Residual stress measurement in thin carbon films by Raman spectroscopy and nanoindentation
The reliability of hermetic carbon-coated optical fibers is affected by residual stresses in the coating created during the fiber draw process. Thermally induced residual stresses are caused by differences in the coefficient of thermal expansion (CTE) of the coating and the optical fiber. This misma...
Saved in:
Published in | Thin solid films Vol. 429; no. 1; pp. 190 - 200 |
---|---|
Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
Lausanne
Elsevier B.V
01.04.2003
Elsevier Science |
Subjects | |
Online Access | Get full text |
Cover
Loading…
Abstract | The reliability of hermetic carbon-coated optical fibers is affected by residual stresses in the coating created during the fiber draw process. Thermally induced residual stresses are caused by differences in the coefficient of thermal expansion (CTE) of the coating and the optical fiber. This mismatch creates shear stresses at the interface that can delaminate the film. This work presents and validates a surface residual-stress measurement technique using Raman spectroscopy. Since select Raman peaks for carbon films exhibit a wavenumber shift in proportion to the magnitude of residual stress, Raman spectra can be correlated to a theoretical model to obtain its residual stress. The model, validated with nanoindentation, shows an equi-biaxial stress field through the depth of the film. Nanoindentation also provides an accurate measure of residual stress in thin films with unknown material properties. The approach presented in this study is a non-destructive and non-intrusive method for measuring residual surface stress in thin films, and is ideal for small curved-surface specimens such as carbon-coated optical fibers. |
---|---|
AbstractList | The reliability of hermetic carbon-coated optical fibers is affected by residual stresses in the coating created during the fiber draw process. Thermally induced residual stresses are caused by differences in the coefficient of thermal expansion (CTE) of the coating and the optical fiber. This mismatch creates shear stresses at the interface that can delaminate the film. This work presents and validates a surface residual-stress measurement technique using Raman spectroscopy. Since select Raman peaks for carbon films exhibit a wavenumber shift in proportion to the magnitude of residual stress, Raman spectra can be correlated to a theoretical model to obtain its residual stress. The model, validated with nanoindentation, shows an equi-biaxial stress field through the depth of the film. Nanoindentation also provides an accurate measure of residual stress in thin films with unknown material properties. The approach presented in this study is a non-destructive and non-intrusive method for measuring residual surface stress in thin films, and is ideal for small curved-surface specimens such as carbon-coated optical fibers. |
