Generalized thermo-elastodynamics for semiconductor material subject to ultrafast laser heating. Part I: Model description and validation
A generalized thermo-elastodynamic formulation applicable to the investigation of coupled thermomechanical responses of a silicon thin structure excited by ultrafast laser pulses is presented. Hyperbolic energy transport equations with two relaxation times is incorporated along with the relaxation-t...
Saved in:
| Published in | International journal of heat and mass transfer Vol. 53; no. 1; pp. 41 - 47 |
|---|---|
| Main Authors | , |
| Format | Journal Article |
| Language | English |
| Published |
Kidlington
Elsevier Ltd
15.01.2010
Elsevier |
| Subjects | |
| Online Access | Get full text |
Cover
Loading…
| Abstract | A generalized thermo-elastodynamic formulation applicable to the investigation of coupled thermomechanical responses of a silicon thin structure excited by ultrafast laser pulses is presented. Hyperbolic energy transport equations with two relaxation times is incorporated along with the relaxation-time approximation of the Boltzmann equation and a set of balance equations that consider temperature-dependent multi-phonons, free-carrier absorptions, and the recombination and impact ionization processes. A staggered-grid finite difference scheme allows the coupled equations system that govern the transport dynamics in silicon wafer to be solved without having to be concerned with non-physical numerical oscillations. The time evolution of carrier density and the non-thermal melting fluence level at which damages are inflicted in response to a given pulse duration are examined and compared favorably with experimental data. The feasibility of using the model formulation in describing near-field, short time scale thermal–mechanical responses induced by ultrafast laser pulses is thus validated. |
|---|---|
| AbstractList | A generalized thermo-elastodynamic formulation applicable to the investigation of coupled thermomechanical responses of a silicon thin structure excited by ultrafast laser pulses is presented. Hyperbolic energy transport equations with two relaxation times is incorporated along with the relaxation-time approximation of the Boltzmann equation and a set of balance equations that consider temperature-dependent multi-phonons, free-carrier absorptions, and the recombination and impact ionization processes. A staggered-grid finite difference scheme allows the coupled equations system that govern the transport dynamics in silicon wafer to be solved without having to be concerned with non-physical numerical oscillations. The time evolution of carrier density and the non-thermal melting fluence level at which damages are inflicted in response to a given pulse duration are examined and compared favorably with experimental data. The feasibility of using the model formulation in describing near-field, short time scale thermal-mechanical responses induced by ultrafast laser pulses is thus validated. |
| Author | Suh, C. Steve Qi, Xuele |
| Author_xml | – sequence: 1 givenname: Xuele surname: Qi fullname: Qi, Xuele – sequence: 2 givenname: C. Steve surname: Suh fullname: Suh, C. Steve email: ssuh@tamu.edu |
| BackLink | http://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=22225692$$DView record in Pascal Francis |
| BookMark | eNqVkc9u1DAQxi1UJLaFd_AFxCXBTmJvwglU9R8qggOcLa89oY4ce_E4lcob8NZ1uuUCB8AXezTf_GY83zE5CjEAIa85qznj8s1Uu-kGdJ41Yk464AipbhgbSrpmnD0hG95vh6rh_XBENozxbTW0nD0jx4jTGrJObsjPCwiQtHc_wNJ8A2mOFXiNOdq7oGdnkI4xUYTyjMEuJpdo1hmS057ispvAZJojXXyZYiyFtFRDoutsLnyr6WedMr16Sz9GC55aQJPcPrsYqA6W3pbWVq_hc_J01B7hxeN9Qr6en305vayuP11cnb6_rkzXdrmyjQHRG6E5DEwL2TejlXInzE5aM7RsBG46KQbBeA9Mir7tdCfZ2PeiBF3XnpBXB-4-xe8LYFazQwPe6wBxQdUKPvB22_9V2PBGcvlAfPko1Gi0H4sbxqHaJzfrdKeacoQcmqI7P-hMiogJRmVcfvh7WZ3zijO1Wqsm9ae1arV2VRRrC-jdb6Bfvf4D8eGAgLLqW1eyaBwEA9al4qiy0f077B7AddR5 |
