Micromilling of metal alloys with focused ion beam–fabricated tools

• Published in: Precision engineering Vol. 25; no. 2; pp. 107 - 113
• Main Authors: Adams, David P., Vasile, Michael J., Benavides, Gilbert, Campbell, Ann N.
• Format: Journal Article
• Language: English
• Published: New York, NY Elsevier Inc 01.04.2001; Elsevier Science
• Subjects: Applied sciences; Blanking. Shearing; Brass; Cutting; Cutting tools; Exact sciences and technology; Metals. Metallurgy; Micromachining; Micromilling; Microtools; Milling (machining); Polymethyl methacrylates; Production techniques; Steel; Surface roughness; Ultra-precision machining; Micromilling; Ultra-precision machining; Microtools; Tungsten carbide; Milling cutter; Brass; Precision engineering; High precision; Roughness; Machining; Ion beam; Methyl methacrylate polymer; Mechanical clearance; Focused ion beam technology; Sputtering; Sputter coating; Cutting; Carbide tool; Penetration rate; High speed tool steel; Ion beam sputtering; Micromachining; Rupture; Machine feed; Aluminium alloy; Rough surface; Milling; Cutting tool; Curvature

This work combines focused ion beam sputtering and ultra-precision machining as a first step in fabricating metal alloy microcomponents. Micro-end mills having ∼25 μm diameters are made by sputtering cobalt M42 high-speed steel and C2 micrograin tungsten carbide tool blanks. A 20 keV focused gallium...