics & Communications Abstracts
Mechanical & Transportation Engineering Abstracts
Technology Research Database
ProQuest SciTech Collection
ProQuest Technology Collection
Materials Science & Engineering Collection
ProQuest Central (Alumni)
ProQuest Central UK/Ireland
ProQuest Central Essentials
ProQuest Central
Technology Collection
ProQuest One
ProQuest Central
Engineering Research Database
SciTech Premium Collection
ProQuest Engineering Collection
Advanced Technologies Database with Aerospace
Engineering Database
ProQuest Central Premium
ProQuest One Academic (New)
Publicly Available Content Database
ProQuest One Academic Middle East (New)
ProQuest One Academic Eastern Edition (DO NOT USE)
ProQuest One Applied & Life Sciences
ProQuest One Academic
ProQuest One Academic UKI Edition
ProQuest Central China
Engineering Collection
MEDLINE - Academic
PubMed Central (Full Participant titles)
DOAJ Directory of Open Access Journals
DatabaseTitle CrossRef
Publicly Available Content Database
Technology Collection
Technology Research Database
ProQuest One Academic Middle East (New)
Mechanical & Transportation Engineering Abstracts
ProQuest Central Essentials
ProQuest Central (Alumni Edition)
SciTech Premium Collection
ProQuest One Community College
ProQuest Central China
ProQuest Central
ProQuest One Applied & Life Sciences
ProQuest Engineering Collection
ProQuest Central Korea
ProQuest Central (New)
Advanced Technologies Database with Aerospace
Engineering Collection
Engineering Database
ProQuest One Academic Eastern Edition
Electronics & Communications Abstracts
ProQuest Technology Collection
ProQuest SciTech Collection
ProQuest One Academic UKI Edition
Materials Science & Engineering Collection
Engineering Research Database
ProQuest One Academic
ProQuest One Academic (New)
MEDLINE - Academic
DatabaseTitleList CrossRef
MEDLINE - Academic


Publicly Available Content Database
Database_xml – sequence: 1
  dbid: DOA
  name: DOAJ Directory of Open Access Journals
  url: https://www.doaj.org/
  sourceTypes: Open Website
– sequence: 2
  dbid: 8FG
  name: ProQuest Technology Collection
  url: https://search.proquest.com/technologycollection1
  sourceTypes: Aggregation Database
DeliveryMethod fulltext_linktorsrc
Discipline Engineering
EISSN 2072-666X
ExternalDocumentID oai_doaj_org_article_685f07f06b19401e8587ca014bf723bf
PMC8540624
10_3390_mi12101180
GroupedDBID 53G
5VS
8FE
8FG
AADQD
AAFWJ
AAYXX
ABJCF
ADBBV
ADMLS
AENEX
AFKRA
AFPKN
AFZYC
ALMA_UNASSIGNED_HOLDINGS
AOIJS
BCNDV
BENPR
BGLVJ
CCPQU
CITATION
GROUPED_DOAJ
HCIFZ
HYE
IAO
ITC
KQ8
L6V
M7S
MM.
MODMG
M~E
OK1
PGMZT
PHGZM
PHGZT
PIMPY
PROAC
PTHSS
RPM
TR2
TUS
7SP
7TB
8FD
ABUWG
AZQEC
DWQXO
FR3
L7M
PKEHL
PQEST
PQGLB
PQQKQ
PQUKI
PRINS
7X8
5PM
PUEGO
ID FETCH-LOGICAL-c449t-cf9475a446ab6ecdbf809d3e3fbfe22a8944523a418cd9cabd6cd3ec8ed527f13
IEDL.DBID BENPR
ISSN 2072-666X
IngestDate Wed Aug 27 01:21:11 EDT 2025
Thu Aug 21 18:08:18 EDT 2025
Fri Jul 11 14:50:38 EDT 2025
Fri Jul 25 11:57:08 EDT 2025
Thu Apr 24 22:55:08 EDT 2025
Tue Jul 01 03:41:12 EDT 2025
IsDoiOpenAccess true
IsOpenAccess true
IsPeerReviewed true
IsScholarly true
Issue 10
Language English
License https://creativecommons.org/licenses/by/4.0
Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
LinkModel DirectLink
MergedId FETCHMERGED-LOGICAL-c449t-cf9475a446ab6ecdbf809d3e3fbfe22a8944523a418cd9cabd6cd3ec8ed527f13
Notes ObjectType-Article-1
SourceType-Scholarly Journals-1
ObjectType-Feature-2
content type line 14
content type line 23
ORCID 0000-0001-9897-1718
0000-0003-1762-9246
OpenAccessLink https://www.proquest.com/docview/2584454116?pq-origsite=%requestingapplication%
PMID 34683231
PQID 2584454116
PQPubID 2032359
ParticipantIDs doaj_primary_oai_doaj_org_article_685f07f06b19401e8587ca014bf723bf
pubmedcentral_primary_oai_pubmedcentral_nih_gov_8540624
proquest_miscellaneous_2584783933
proquest_journals_2584454116
crossref_primary_10_3390_mi12101180
crossref_citationtrail_10_3390_mi12101180
ProviderPackageCode CITATION
AAYXX
PublicationCentury 2000
PublicationDate 20210929
PublicationDateYYYYMMDD 2021-09-29
PublicationDate_xml – month: 9
  year: 2021
  text: 20210929
  day: 29
PublicationDecade 2020
PublicationPlace Basel
PublicationPlace_xml – name: Basel
PublicationTitle Micromachines (Basel)
PublicationYear 2021
Publisher MDPI AG
MDPI
Publisher_xml – name: MDPI AG
– name: MDPI
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SSID ssj0000779007
Score 2.2509384
Snippet Capacitive micromachined ultrasonic transducer (CMUT) is an ultrasonic transducer based on the microelectromechanical system (MEMS). Wideband CMUT has good...