| CODEN | IJHMAK |
| CitedBy_id | crossref_primary_10_1080_10407782_2013_784652 crossref_primary_10_1016_j_ijheatmasstransfer_2023_124884 crossref_primary_10_1080_17455030_2023_2226781 crossref_primary_10_1080_17455030_2018_1490043 crossref_primary_10_1016_j_euromechsol_2014_12_005 crossref_primary_10_1016_j_ijengsci_2014_04_014 crossref_primary_10_1080_01495739_2023_2268141 crossref_primary_10_2514_1_T5429 crossref_primary_10_1080_01495739_2018_1524729 crossref_primary_10_1016_j_apsusc_2012_03_071 crossref_primary_10_12677_IJM_2021_104024 crossref_primary_10_1016_j_ijheatmasstransfer_2019_04_011 crossref_primary_10_1080_10407782_2013_751758 crossref_primary_10_1080_01495739_2017_1361800 crossref_primary_10_1016_j_icheatmasstransfer_2023_107010 crossref_primary_10_1080_01495739_2010_511935 crossref_primary_10_1016_j_ijheatmasstransfer_2022_123128 crossref_primary_10_1007_s00339_011_6573_z crossref_primary_10_1080_01495739_2020_1822767 |
| Cites_doi | 10.1080/01495730802637365 10.1103/PhysRevB.77.245329 10.1080/01495739808956179 10.1103/PhysRevB.35.8166 10.1088/0022-3727/40/21/047 10.1016/j.apsusc.2007.02.093 10.1016/j.ijheatmasstransfer.2004.09.015 10.1115/1.2789101 10.1007/s00339-006-3743-5 10.1063/1.3079512 10.1115/IMECE1997-1225 10.1364/OE.17.003531 10.1109/TDMR.2005.846828 10.1007/BF02428984 10.1063/1.2802304 10.1007/BF00253395 10.1103/PhysRevB.69.035314 10.1016/j.optmat.2006.11.065 10.1006/jcph.1998.5962 10.1007/BF00045689 10.1016/j.apsusc.2007.02.083 10.1117/12.472053 10.1063/1.1447555 10.1080/01495730802637399 |
| ContentType | Journal Article |
| Copyright | 2009 Elsevier Ltd 2015 INIST-CNRS |
| Copyright_xml | – notice: 2009 Elsevier Ltd – notice: 2015 INIST-CNRS |
| DBID | AAYXX CITATION IQODW 7ST C1K SOI 7TB 8FD FR3 H8D KR7 L7M |
| DOI | 10.1016/j.ijheatmasstransfer.2009.10.010 |
| DatabaseName | CrossRef Pascal-Francis Environment Abstracts Environmental Sciences and Pollution Management Environment Abstracts Mechanical & Transportation Engineering Abstracts Technology Research Database Engineering Research Database Aerospace Database Civil Engineering Abstracts Advanced Technologies Database with Aerospace |
| DatabaseTitle | CrossRef Environment Abstracts Environmental Sciences and Pollution Management Aerospace Database Civil Engineering Abstracts Engineering Research Database Technology Research Database Mechanical & Transportation Engineering Abstracts Advanced Technologies Database with Aerospace |
| DatabaseTitleList | Environment Abstracts Aerospace Database |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Physics |
| EISSN | 1879-2189 |
| EndPage | 47 |
| ExternalDocumentID | 22225692 10_1016_j_ijheatmasstransfer_2009_10_010 S0017931009005511 |
| GroupedDBID | --K --M -~X .DC .~1 0R~ 1B1 1~. 1~5 29J 4.4 457 4G. 5GY 5VS 6TJ 7-5 71M 8P~ 9JN AABNK AACTN AAEDT AAEDW AAHCO AAIAV AAIKJ AAKOC AALRI AAOAW AAQFI AAQXK AARJD AAXUO ABDMP ABFNM ABMAC ABNUV ABTAH ABXDB ABYKQ ACDAQ ACGFS ACIWK ACKIV ACNNM ACRLP ADBBV ADEWK ADEZE ADMUD ADTZH AEBSH AECPX AEKER AENEX AFKWA AFTJW AGHFR AGUBO AGYEJ AHHHB AHIDL AHJVU AHPOS AIEXJ AIKHN AITUG AJBFU AJOXV AKURH ALMA_UNASSIGNED_HOLDINGS AMFUW AMRAJ ASPBG AVWKF AXJTR AZFZN BELTK BJAXD BKOJK BLXMC CS3 DU5 EBS EFJIC EFLBG EJD ENUVR EO8 EO9 EP2 EP3 F5P FDB FEDTE FGOYB FIRID FNPLU FYGXN G-2 G-Q G8K GBLVA HVGLF HZ~ IHE J1W JARJE JJJVA K-O KOM LY6 LY7 M41 MO0 N9A O-L O9- OAUVE OZT P-8 P-9 P2P PC. Q38 R2- RIG RNS ROL RPZ SAC SDF SDG SDP SES SET SEW SPC SPCBC SSG SSR SST SSZ T5K T9H TN5 VOH WUQ XPP ZMT ZY4 ~02 ~G- AATTM AAXKI AAYWO AAYXX ABDPE ABJNI ABWVN ACRPL ACVFH ADCNI ADNMO AEIPS AEUPX AFJKZ AFPUW AFXIZ AGCQF AGQPQ AGRNS AIGII AIIUN AKBMS AKRWK AKYEP ANKPU APXCP BNPGV CITATION SSH EFKBS IQODW 7ST C1K SOI 7TB 8FD FR3 H8D KR7 L7M |
