Structural and electrical properties of magnetron sputtered Ti(ON) thin films: The case of TiN doped in situ with oxygen - Trenczek-Zajac, A.; Radecka, M.; Zakrzewska, K.; Brudnik, A.; Kusior, E.; Bourgeois, S.; de Lucas, M.C. Marco; Imhoff, L. (Journal of power sources, 2009)
Keywords: Applied sciences; Energy; Exact sciences and technology; Magnetron sputtering; Natural energy; Optical properties; Oxygen doping; Physics; Solar energy; Thin films; Titanium oxynitride; Thin films; Oxygen doping; Magnetron sputtering; Optical properties; Titanium oxynitride; Scanning electron microscopy; Electrical conductivity; Electrical properties; Photocatalysis; Doping; Titanium nitride; Transition metal; Thin film; Electrical measurement; Solar energy; Electric resistivity; Photoelectron spectrometry; Oxidation; Raman spectrometry; X ray diffractometry