Author | Taylor, Craig A Wayne, Mark F Chiu, Wilson K.S |
Author_xml | – sequence: 1 givenname: Craig A surname: Taylor fullname: Taylor, Craig A – sequence: 2 givenname: Mark F surname: Wayne fullname: Wayne, Mark F – sequence: 3 givenname: Wilson K.S surname: Chiu fullname: Chiu, Wilson K.S email: wchiu@engr.uconn.edu |
BackLink | http://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=14750130$$DView record in Pascal Francis |
BookMark | eNqFkMtrGzEQh0VwoLbTP6GgS0Nz2HT02NeplJAXGApOeulFyNpZorIrOZrdgP_7KnFoj73MXL7fPL4VW4QYkLFPAi4FiOrrA4CGooIWvoC6AJB1VYgTthRN3RayVmLBln-RD2xF9BsAhJRqyX5tkXw324HTlJCIj2hpTjhimLgPfHrKxdm0i4H3fhiJ7w58a0cbOO3RTSmSi_sDt6HjwYboQ5eTdvIxnLHT3g6EH9_7mv28uX68uis2P27vr75vCqeVnopaoup1Lfq2dKKBXduAbPpGqlI6W_UIUHVS11WD1pUIUlUaOtE2WtWtFrtKrdn5ce4-xecZaTKjJ4fDYAPGmYzMnCoblcHyCLp8NSXszT750aaDEWBeTZo3k-ZVkwFl3kwakXOf3xdYcnbokw3O07-wrksQCjL37chh_vbFYzLkPAaHnU9Zlemi_8-mP1rliTk |
CODEN | THSFAP |
CitedBy_id | crossref_primary_10_1016_j_diamond_2004_01_028 crossref_primary_10_1016_j_tsf_2019_137755 crossref_primary_10_1016_j_surfcoat_2020_125972 crossref_primary_10_1016_j_tsf_2012_01_032 crossref_primary_10_1021_am401693u crossref_primary_10_1088_1757_899X_213_1_012030 crossref_primary_10_1080_02670836_2016_1190537 crossref_primary_10_1016_j_tsf_2003_10_059 crossref_primary_10_1080_10408436_2014_940442 crossref_primary_10_1007_s11664_015_3631_x crossref_primary_10_1016_j_mssp_2021_106014 crossref_primary_10_1007_s10409_015_0516_4 crossref_primary_10_1016_j_corsci_2018_09_007 crossref_primary_10_1016_j_optlastec_2015_01_009 crossref_primary_10_1016_j_carbon_2014_09_094 crossref_primary_10_1063_1_3694855 crossref_primary_10_1016_j_jnucmat_2022_153718 crossref_primary_10_1002_jrs_2584 crossref_primary_10_1002_smll_202105748 crossref_primary_10_1016_j_jnoncrysol_2020_120534 crossref_primary_10_1016_j_compositesb_2016_06_078 crossref_primary_10_1007_s00339_022_05694_8 crossref_primary_10_1063_1_3273944 crossref_primary_10_1016_j_msea_2011_12_078 crossref_primary_10_1016_j_cap_2014_04_012 crossref_primary_10_1016_j_physb_2011_07_016 crossref_primary_10_1088_2058_8585_1_1_015003 crossref_primary_10_1016_j_wear_2017_01_049 crossref_primary_10_1016_j_biomaterials_2010_05_012 crossref_primary_10_1016_j_vibspec_2006_06_005 crossref_primary_10_1016_j_actamat_2008_07_031 crossref_primary_10_1016_j_tsf_2013_02_123 crossref_primary_10_1111_ffe_12652 crossref_primary_10_1557_PROC_875_O2_2 crossref_primary_10_1063_1_1946912 crossref_primary_10_1016_S1003_6326_18_64896_4 crossref_primary_10_1063_1_5009756 crossref_primary_10_1016_j_jmst_2019_07_023 crossref_primary_10_3390_nano8080590 crossref_primary_10_1016_j_radphyschem_2015_02_007 crossref_primary_10_7567_JJAP_57_06HF01 crossref_primary_10_1016_j_surfcoat_2011_01_004 crossref_primary_10_1016_j_carbon_2019_12_096 crossref_primary_10_1002_pssb_201552216 crossref_primary_10_1039_C6RA06413B crossref_primary_10_1007_s00170_015_7510_7 