| ID | FETCH-LOGICAL-c434t-d2ce58c5a1e90a5682fd66b5cb6dc930fe1c46595018e065834a460f885658443 |
| IEDL.DBID | .~1 |
| ISSN | 0017-9310 |
| IngestDate | Tue Aug 05 08:56:37 EDT 2025 Fri Jul 11 12:25:12 EDT 2025 Mon Jul 21 09:16:34 EDT 2025 Thu Apr 24 22:56:10 EDT 2025 Tue Jul 01 02:39:48 EDT 2025 Fri Feb 23 02:31:03 EST 2024 |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | 1 |
| Keywords | Staggered finite difference Axisymmetric model Ultrafast laser pulse Silicon wafer Generalized thermoelasticity Near field Transport equation Boltzmann equation Laser-radiation heating Thermomechanical properties Relaxation time Equation system Free carrier Lattice dynamics Temperature effects Multi-phonon processes Thermoelasticity Impact ionization Silicon Damage Carrier density Finite difference method Ultrafast process |
| Language | English |
| License | https://www.elsevier.com/tdm/userlicense/1.0 CC BY 4.0 |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-LOGICAL-c434t-d2ce58c5a1e90a5682fd66b5cb6dc930fe1c46595018e065834a460f885658443 |
| Notes | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
| PQID | 21261644 |
| PQPubID | 23462 |
| PageCount | 7 |
| ParticipantIDs | proquest_miscellaneous_35191378 proquest_miscellaneous_21261644 pascalfrancis_primary_22225692 crossref_citationtrail_10_1016_j_ijheatmasstransfer_2009_10_010 crossref_primary_10_1016_j_ijheatmasstransfer_2009_10_010 elsevier_sciencedirect_doi_10_1016_j_ijheatmasstransfer_2009_10_010 |
| ProviderPackageCode | CITATION AAYXX |
| PublicationCentury | 2000 |
| PublicationDate | 2010-01-15 |
| PublicationDateYYYYMMDD | 2010-01-15 |
| PublicationDate_xml | – month: 01 year: 2010 text: 2010-01-15 day: 15 |
| PublicationDecade | 2010 |
| PublicationPlace | Kidlington |
| PublicationPlace_xml | – name: Kidlington |
| PublicationTitle | International journal of heat and mass transfer |
| PublicationYear | 2010 |
| Publisher | Elsevier Ltd Elsevier |
| Publisher_xml | – name: Elsevier Ltd – name: Elsevier |
| References | Blakemore (bib23) 1962 Suh, Burger (bib27) 1998; 21 Guillermin, Garrelie, Sanner (bib6) 2007; 253 Koudoumas, Kokkinaki, Konstantaki (bib13) 2007; 30 Shinoda, Gattass, Mazur (bib3) 2009; 105 Mauclair, Cheng, Huot, Audouard, Rosenfeld, Hertel, Stoian (bib14) 2009; 17 Matsumura, Nakatani, Yagi (bib15) 2007; 86 Allenspacher, Huttner, Riede (bib31) 2003; 4932 C.S. Suh, G.A. Rabroker, C.E. Burger, R. Chona, Ultrasonic time-frequency characterization of silicon wafers at elevated temperatures, in: Proceedings of the ASME Symposium on Applications of Experimental Mechanics to Electronic Packaging, EEP-Vol. 22/AMD-Vol. 226, 1997, pp. 37–44. Lomonosov, Hess, Kumon, Hamilton (bib9) 2004; 69 Pecholt, Vendan, Dong, Molian (bib2) 2008; 39 Murdick, Raman, Murooka, Ruan (bib8) 2008; 77 Suh, Burger (bib22) 1998; 65 Qi, Suh (bib19) 2009; 32 Roznowski (bib20) 1989 Chen, Tzou, Beraun (bib17) 2005; 48 Korfiatis1, Thoma, Vardaxoglou (bib7) 2007; 40 van Driel (bib16) 1987; 35 Bhandari, Rowe (bib25) 1988 Green, Lindsay (bib21) 1972; 2 Weinan, Jian-Guo (bib28) 2001; 237 Alimpiev, Grechnikov, Sunner (bib12) 2008; 128 Nagaraj, Suh (bib30) 2005; 5 Rabroker, Suh, Chona (bib11) 2005; 45 Morinishi, Lund, Vasilyev, Moin (bib29) 1998; 143 Rogers, Grigoropoulos, Minor, Mao (bib5) 2009; 94 