APA (7th ed.) Citation

Krey, M., Hähnlein, B., Tonisch, K., Krischok, S., & Töpfer, H. (2020). Automated Parameter Extraction Of ScAlN MEMS Devices Using An Extended Euler–Bernoulli Beam Theory. Sensors (Basel, Switzerland), 20(4), 1001. https://doi.org/10.3390/s20041001

Chicago Style (17th ed.) Citation

Krey, Maximilian, Bernd Hähnlein, Katja Tonisch, Stefan Krischok, and Hannes Töpfer. "Automated Parameter Extraction Of ScAlN MEMS Devices Using An Extended Euler–Bernoulli Beam Theory." Sensors (Basel, Switzerland) 20, no. 4 (2020): 1001. https://doi.org/10.3390/s20041001.

MLA (9th ed.) Citation

Krey, Maximilian, et al. "Automated Parameter Extraction Of ScAlN MEMS Devices Using An Extended Euler–Bernoulli Beam Theory." Sensors (Basel, Switzerland), vol. 20, no. 4, 2020, p. 1001, https://doi.org/10.3390/s20041001.