Design and applications of MEMS flow sensors: A review

• Published in: Sensors and actuators. A. Physical. Vol. 295; pp. 483 - 502
• Main Authors: Ejeian, Fatemeh, Azadi, Shohreh, Razmjou, Amir, Orooji, Yasin, Kottapalli, Ajay, Ebrahimi Warkiani, Majid, Asadnia, Mohsen
• Format: Journal Article
• Language: English
• Published: Lausanne Elsevier B.V 15.08.2019; Elsevier BV
• Subjects: Artificial hair cell; Bio-inspired sensing; Flow sensors; Flow velocity; Fluid dynamics; Fluid flow; Heat transfer; Hot-wire; Mechanical properties; Microelectromechanical systems; Piezoelectric; Piezoelectricity; Piezoresistive; Production methods; Sensors; Flow sensors; Piezoresistive; Hot-wire; Bio-inspired sensing; Piezoelectric; Artificial hair cell

[Display omitted] There is an indispensable need for fluid flow rate and direction sensors in various medical, industrial and environmental applications. Besides the critical demands on sensing range of flow parameters (such as rate, velocity, direction and temperature), the properties of different...