Nedialkov, Atanasov, Amoruso (bib4) 2007; 253 Qi, Suh (bib18) 2009; 32 Green, Laws (bib26) 1972; 45 Blakemore (bib24) 1962 Gamaly, Rode, Luther-Davies, Tikhonchuk (bib1) 2002; 9 Koudoumas (10.1016/j.ijheatmasstransfer.2009.10.010_bib13) 2007; 30 Weinan (10.1016/j.ijheatmasstransfer.2009.10.010_bib28) 2001; 237 Gamaly (10.1016/j.ijheatmasstransfer.2009.10.010_bib1) 2002; 9 Chen (10.1016/j.ijheatmasstransfer.2009.10.010_bib17) 2005; 48 Blakemore (10.1016/j.ijheatmasstransfer.2009.10.010_bib24) 1962 Guillermin (10.1016/j.ijheatmasstransfer.2009.10.010_bib6) 2007; 253 Korfiatis1 (10.1016/j.ijheatmasstransfer.2009.10.010_bib7) 2007; 40 Qi (10.1016/j.ijheatmasstransfer.2009.10.010_bib18) 2009; 32 Green (10.1016/j.ijheatmasstransfer.2009.10.010_bib21) 1972; 2 Rabroker (10.1016/j.ijheatmasstransfer.2009.10.010_bib11) 2005; 45 Allenspacher (10.1016/j.ijheatmasstransfer.2009.10.010_bib31) 2003; 4932 Roznowski (10.1016/j.ijheatmasstransfer.2009.10.010_bib20) 1989 10.1016/j.ijheatmasstransfer.2009.10.010_bib10 Bhandari (10.1016/j.ijheatmasstransfer.2009.10.010_bib25) 1988 Murdick (10.1016/j.ijheatmasstransfer.2009.10.010_bib8) 2008; 77 Rogers (10.1016/j.ijheatmasstransfer.2009.10.010_bib5) 2009; 94 Suh (10.1016/j.ijheatmasstransfer.2009.10.010_bib22) 1998; 65 Qi (10.1016/j.ijheatmasstransfer.2009.10.010_bib19) 2009; 32 Lomonosov (10.1016/j.ijheatmasstransfer.2009.10.010_bib9) 2004; 69 Alimpiev (10.1016/j.ijheatmasstransfer.2009.10.010_bib12) 2008; 128 Matsumura (10.1016/j.ijheatmasstransfer.2009.10.010_bib15) 2007; 86 Pecholt (10.1016/j.ijheatmasstransfer.2009.10.010_bib2) 2008; 39 van Driel (10.1016/j.ijheatmasstransfer.2009.10.010_bib16) 1987; 35 Nagaraj (10.1016/j.ijheatmasstransfer.2009.10.010_bib30) 2005; 5 Mauclair (10.1016/j.ijheatmasstransfer.2009.10.010_bib14) 2009; 17 Suh (10.1016/j.ijheatmasstransfer.2009.10.010_bib27) 1998; 21 Shinoda (10.1016/j.ijheatmasstransfer.2009.10.010_bib3) 2009; 105 Morinishi (10.1016/j.ijheatmasstransfer.2009.10.010_bib29) 1998; 143 Nedialkov (10.1016/j.ijheatmasstransfer.2009.10.010_bib4) 2007; 253 Green (10.1016/j.ijheatmasstransfer.2009.10.010_bib26) 1972; 45 Blakemore (10.1016/j.ijheatmasstransfer.2009.10.010_bib23) 1962 |
| References_xml | – volume: 40 start-page: 6803 year: 2007 end-page: 6808 ident: bib7 article-title: Conditions for femtosecond laser melting of silicon publication-title: J. Phys. D Appl. Phys. – volume: 65 start-page: 605 year: 1998 end-page: 613 ident: bib22 article-title: Effects of thermomechanical coupling and relaxation times on wave spectrum in dynamic theory of generalized thermoelasticity publication-title: J. Appl. Mech. – volume: 253 start-page: 8075 year: 2007 end-page: 8079 ident: bib6 article-title: Single- and multi-pulse formation of surface structures under static femtosecond irradiation publication-title: Appl. Surf. Sci. – volume: 9 start-page: 949 year: 2002 end-page: 957 ident: bib1 article-title: Ablation of solids by femtosecond lasers: ablation mechanism and ablation thresholds for metals and dielectrics publication-title: Phys. Plasmas – volume: 128 start-page: 014711 year: 2008 ident: bib12 article-title: On the role of defects and surface chemistry for surface-assisted laser desorption ionization from silicon publication-title: J. Chem. Phys. – volume: 35 start-page: 8166 year: 1987 end-page: 8176 ident: bib16 article-title: Kinetics of high-density plasmas generated in Si by 1.06- and 0.53-μm picoseconds laser pulses publication-title: Phys. Rev. B – reference: C.S. Suh, G.A. Rabroker, C.E. Burger, R. Chona, Ultrasonic time-frequency characterization of silicon wafers at elevated temperatures, in: Proceedings of the ASME Symposium on Applications of Experimental Mechanics to Electronic Packaging, EEP-Vol. 22/AMD-Vol. 226, 1997, pp. 37–44. – volume: 32 start-page: 477 year: 2009 end-page: 493 ident: bib18 article-title: Ultrafast laser-induced elastodynamics in single crystalline silicon. Part I: Model formulation publication-title: J. Therm. Stresses – volume: 45 start-page: 3 year: 2005 end-page: 8 ident: bib11 article-title: Laser-induced stress waves thermometry applied to silicon wafer processing: modeling and experimentation publication-title: Exp. Mech. – year: 1962 ident: bib23 article-title: Semiconductor Statistics – volume: 143 start-page: 90 year: 1998 end-page: 124 ident: bib29 article-title: Fully conservative higher order finite difference schemes for incompressible flow publication-title: J. Comput. Phys. – volume: 77 start-page: 245329 year: 2008 ident: bib8 article-title: Photovoltage dynamics of the hydroxylated Si(1 publication-title: Phys. Rev. B – volume: 69 start-page: 035314 year: 2004 ident: bib9 article-title: Laser-generated nonlinear surface wave pulses in silicon crystals publication-title: Phys. Rev. B – year: 1988 ident: bib25 article-title: Thermal Conduction in Semiconductors – volume: 4932 start-page: 358 year: 2003 end-page: 365 ident: bib31 article-title: Ultrashort pulse damage of Si and Ge semiconductors publication-title: SPIE – volume: 32 start-page: 494 year: 2009 end-page: 511 ident: bib19 article-title: Ultrafast laser-induced elastodynamics in single crystalline silicon. Part II: Near-field response publication-title: J. Therm. Stresses – volume: 17 start-page: 3531 year: 2009 end-page: 3542 ident: bib14 article-title: Dynamic ultrafast laser spatial tailoring for parallel micromachining of photonic devices in transparent materials publication-title: Opt. Express – volume: 86 start-page: 107 year: 2007 end-page: 114 ident: bib15 article-title: Deep drilling on a silicon plate with a femtosecond laser: experiment and model analysis publication-title: Appl. Phys. A – volume: 30 start-page: 260 year: 2007 end-page: 263 ident: bib13 article-title: Nonlinear optical response of silicon nanocrystals publication-title: Opt. Mater. – volume: 2 start-page: 1 year: 1972 end-page: 7 ident: bib21 article-title: Thermoelasticity publication-title: J. Elasticity – volume: 237 start-page: 27 year: 2001 end-page: 47 ident: bib28 article-title: Projection method III: spatial discretization on the staggered grid publication-title: Math. Comput. – volume: 21 start-page: 829 year: 1998 end-page: 847 ident: bib27 article-title: Thermoelastic modeling of laser-induced stress waves in plates publication-title: J. Therm. Stresses – volume: 39 start-page: 39 year: 2008 end-page: 250 ident: bib2 article-title: Ultrafast laser micromachining of 3C-SiC thin films for MEMS device fabrication publication-title: Int. J. Adv. Manuf. Technol. – volume: 45 start-page: 47 year: 1972 end-page: 53 ident: bib26 article-title: On the entropy production inequality publication-title: Arch. Ration. Mech. Anal. – year: 1989 ident: bib20 article-title: Moving Heat Sources in Thermoelasticity – volume: 94 start-page: 011111 year: 2009 ident: bib5 article-title: Absence of amorphous phase in high power femtosecond laser-ablated silicon publication-title: J. Appl. Phys. – volume: 253 start-page: 7761 year: 2007 end-page: 7766 ident: bib4 article-title: Laser ablation of metals by femtosecond pulses: theoretical and experimental study publication-title: Appl. Surf. Sci. – volume: 5 start-page: 224 year: 2005 end-page: 230 ident: bib30 article-title: On short time scale stress wave