Investigation of Surface Acoustic Wave Propagation Characteristics in New Multilayer Structure: SiO2/IDT/LiNbO3/Diamond/Si

• Published in: Micromachines (Basel) Vol. 12; no. 11; p. 1286
• Main Authors: Zhang, Hanqiang, Wang, Hongliang
• Format: Journal Article
• Language: English
• Published: Basel MDPI AG 21.10.2021; MDPI
• Subjects: Acoustic propagation; Broadband; Communications systems; Cost control; Coupling coefficients; Design; Diamonds; Electric fields; filter; Finite element method; finite element method (FEM); Frequency analysis; Frequency response; Investigations; layered structure; Lithium niobates; Mathematical analysis; Multilayers; Phase velocity; Phased arrays; Propagation; Radar arrays; Saws; Silicon dioxide; Simulation; Software; surface acoustic wave (SAW); Surface acoustic wave devices; Surface acoustic waves; Temperature compensation; Thin films; Transient analysis; Velocity; Wave propagation; Wireless communications; Zinc oxides

Surface acoustic wave (SAW) devices are widely used in many fields such as mobile communication, phased array radar, and wireless passive sensor systems. With the upgrade of mobile networks, the requirements for the performance of SAW devices have also increased, and high-frequency wideband SAW devi...