Automated Parameter Extraction Of ScAlN MEMS Devices Using An Extended Euler–Bernoulli Beam Theory

• Published in: Sensors (Basel, Switzerland) Vol. 20; no. 4; p. 1001
• Main Authors: Krey, Maximilian, Hähnlein, Bernd, Tonisch, Katja, Krischok, Stefan, Töpfer, Hannes
• Format: Journal Article
• Language: English
• Published: Switzerland MDPI 13.02.2020; MDPI AG
• Subjects: algorithm; automation; magnetoelectric sensor; mems; scandium aluminium nitride; young’s modulus; Young’s modulus; magnetoelectric sensor; scandium aluminium nitride; MEMS; automation; algorithm

Magnetoelectric sensors provide the ability to measure magnetic fields down to the pico tesla range and are currently the subject of intense research. Such sensors usually combine a piezoelectric and a magnetostrictive material, so that magnetically induced stresses can be measured electrically. Sca...