phenomena and initiation of mechanical faults in flip chip configurations publication-title: IEEE Trans. Device Mater. Reliab. – year: 1962 ident: bib24 article-title: International Series of Monographs on Semiconductors – volume: 105 start-page: 053102 year: 2009 ident: bib3 article-title: Femtosecond laser-induced formation of nanometer-width grooves on synthetic single-crystal diamond surfaces publication-title: J. Appl. Phys. – volume: 48 start-page: 501 year: 2005 end-page: 509 ident: bib17 article-title: Numerical investigation of ultrashort laser damage in semiconductors publication-title: Int. J. Heat Mass Transfer – volume: 32 start-page: 477 issue: 5 year: 2009 ident: 10.1016/j.ijheatmasstransfer.2009.10.010_bib18 article-title: Ultrafast laser-induced elastodynamics in single crystalline silicon. Part I: Model formulation publication-title: J. Therm. Stresses doi: 10.1080/01495730802637365 – year: 1962 ident: 10.1016/j.ijheatmasstransfer.2009.10.010_bib23 – year: 1962 ident: 10.1016/j.ijheatmasstransfer.2009.10.010_bib24 – volume: 77 start-page: 245329 year: 2008 ident: 10.1016/j.ijheatmasstransfer.2009.10.010_bib8 article-title: Photovoltage dynamics of the hydroxylated Si(111) surface investigated by ultrafast electron diffraction publication-title: Phys. Rev. B doi: 10.1103/PhysRevB.77.245329 – volume: 39 start-page: 39 issue: 2 year: 2008 ident: 10.1016/j.ijheatmasstransfer.2009.10.010_bib2 article-title: Ultrafast laser micromachining of 3C-SiC thin films for MEMS device fabrication publication-title: Int. J. Adv. Manuf. Technol. – volume: 21 start-page: 829 year: 1998 ident: 10.1016/j.ijheatmasstransfer.2009.10.010_bib27 article-title: Thermoelastic modeling of laser-induced stress waves in plates publication-title: J. Therm. Stresses doi: 10.1080/01495739808956179 – volume: 94 start-page: 011111 year: 2009 ident: 10.1016/j.ijheatmasstransfer.2009.10.010_bib5 article-title: Absence of amorphous phase in high power femtosecond laser-ablated silicon publication-title: J. Appl. Phys. – volume: 35 start-page: 8166 year: 1987 ident: 10.1016/j.ijheatmasstransfer.2009.10.010_bib16 article-title: Kinetics of high-density plasmas generated in Si by 1.06- and 0.53-μm picoseconds laser pulses publication-title: Phys. Rev. B doi: 10.1103/PhysRevB.35.8166 – volume: 40 start-page: 6803 year: 2007 ident: 10.1016/j.ijheatmasstransfer.2009.10.010_bib7 article-title: Conditions for femtosecond laser melting of silicon publication-title: J. Phys. D Appl. Phys. doi: 10.1088/0022-3727/40/21/047 – volume: 253 start-page: 8075 year: 2007 ident: 10.1016/j.ijheatmasstransfer.2009.10.010_bib6 article-title: Single- and multi-pulse formation of surface structures under static femtosecond irradiation publication-title: Appl. Surf. Sci. doi: 10.1016/j.apsusc.2007.02.093 – year: 1989 ident: 10.1016/j.ijheatmasstransfer.2009.10.010_bib20 – volume: 48 start-page: 501 year: 2005 ident: 10.1016/j.ijheatmasstransfer.2009.10.010_bib17 article-title: Numerical investigation of ultrashort laser damage in semiconductors publication-title: Int. J. Heat Mass Transfer doi: 10.1016/j.ijheatmasstransfer.2004.09.015 – volume: 65 start-page: 605 year: 1998 ident: 10.1016/j.ijheatmasstransfer.2009.10.010_bib22 article-title: Effects of thermomechanical coupling and relaxation times on wave spectrum in dynamic theory of generalized thermoelasticity publication-title: J. Appl. Mech. doi: 10.1115/1.2789101 – year: 1988 ident: 10.1016/j.ijheatmasstransfer.2009.10.010_bib25 – volume: 86 start-page: 107 year: 2007 ident: 10.1016/j.ijheatmasstransfer.2009.10.010_bib15 article-title: Deep drilling on a silicon plate