Batch-Fabricated α-Si Assisted Nanogap Tunneling Junctions

• Published in: Nanomaterials (Basel, Switzerland) Vol. 9; no. 5; p. 727
• Main Authors: Banerjee, Aishwaryadev, Khan, Shakir-Ul Haque, Broadbent, Samuel, Likhite, Rugved, Looper, Ryan, Kim, Hanseup, Mastrangelo, Carlos H.
• Format: Journal Article
• Language: English
• Published: Switzerland MDPI 10.05.2019; MDPI AG
• Subjects: batch fabrication; bio-sensing; gold adhesion; IOT; molecular junctions; nanogap electrodes; protein detection; quantum tunneling; α-Si; bio-sensing; gold adhesion; nanogap electrodes; quantum tunneling; molecular junctions; batch fabrication; protein detection; α-Si; IOT

This paper details the design, fabrication, and characterization of highly uniform batch-fabricated sidewall etched vertical nanogap tunneling junctions for bio-sensing applications. The device consists of two vertically stacked gold electrodes separated by a partially etched sacrificial spacer laye...