Research on Novel CMUTs for Detecting Micro-Pressure with Ultra-High Sensitivity and Linearity

• Published in: Micromachines (Basel) Vol. 12; no. 11; p. 1340
• Main Authors: Ding, Qi, Wang, Hongliang, Zhang, Hanqiang, Huang, Xiao, Sun, Xiaolei, Qin, Zhenjie, Ren, Rui, Zhu, Jiajun, He, Changde, Zhang, Wendong
• Format: Journal Article
• Language: English
• Published: Basel MDPI AG 30.10.2021; MDPI
• Subjects: Aerospace industry; capacitive micromachined ultrasonic transducer (CMUT); Deformation; Design; Electrodes; Finite element method; Formability; Frequency ranges; frustum cone-like cavity; Frustums; Grooves; Linearity; Membranes; Micromachining; Pressure measurement; pressure sensitivity; Sensitivity; Sensors; slotted membrane; Stress concentration; Transducers; Ultrasonic transducers

Capacitive micromachined ultrasonic transducers (CMUTs) have been indispensable owing to their resonance characteristics in the MHz frequency range. However, the inferior pressure sensitivity and linearity of traditional CMUTs themselves cannot meet the actual demands of micro-pressure measurements....