crossref_primary_10_1016_j_nme_2023_101470 crossref_primary_10_1016_j_surfcoat_2015_10_049 crossref_primary_10_1016_j_jmatprotec_2007_11_258 crossref_primary_10_1016_j_ceramint_2013_06_073 crossref_primary_10_1016_j_jmst_2018_09_023 crossref_primary_10_1016_j_carbon_2010_06_002 crossref_primary_10_1557_jmr_2014_218 crossref_primary_10_1016_j_actamat_2006_11_043 crossref_primary_10_1016_j_surfcoat_2010_07_118 crossref_primary_10_1016_j_matchemphys_2010_10_016 crossref_primary_10_1016_j_wear_2019_01_023 crossref_primary_10_1016_j_surfcoat_2005_02_023 crossref_primary_10_1007_s40436_016_0165_2 crossref_primary_10_1007_s40436_018_0218_9 crossref_primary_10_1063_1_4906289 crossref_primary_10_1016_j_ceramint_2019_10_188 crossref_primary_10_4028_www_scientific_net_KEM_434_435_209 crossref_primary_10_1016_j_surfcoat_2006_07_054 crossref_primary_10_1016_j_jmst_2018_09_055 crossref_primary_10_1016_j_tsf_2009_03_043 crossref_primary_10_1109_JLT_2005_863259 crossref_primary_10_1016_j_surfcoat_2007_07_039 |
Cites_doi | 10.1016/S0168-583X(01)00405-0 10.1557/JMR.1992.1564 10.1016/S1359-6462(99)00011-1 10.1557/JMR.1997.0329 10.1016/S1359-6454(01)00123-9 10.1016/S1359-6454(98)00226-2 10.1063/1.372410 10.1103/PhysRevB.59.10928 10.1063/1.367427 10.1103/PhysRevB.48.2601 10.1016/S0008-6223(01)00207-X 10.1109/50.76652 10.1557/JMR.1996.0091 10.1016/0008-6223(85)90196-4 10.1016/S0921-5093(98)00724-2 10.1016/S1359-6454(01)00122-7 10.1103/PhysRevB.26.5867 10.1557/JMR.1996.0092 10.1016/S0925-9635(00)00188-6 10.1016/0008-6223(72)90076-0 10.1016/S1359-835X(00)00107-X 10.1116/1.574188 10.1049/el:19890954 10.2109/jcersj.101.301 10.1016/0008-6223(69)90529-6 10.1016/0008-6223(67)90026-7 10.1063/1.1674108 |
ContentType | Journal Article |
Copyright | 2003 Elsevier Science B.V. 2003 INIST-CNRS |
Copyright_xml | – notice: 2003 Elsevier Science B.V. – notice: 2003 INIST-CNRS |
DBID | IQODW AAYXX CITATION 7SP 7U5 8FD L7M |
DOI | 10.1016/S0040-6090(03)00276-1 |
DatabaseName | Pascal-Francis CrossRef Electronics & Communications Abstracts Solid State and Superconductivity Abstracts Technology Research Database Advanced Technologies Database with Aerospace |
DatabaseTitle | CrossRef Solid State and Superconductivity Abstracts Technology Research Database Advanced Technologies Database with Aerospace Electronics & Communications Abstracts |
DatabaseTitleList | Solid State and Superconductivity Abstracts |
DeliveryMethod | fulltext_linktorsrc |
Discipline | Engineering Physics |
EISSN | 1879-2731 |
EndPage | 200 |
ExternalDocumentID | 10_1016_S0040_6090_03_00276_1 14750130 S0040609003002761 |