with a femtosecond laser: experiment and model analysis publication-title: Appl. Phys. A doi: 10.1007/s00339-006-3743-5 – volume: 105 start-page: 053102 year: 2009 ident: 10.1016/j.ijheatmasstransfer.2009.10.010_bib3 article-title: Femtosecond laser-induced formation of nanometer-width grooves on synthetic single-crystal diamond surfaces publication-title: J. Appl. Phys. doi: 10.1063/1.3079512 – ident: 10.1016/j.ijheatmasstransfer.2009.10.010_bib10 doi: 10.1115/IMECE1997-1225 – volume: 17 start-page: 3531 issue: 5 year: 2009 ident: 10.1016/j.ijheatmasstransfer.2009.10.010_bib14 article-title: Dynamic ultrafast laser spatial tailoring for parallel micromachining of photonic devices in transparent materials publication-title: Opt. Express doi: 10.1364/OE.17.003531 – volume: 5 start-page: 224 issue: 2 year: 2005 ident: 10.1016/j.ijheatmasstransfer.2009.10.010_bib30 article-title: On short time scale stress wave phenomena and initiation of mechanical faults in flip chip configurations publication-title: IEEE Trans. Device Mater. Reliab. doi: 10.1109/TDMR.2005.846828 – volume: 45 start-page: 3 issue: 1 year: 2005 ident: 10.1016/j.ijheatmasstransfer.2009.10.010_bib11 article-title: Laser-induced stress waves thermometry applied to silicon wafer processing: modeling and experimentation publication-title: Exp. Mech. doi: 10.1007/BF02428984 – volume: 128 start-page: 014711 year: 2008 ident: 10.1016/j.ijheatmasstransfer.2009.10.010_bib12 article-title: On the role of defects and surface chemistry for surface-assisted laser desorption ionization from silicon publication-title: J. Chem. Phys. doi: 10.1063/1.2802304 – volume: 45 start-page: 47 year: 1972 ident: 10.1016/j.ijheatmasstransfer.2009.10.010_bib26 article-title: On the entropy production inequality publication-title: Arch. Ration. Mech. Anal. doi: 10.1007/BF00253395 – volume: 69 start-page: 035314 year: 2004 ident: 10.1016/j.ijheatmasstransfer.2009.10.010_bib9 article-title: Laser-generated nonlinear surface wave pulses in silicon crystals publication-title: Phys. Rev. B doi: 10.1103/PhysRevB.69.035314 – volume: 30 start-page: 260 year: 2007 ident: 10.1016/j.ijheatmasstransfer.2009.10.010_bib13 article-title: Nonlinear optical response of silicon nanocrystals publication-title: Opt. Mater. doi: 10.1016/j.optmat.2006.11.065 – volume: 143 start-page: 90 year: 1998 ident: 10.1016/j.ijheatmasstransfer.2009.10.010_bib29 article-title: Fully conservative higher order finite difference schemes for incompressible flow publication-title: J. Comput. Phys. doi: 10.1006/jcph.1998.5962 – volume: 2 start-page: 1 year: 1972 ident: 10.1016/j.ijheatmasstransfer.2009.10.010_bib21 article-title: Thermoelasticity publication-title: J. Elasticity doi: 10.1007/BF00045689 – volume: 253 start-page: 7761 year: 2007 ident: 10.1016/j.ijheatmasstransfer.2009.10.010_bib4 article-title: Laser ablation of metals by femtosecond pulses: theoretical and experimental study publication-title: Appl. Surf. Sci. doi: 10.1016/j.apsusc.2007.02.083 – volume: 4932 start-page: 358 year: 2003 ident: 10.1016/j.ijheatmasstransfer.2009.10.010_bib31 article-title: Ultrashort pulse damage of Si and Ge semiconductors publication-title: SPIE doi: 10.1117/12.472053 – volume: 237 start-page: 27 year: 2001 ident: 10.1016/j.ijheatmasstransfer.2009.10.010_bib28 article-title: Projection method III: spatial discretization on the staggered grid publication-title: Math. Comput. – volume: 9 start-page: 949 issue: 3 year: 2002 ident: 10.1016/j.ijheatmasstransfer.2009.10.010_bib1 article-title: Ablation of solids by femtosecond lasers: ablation mechanism and ablation thresholds for metals and dielectrics publication-title: Phys. Plasmas doi: 10.1063/1.1447555 – volume: 32 start-page: 494 issue: 5 year: 2009 ident: 10.1016/j.ijheatmasstransfer.2009.10.010_bib19 article-title: Ultrafast laser-induced elastodynamics in single crystalline silicon. Part II: Near-field response publication-title: J. Therm. Stresses doi: 10.1080/01495730802637399 |
