Design and applications of MEMS flow sensors: A review - Ejeian, Fatemeh; Azadi, Shohreh; Razmjou, Amir; Orooji, Yasin; Kottapalli, Ajay; Ebrahimi Warkiani, Majid; Asadnia, Mohsen (Sensors and actuators. A. Physical., 2019)
Keywords: Artificial hair cell; Bio-inspired sensing; Flow sensors; Flow velocity; Fluid dynamics; Fluid flow; Heat transfer; Hot-wire; Mechanical properties; Microelectromechanical systems; Piezoelectric; Piezoelectricity; Piezoresistive; Production methods; Sensors; Flow sensors; Piezoresistive; Hot-wire; Bio-inspired sensing; Piezoelectric; Artificial hair cell