GroupedDBID | --K --M -~X .DC .~1 0R~ 123 1B1 1RT 1~. 1~5 29Q 4.4 457 4G. 5VS 6TJ 7-5 71M 8P~ 9JN AABNK AABXZ AACTN AAEDT AAEDW AAEPC AAIAV AAIKJ AAKOC AALRI AAOAW AAQFI AAQXK AAXUO AAYJJ ABFNM ABFRF ABJNI ABMAC ABNEU ABXDB ABXRA ABYKQ ACBEA ACDAQ ACFVG ACGFO ACGFS ACNNM ACRLP ADBBV ADEZE ADMUD AEBSH AEFWE AEKER AENEX AEZYN AFFNX AFKWA AFRZQ AFTJW AGHFR AGUBO AGYEJ AHHHB AIEXJ AIKHN AITUG AIVDX AJBFU AJOXV ALMA_UNASSIGNED_HOLDINGS AMFUW AMRAJ ASPBG AVWKF AXJTR AZFZN BBWZM BKOJK BLXMC CS3 DU5 EBS EFJIC EFLBG EJD EO8 EO9 EP2 EP3 F5P FDB FEDTE FGOYB FIRID FNPLU FYGXN G-2 G-Q G8K GBLVA HMV HVGLF HX~ HZ~ IHE J1W KOM M24 M38 M41 MAGPM MO0 N9A NDZJH O-L O9- OAUVE OGIMB OZT P-8 P-9 P2P PC. Q38 R2- RIG RNS ROL RPZ SDF SDG SDP SES SEW SMS SPC SPCBC SPD SPG SSM SSQ SSZ T5K TWZ VOH WH7 WUQ XFK ZMT ~G- ABPIF ABPTK IQODW AAXKI AAYXX AFJKZ AKRWK CITATION 7SP 7U5 8FD L7M |
ID | FETCH-LOGICAL-c434t-72e3f471f95c180b98028f82352ca6fe006d24768eac5e023640d198437941b63 |
IEDL.DBID | AIKHN |
ISSN | 0040-6090 |
IngestDate | Sat Oct 05 05:28:40 EDT 2024 Thu Sep 26 19:10:22 EDT 2024 Sun Oct 29 17:06:51 EDT 2023 Fri Feb 23 02:25:27 EST 2024 |
IsPeerReviewed | true |
IsScholarly | true |
Issue | 1 |
Keywords | Pyrolytic carbon Raman spectroscopy Residual stress Nanoindentation Optical fibers Measuring methods Residual stresses Experimental study Carbon Surface stresses Thin films Non destructive method Stress distribution Nonmetals Optical method Protective coatings Thermal stresses |
Language | English |
License | CC BY 4.0 |
LinkModel | DirectLink |
MergedId | FETCHMERGED-LOGICAL-c434t-72e3f471f95c180b98028f82352ca6fe006d24768eac5e023640d198437941b63 |
Notes | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
PQID | 27943583 |
PQPubID | 23500 |
PageCount | 11 |
ParticipantIDs | proquest_miscellaneous_27943583 crossref_primary_10_1016_S0040_6090_03_00276_1 pascalfrancis_primary_14750130 elsevier_sciencedirect_doi_10_1016_S0040_6090_03_00276_1 |
PublicationCentury | 2000 |
PublicationDate | 2003-04-01 |
PublicationDateYYYYMMDD | 2003-04-01 |
PublicationDate_xml | – month: 04 year: 2003 text: 2003-04-01 day: 01 |
PublicationDecade | 2000 |
PublicationPlace | Lausanne |
PublicationPlace_xml | – name: Lausanne |
PublicationTitle | Thin solid films |
PublicationYear | 2003 |
Publisher | Elsevier B.V Elsevier Science |
Publisher_xml | – name: Elsevier B.V – name: Elsevier Science |
References | Giannakopoulos, Suresh (BIB20) 1999; 40 Tuinstra, Koenig (BIB26) 1970; 53 Venkateswaran, Rao, Richter (BIB31) 1999; 59 237, February 1988 Koguchi, Hirabayashi, Kokura (BIB3) 1993; 101 Christopher, Smith, Richter (BIB18) 2001; 180 Suresh, Giannakopoulos (BIB9) 1998; 46 Shiue, Lien, He (BIB8) 2000; 87 Bolshakov, Oliver, Pharr (BIB14) 1996; 11 Shiue, Lin (BIB7) 1998; 83 155 Taylor, Chiu (BIB11) 2002 Matsuo, Sasaki (BIB23) 1985; 23 Shiue, Lee (BIB6) 1997; 12 Ager, Drory (BIB32) 1993; 48 Yoshizawa, Tada, Katsuyama (BIB2) 1991; 9 Johnson (BIB17) 1985 C.A. Schantz, Pyrolysis-Coated Optical Fiber Splices, US Patent 4 Montes-Moran, Young (BIB29) 2002; 40 Tsui, Oliver, Pharr (BIB13) 1996; 11 Carlsson, Larsson (BIB16) 2001; 49 Kaae (BIB27) 1972; 10 S. Suresh, A.E. Giannakopoulos, US Patent 6 Tsai, Bogy (BIB28) 1987; 5 Yoshizawa, Katsuyama (BIB1) 1989; 25 Pharr (BIB22) 1998; 253 Cooper, Young, Halsall (BIB30) 2001; 32 Richter, Ries, Smith, Henkel, Wolf (BIB19) 2000; 9 Mason, Knibbs (BIB25) 1967; 5 Lindholm, Lie, Hokansson, Abramczyk (BIB4) 1999 104, 5 December 2000 Carlsson, Larsson (BIB15) 2001; 49 727 Chieu, Dresselhaus, Endo (BIB12) 1982; 26 Oliver, Pharr (BIB21) 1992; 7 Price, Kaae (BIB24) 1969; 7 Oliver (10.1016/S0040-6090(03)00276-1_BIB21) 1992; 7 Carlsson (10.1016/S0040-6090(03)00276-1_BIB16) 2001; 49 Shiue (10.1016/S0040-6090(03)00276-1_BIB7) 1998; 83 Venkateswaran (10.1016/S0040-6090(03)00276-1_BIB31) 1999; 59 Giannakopoulos (10.1016/S0040-6090(03)00276-1_BIB20) 1999; 40 Kaae (10.1016/S0040-6090(03)00276-1_BIB27) 1972; 10 Tsui (10.1016/S0040-6090(03)00276-1_BIB13) 1996; 11 Richter (10.1016/S0040-6090(03)00276-1_BIB19) 2000; 9 Yoshizawa (10.1016/S0040-6090(03)00276-1_BIB2) 1991; 9 Matsuo (10.1016/S0040-6090(03)00276-1_BIB23) 1985; 23 Christopher (10.1016/S0040-6090(03)00276-1_BIB18) 2001; 180 Mason (10.1016/S0040-6090(03)00276-1_BIB25) 1967; 5 Montes-Moran (10.1016/S0040-6090(03)00276-1_BIB29) 2002; 40 Shiue (10.1016/S0040-6090(03)00276-1_BIB6) 1997; 12 Yoshizawa (10.1016/S0040-6090(03)00276-1_BIB1) 1989; 25 10.1016/S0040-6090(03)00276-1_BIB5 10.1016/S0040-6090(03)00276-1_BIB10 Cooper (10.1016/S0040-6090(03)00276-1_BIB30) 2001; 32 Shiue (10.1016/S0040-6090(03)00276-1_BIB8) 2000; 87 Taylor (10.1016/S0040-6090(03)00276-1_BIB11) 2002 Suresh (10.1016/S0040-6090(03)00276-1_BIB9) 1998; 46 Carlsson (10.1016/S0040-6090(03)00276-1_BIB15) 2001; 49 Chieu (10.1016/S0040-6090(03)00276-1_BIB12) 1982; 26 Price (10.1016/S0040-6090(03)00276-1_BIB24) 1969; 7 Lindholm (10.1016/S0040-6090(03)00276-1_BIB4) 1999 Pharr (10.1016/S0040-6090(03)00276-1_BIB22) 1998; 253 Tsai (10.1016/S0040-6090(03)00276-1_BIB28) 1987; 5 Johnson (10.1016/S0040-6090(03)00276-1_BIB17) 1985 Ager (10.1016/S0040-6090(03)00276-1_BIB32) 1993; 48 Tuinstra (10.1016/S0040-6090(03)00276-1_BIB26) 1970; 53 Koguchi (10.1016/S0040-6090(03)00276-1_BIB3) 1993; 101 Bolshakov (10.1016/S0040-6090(03)00276-1_BIB14) 1996; 11 |
References_xml | – volume: 11 start-page: 752 year: 1996 ident: BIB13 publication-title: J. Mater. Res. contributor: fullname: Pharr – volume: 23 start-page: 51 year: 1985 ident: BIB23 publication-title: Carbon contributor: fullname: Sasaki – volume: 40 start-page: 857 year: 2002 ident: BIB29 publication-title: Carbon contributor: fullname: Young – volume: 32 start-page: 401 year: 2001 ident: BIB30 publication-title: Compounds A contributor: fullname: Halsall – volume: 59 start-page: 10928 year: 1999 ident: BIB31 publication-title: Phys. Rev. B contributor: fullname: Richter – year: 2002 ident: BIB11 article-title: Optical fiber and fiber component mechanical reliability and testing II publication-title: Proceedings of SPIE 4639, San Jose, USA, 21 January contributor: fullname: Chiu – volume: 12 start-page: 2493 year: 1997 ident: BIB6 publication-title: J. Mater. Res. contributor: fullname: Lee – volume: 40 start-page: 