| SSID | ssj0017046 |
| Score | 2.0673556 |
| Snippet | A generalized thermo-elastodynamic formulation applicable to the investigation of coupled thermomechanical responses of a silicon thin structure excited by... |
| SourceID | proquest pascalfrancis crossref elsevier |
| SourceType | Aggregation Database Index Database Enrichment Source Publisher |
| StartPage | 41 |
| SubjectTerms | Axisymmetric model Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Generalized thermoelasticity Physics Silicon wafer Staggered finite difference Thermal expansion; thermomechanical effects and density Thermal properties of condensed matter Thermal properties of crystalline solids Ultrafast laser pulse |
| Title | Generalized thermo-elastodynamics for semiconductor material subject to ultrafast laser heating. Part I: Model description and validation |
| URI | https://dx.doi.org/10.1016/j.ijheatmasstransfer.2009.10.010 https://www.proquest.com/docview/21261644 https://www.proquest.com/docview/35191378 |
| Volume | 53 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwrV1La9wwEBYhoaVQQp90-9jq0EMvamzrYSuXEJaGTZeGUhqam5ElGRw29rL2XnrIPf-6M5a9JaQ9BHoyNpIZS6OZT9bMfIR84NYk4LUl84l2TCQmYgV3mlnFuZC-cJnFE92vZ2p-Lr5cyIsdMhtzYTCscrD9wab31np4cjCM5sGqqjDHF5UrBpCAhaT6_F4hUtTyT9fbMI84jUKyDlpjbP2QfPwT41VdosW7Apja9TDRr0MFS4z3wpzav7uqxyvTwgCWgfnijhHvPdPJE7I_QEp6HKR-SnZ8_Yw86EM7bfuc3AyVpatf3lGEe1cN84CZu8YFNvqWAnClLUbJNzWWf4U7wLG9atJ2U-CfGto1dLME8UvoSKG3X1P8KKRdoN9gwOjpIUVetSV1fmuJqKkdBVWuAnHTC3J-8vnHbM4GAgZmBRcdc4n1MrPSxF5HRqosKZ1ShbSFclbzqPSxFViQMIozj1iGCyNUVGaZRGAj-EuyWze1f0WoSk0kfKZFVHLhtTKF8zA1aZEY2PApMyFH41jndqhOjiQZy3wMQ7vM784WkmhqbAGzNSF6-4ZVqNRxj76zcXrzW9qXg2O5x1umtzRjK0aCm2qlkwl5P6pKDqsYj2ZM7ZtNmwOAULBxFf9ugUSKMU-z1_9F1DfkUQiDiFks35Ldbr3x7wBddcW0Xz5Tsnd8upif4XXx_efiN-AELjk |
| linkProvider | Elsevier |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwrV1La9wwEBYhpQ8ooU-6aZro0EMvamxL1lq9lLI0bNok9JBAbkaWxuCwsZe199JD7_3XmbHsLSHtIdCjjSTG0mjmkzUzH2PvpbMJeu1UQGK8UImNRCG9EU5LqVIofOboRvf0TM8v1LfL9HKLzcZcGAqrHGx_sOm9tR7eHA6zebisKsrxJeWKESRQISnK732gcPsSjcHHX5s4j3gahWwdMsfU_BH78CfIq7oik3eNOLXrcSKsQglLCviipNq_-6qnS9viDJaB-uKOFe9d09EztjNgSv4liP2cbUH9gj3sYztd-5L9HkpLVz_Bc8J7140ABM1d4wMdfcsRufKWwuSbmuq_4hMC2V43ebsu6FcN7xq-XqD4JXbk2BtWnD6KeBf4D5wxfvyJE7HagnvYmCJua89Rl6vA3PSKXRx9PZ_NxcDAIJySqhM-cZBmLrUxmMimOktKr3WRukJ7Z2RUQuwUVSSM4gwIzEhllY7KLEsJ2Sj5mm3XTQ1vGNdTGynIjIpKqcBoW3jApZkWicUTn7YT9nmc69wN5cmJJWORj3FoV_nd1SIWTUMtcLUmzGxGWIZSHffoOxuXN7-lfjl6lnuMsn9LMzZiJHSq1iaZsINRVXLcxnQ3Y2to1m2OCELjyVX9uwUxKcZymu3-F1EP2OP5-elJfnJ89v0texJiImIRp3tsu1ut4R1Cra7Y77fSDQfhLiQ |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Generalized+thermo-elastodynamics+for+semiconductor+material+subject+to+ultrafast+laser+heating.+Part+I%3A+Model+description+and+validation&rft.jtitle=International+journal+of+heat+and+mass+transfer&rft.au=XUELE+QI&rft.au=SUH%2C+C.+Steve&rft.date=2010-01-15&rft.pub=Elsevier&rft.issn=0017-9310&rft.volume=53&rft.issue=1-3&rft.spage=41&rft.epage=47&rft_id=info:doi/10.1016%2Fj.ijheatmasstransfer.2009.10.010&rft.externalDBID=n%2Fa&rft.externalDocID=22225692 |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0017-9310&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0017-9310&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0017-9310&client=summon |