SourceID doaj
pubmedcentral
proquest
crossref
SourceType Open Website
Open Access Repository
Aggregation Database
Enrichment Source
Index Database
StartPage 1180
SubjectTerms Bandwidths
Broadband
characteristic analysis
Design analysis
Design techniques
Electrodes
Flow measurement
hybrid cell structure
Manufacturing
Microelectromechanical systems
Micromachining
Nondestructive testing
Parameters
Silicon nitride
Simulation
Ultrasonic imaging
Ultrasonic testing
Ultrasonic transducers
wideband CMUT
SummonAdditionalLinks – databaseName: DOAJ Directory of Open Access Journals
  dbid: DOA
  link: http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwrV1LS8QwEA7iSQ_iE-uLiF48lG2TtEm8-WQR1oPuoreSJy6sVXwc_PdO0u66BcGL18wU0plM8k0z_QahYwV-tSQ3qc0ZT1lOOISUJakumDKZhsfip-zBbdkfsZvH4nGu1VeoCWvogRvD9UpR-Iz7rNSQbme5E4XgRgGw154Tqn3YfeHMm0um4h4caPQy3vCRUsjre8_jQJUVCM86J1Ak6u-gy25t5Nxhc72KVlqUiM-a2a2hBVevo-U57sANdNf_Cj9b4Qs3meD7yAL7-eYwYFD8MLZOqxpkg9HwFF_GIg08iL2icRzvsDTjKTHJJhpdXw0v-mnbICE1jMmP1HjJeKEgo1O6dMZqLzJpqaNee0eIEpIxSDQVy4Wx0ihtSwNiI5wtCPc53UKL9UvtthFmTjqhlJFUAYbzHHwoKSu1sRnXGSUJOpkarTIte3hoYjGpIIsIBq5-DJygo5nua8OZ8avWebD9TCPwXMcB8H7Ver_6y_sJ2pt6rmqD770iAKpYwfK8TNDhTAxhE-5CVO1ePhsdDuCQ0gTxjsc7E-pK6vFTJOAWYKKSsJ3_eINdtERCmUy46JJ7aBHWi9sHnPOhD-KS_gZrDfwo
  priority: 102
  providerName: Directory of Open Access Journals
Title Hybrid Cell Structure for Wideband CMUT: Design Method and Characteristic Analysis
URI https://www.proquest.com/docview/2584454116
https://www.proquest.com/docview/2584783933
https://pubmed.ncbi.nlm.nih.gov/PMC8540624
https://doaj.org/article/685f07f06b19401e8587ca014bf723bf
Volume 12
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1Lb9QwEB7R7QUOiKcIlJURXDhETWwntrkgWrqskLZCpSt6i_wsKy3Z0seBf8_Y6902EuLqmSjRjMeeV74BeKdRr47WtnQ1FyWvqUCTcrQ0Dde2MvhYSmXPjtvpnH89a85ywu0qt1VuzsR0ULuVjTnyfYo3JW94XbcfL36XcWpUrK7mERo7sItHsJQj2D04Ov52ss2yVBFOrxJrXFKG8f3-r0WEzIrAZ4ObKAH2D7zMYY_knUtn8ggeZm-RfFqr9zHc8_0TeHAHQ_ApnEz_xJ-uyKFfLsn3hAZ7c-kJ-qLkx8J5o3ukzeanH8jn1KxBZmlmNEnrA7RmsgEoeQbzydHp4bTMgxJKy7m6Lm1QXDQaIzttWm-dCbJSjnkWTPCUaqlQdJRpXkvrlNXGtRbJVnrXUBFq9hxG_ar3L4Bwr7zU2iqm0ZcLAnWpGG-NdZUwFaMFvN8IrbMZRTwOs1h2GE1EAXe3Ai7g7Zb3Yo2d8U-ugyj7LUfEu04Lq8vzLptP18omVCJUrakVRoReNlJYjeGdCYIyEwrY22iuy0Z41d1umQLebMloPrEmonu_ulnzCHQSGStADDQ--KAhpV_8TEDcEkXUUv7y_y9_BfdpbISJpSy1ByPcCf41ejLXZgw7cvJlnDftOOUD_gL-KveL