1191 year: 1999 ident: BIB20 publication-title: Scr. Mater. contributor: fullname: Suresh – volume: 26 start-page: 5867 year: 1982 ident: BIB12 publication-title: Phys. Rev. B contributor: fullname: Endo – volume: 7 start-page: 1564 year: 1992 ident: BIB21 publication-title: J. Mater. Res. contributor: fullname: Pharr – volume: 5 start-page: 493 year: 1967 ident: BIB25 publication-title: Carbon contributor: fullname: Knibbs – year: 1999 ident: BIB4 publication-title: Proceedings of the International Wire and Cable Symposium, Atlantic City, NJ contributor: fullname: Abramczyk – volume: 25 start-page: 1429 year: 1989 ident: BIB1 publication-title: Electron. Lett. contributor: fullname: Katsuyama – volume: 83 start-page: 5719 year: 1998 ident: BIB7 publication-title: J. Appl. Phys. contributor: fullname: Lin – year: 1985 ident: BIB17 publication-title: Contact Mechanics contributor: fullname: Johnson – volume: 46 start-page: 5755 year: 1998 ident: BIB9 publication-title: Acta Mater. contributor: fullname: Giannakopoulos – volume: 253 start-page: 151 year: 1998 ident: BIB22 publication-title: Mater. Sci. Eng. A contributor: fullname: Pharr – volume: 11 start-page: 760 year: 1996 ident: BIB14 publication-title: J. Mater. Res. contributor: fullname: Pharr – volume: 180 start-page: 117 year: 2001 ident: BIB18 publication-title: Nucl. Instrum. Methods B contributor: fullname: Richter – volume: 9 start-page: 417 year: 1991 ident: BIB2 publication-title: J. Lightwave Technol. contributor: fullname: Katsuyama – volume: 10 start-page: 691 year: 1972 ident: BIB27 publication-title: Carbon contributor: fullname: Kaae – volume: 7 start-page: 706 year: 1969 ident: BIB24 publication-title: Carbon contributor: fullname: Kaae – volume: 53 start-page: 1126 year: 1970 ident: BIB26 publication-title: J. Chem. Phys. contributor: fullname: Koenig – volume: 9 start-page: 170 year: 2000 ident: BIB19 publication-title: Diamond Relat. Mater. contributor: fullname: Wolf – volume: 101 start-page: 293 year: 1993 ident: BIB3 publication-title: J. Ceram. Soc. Jpn. Int. Ed. contributor: fullname: Kokura – volume: 87 start-page: 3759 year: 2000 ident: BIB8 publication-title: J. Appl. Phys. contributor: fullname: He – volume: 48 start-page: 2601 year: 1993 ident: BIB32 publication-title: Phys. Rev. B contributor: fullname: Drory – volume: 49 start-page: 2193 year: 2001 ident: BIB16 publication-title: Acta Mater. contributor: fullname: Larsson – volume: 5 start-page: 3287 year: 1987 ident: BIB28 publication-title: J. Vac. Sci. Technol. A contributor: fullname: Bogy – volume: 49 start-page: 2179 year: 2001 ident: BIB15 publication-title: Acta Mater. contributor: fullname: Larsson – volume: 180 start-page: 117 year: 2001 ident: 10.1016/S0040-6090(03)00276-1_BIB18 publication-title: Nucl. Instrum. Methods B doi: 10.1016/S0168-583X(01)00405-0 contributor: fullname: Christopher – volume: 7 start-page: 1564 year: 1992 ident: 