Research on Novel CMUTs for Detecting Micro-Pressure with Ultra-High Sensitivity and Linearity - Ding, Qi; Wang, Hongliang; Zhang, Hanqiang; Huang, Xiao; Sun, Xiaolei; Qin, Zhenjie; Ren, Rui; Zhu, Jiajun; He, Changde; Zhang, Wendong (Micromachines (Basel), 2021)
Keywords: Aerospace industry; capacitive micromachined ultrasonic transducer (CMUT); Deformation; Design; Electrodes; Finite element method; Formability; Frequency ranges; frustum cone-like cavity; Frustums; Grooves; Linearity; Membranes; Micromachining; Pressure measurement; pressure sensitivity; Sensitivity; Sensors; slotted membrane; Stress concentration; Transducers; Ultrasonic transducers