linkProvider ProQuest
linkToHtml http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwtV1Lb9QwEB6VcgAOiKcIFDACDhyiJrYTx0gIQcuypd0eYFf0FvyElZZs6UOof4rfyNhJto2EuPWaceJoHp4Ze_wNwAuFcrU0N6nNuUh5TgWalKWpLrgymcbX4lb2ZL8cz_ing-JgDf70d2FCWWW_JsaF2i5N2CPfpOgpecHzvHx7-CsNXaPC6WrfQqNVi1139htTtuM3O9so35eUjj5Mt8Zp11UgNZzLk9R4yUWhMA1SunTGal9l0jLHvPaOUlVJnIcyxfPKWGmUtqVBsqmcLajwOcPvXoGrnKEnDzfTRx9XezpZAO_LRIuCivRs8-c8AHQFmLWB34vtAQYx7bAi84KLG92Cm11sSt61ynQb1lxzB25cQCy8C5_HZ-GKF9lyiwX5ErFnT48cwciXfJ1bp1WDtMls-ppsx9IQMokdqkl8PsCGJj0cyj2YXQoD78N6s2zcAyDcSVcpZSRTGDl6gZojGS-1sZnQGaMJvOqZVpsOszy0zljUmLsEBtfnDE7g-WrsYYvU8c9R7wPvVyMCunZ8sDz6XnfGWpdV4TPhs1LnEvNPVxWVMAqTSe0FZdonsNFLru5M_rg-V9AEnq3IaKzhBEY1bnnajhEYkjKWgBhIfPBDQ0oz_xFhvytkUUn5w_9P_hSujaeTvXpvZ3_3EVynoQQnHKLJDVhHrXCPMYY60U-i4hL4dtmW8hctGTPD
linkToPdf http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwtV1Lb9QwEB6VrYTggHiKlAJGwIFDtIntxDESQrTb1Zayq6p0RW_BT7rSki19CPWv8esYZ5NtIyFuvWYmcTQPe8YefwPwRqFeLU1NbFMuYp5SgS5laawzrkyi8bV6K3s8yUdT_vkoO1qDP-1dmFBW2c6J9URtFybskfcprpQ842ma931TFrE_GH48-RWHDlLhpLVtp7E0kT13-RvTt7MPuwPU9VtKhzuH26O46TAQG87leWy85CJTmBIpnTtjtS8SaZljXntHqSokjkmZ4mlhrDRK29wg2RTOZlT4lOF3b8G6CFlRD9a3dib7B6sdniRA-SViiYnKmEz6P2cBriuArnVWwbpZQCfC7dZnXlvwhvfhXhOpkk9L03oAa656CHev4Rc-goPRZbjwRbbdfE6-1ki0F6eOYBxMvs2s06pC2nh6-J4M6kIRMq77VZP6eQcpmrTgKI9heiMifAK9alG5p0C4k65QykimMI70Au1IMp5rYxOhE0YjeNcKrTQNgnlopDEvMZMJAi6vBBzB6xXvyRK3459cW0H2K46AtV0_WJz-KBvXLfMi84nwSa5TidmoK7JCGIWppfaCMu0j2Gw1VzYTwFl5Za4RvFqR0XXDeYyq3OJiySMwQGUsAtHReOeHupRqdlyDgBcoopzyjf8P_hJuo5eUX3Yne8_gDg31OOFETW5CD43CPceA6ly_aCyXwPebdpa_P705VQ
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Hybrid+Cell+Structure+for+Wideband+CMUT%3A+Design+Method+and+Characteristic+Analysis&rft.jtitle=Micromachines+%28Basel%29&rft.au=Wang%2C+Hongliang&rft.au=Huang%2C+Xiao&rft.au=Yu%2C+Lijun&rft.au=Ding%2C+Qi&rft.date=2021-09-29&rft.issn=2072-666X&rft.eissn=2072-666X&rft.volume=12&rft.issue=10&rft.spage=1180&rft_id=info:doi/10.3390%2Fmi12101180&rft.externalDBID=n%2Fa&rft.externalDocID=10_3390_mi12101180
thumbnail_l http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=2072-666X&client=summon
thumbnail_m http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=2072-666X&client=summon
thumbnail_s http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=2072-666X&client=summon