10.1016/S0040-6090(03)00276-1_BIB21 publication-title: J. Mater. Res. doi: 10.1557/JMR.1992.1564 contributor: fullname: Oliver – volume: 40 start-page: 1191 year: 1999 ident: 10.1016/S0040-6090(03)00276-1_BIB20 publication-title: Scr. Mater. doi: 10.1016/S1359-6462(99)00011-1 contributor: fullname: Giannakopoulos – volume: 12 start-page: 2493 year: 1997 ident: 10.1016/S0040-6090(03)00276-1_BIB6 publication-title: J. Mater. Res. doi: 10.1557/JMR.1997.0329 contributor: fullname: Shiue – volume: 49 start-page: 2193 year: 2001 ident: 10.1016/S0040-6090(03)00276-1_BIB16 publication-title: Acta Mater. doi: 10.1016/S1359-6454(01)00123-9 contributor: fullname: Carlsson – volume: 46 start-page: 5755 year: 1998 ident: 10.1016/S0040-6090(03)00276-1_BIB9 publication-title: Acta Mater. doi: 10.1016/S1359-6454(98)00226-2 contributor: fullname: Suresh – year: 2002 ident: 10.1016/S0040-6090(03)00276-1_BIB11 article-title: Optical fiber and fiber component mechanical reliability and testing II contributor: fullname: Taylor – volume: 87 start-page: 3759 year: 2000 ident: 10.1016/S0040-6090(03)00276-1_BIB8 publication-title: J. Appl. Phys. doi: 10.1063/1.372410 contributor: fullname: Shiue – volume: 59 start-page: 10928 year: 1999 ident: 10.1016/S0040-6090(03)00276-1_BIB31 publication-title: Phys. Rev. B doi: 10.1103/PhysRevB.59.10928 contributor: fullname: Venkateswaran – volume: 83 start-page: 5719 year: 1998 ident: 10.1016/S0040-6090(03)00276-1_BIB7 publication-title: J. Appl. Phys. doi: 10.1063/1.367427 contributor: fullname: Shiue – volume: 48 start-page: 2601 year: 1993 ident: 10.1016/S0040-6090(03)00276-1_BIB32 publication-title: Phys. Rev. B doi: 10.1103/PhysRevB.48.2601 contributor: fullname: Ager – volume: 40 start-page: 857 year: 2002 ident: 10.1016/S0040-6090(03)00276-1_BIB29 publication-title: Carbon doi: 10.1016/S0008-6223(01)00207-X contributor: fullname: Montes-Moran – ident: 10.1016/S0040-6090(03)00276-1_BIB10 – volume: 9 start-page: 417 year: 1991 ident: 10.1016/S0040-6090(03)00276-1_BIB2 publication-title: J. Lightwave Technol. doi: 10.1109/50.76652 contributor: fullname: Yoshizawa – volume: 11 start-page: 752 year: 1996 ident: 10.1016/S0040-6090(03)00276-1_BIB13 publication-title: J. Mater. Res. doi: 10.1557/JMR.1996.0091 contributor: fullname: Tsui – ident: 10.1016/S0040-6090(03)00276-1_BIB5 – volume: 23 start-page: 51 year: 1985 ident: 10.1016/S0040-6090(03)00276-1_BIB23 publication-title: Carbon doi: 10.1016/0008-6223(85)90196-4 contributor: fullname: Matsuo – volume: 253 start-page: 151 year: 1998 ident: 10.1016/S0040-6090(03)00276-1_BIB22 publication-title: Mater. Sci. Eng. A doi: 10.1016/S0921-5093(98)00724-2 contributor: fullname: Pharr – year: 1999 ident: 10.1016/S0040-6090(03)00276-1_BIB4 contributor: fullname: Lindholm – volume: 49 start-page: 2179 year: 2001 ident: 10.1016/S0040-6090(03)00276-1_BIB15 publication-title: Acta Mater. doi: 10.1016/S1359-6454(01)00122-7 contributor: fullname: Carlsson – year: 1985 ident: 10.1016/S0040-6090(03)00276-1_BIB17 contributor: fullname: Johnson – volume: 26 start-page: 5867 year: 1982 ident: 10.1016/S0040-6090(03)00276-1_BIB12 publication-title: Phys. Rev. B doi: 10.1103/PhysRevB.26.5867 contributor: fullname: Chieu – volume: 11 start-page: 760 year: 1996 ident: 10.1016/S0040-6090(03)00276-1_BIB14 publication-title: J. Mater. Res. doi: 10.1557/JMR.1996.0092 contributor: fullname: Bolshakov – volume: 9 start-page: 170 year: 2000 ident: 10.1016/S0040-6090(03)00276-1_BIB19 publication-title: Diamond Relat. Mater. doi: 10.1016/S0925-9635(00)00188-6 contributor: fullname: Richter – volume: 10 start-page: 691 year: 1972 ident: 10.1016/S0040-6090(03)00276-1_BIB27 publication-title: Carbon doi: 10.1016/0008-6223(72)90076-0 contributor: fullname: Kaae – volume: 32 start-page: 401 year: 2001 ident: 10.1016/S0040-6090(03)00276-1_BIB30 publication-title: Compounds A doi: 10.1016/S1359-835X(00)00107-X contributor: fullname: Cooper – volume: 5 start-page: 3287 year: 1987 ident: 10.1016/S0040-6090(03)00276-1_BIB28 publication-title: J. Vac. Sci. Technol. A doi: 10.1116/1.574188 contributor: fullname: Tsai – volume: 25 start-page: 1429 year: 1989 ident: 10.1016/S0040-6090(03)00276-1_BIB1 publication-title: Electron. Lett. doi: 10.1049/el:19890954 contributor: fullname: Yoshizawa – volume: 101 start-page: 293 year: 1993 ident: 10.1016/S0040-6090(03)00276-1_BIB3 publication-title: J. Ceram. Soc. Jpn. Int. Ed. doi: 10.2109/jcersj.101.301 contributor: fullname: Koguchi – volume: 7 start-page: 706 year: 1969 ident: 10.1016/S0040-6090(03)00276-1_BIB24 publication-title: Carbon doi: 10.1016/0008-6223(69)90529-6 contributor: fullname: Price – volume: 5 start-page: 493 year: 1967 ident: 10.1016/S0040-6090(03)00276-1_BIB25 publication-title: Carbon doi: 10.1016/0008-6223(67)90026-7 contributor: fullname: Mason – volume: 53 start-page: 1126 year: 1970 ident: 10.1016/S0040-6090(03)00276-1_BIB26 publication-title: J. Chem. Phys. doi: 10.1063/1.1674108 contributor: fullname: Tuinstra |
SSID | ssj0001223 |
Score | 2.0759618 |
Snippet | The reliability of hermetic carbon-coated optical fibers is affected by residual stresses in the coating created during the fiber draw process. Thermally... |
SourceID | proquest crossref pascalfrancis elsevier |
SourceType | Aggregation Database Index Database Publisher |
StartPage | 190 |
SubjectTerms | Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science; rheology Exact sciences and technology Materials science Materials testing Mechanical and acoustical properties Nanoindentation Nondestructive testing: optical methods Physical properties of thin films, nonelectronic Physics Pyrolytic carbon Raman spectroscopy Residual stress Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) |
Title | Residual stress measurement in thin carbon films by Raman spectroscopy and nanoindentation |
URI | https://dx.doi.org/10.1016/S0040-6090(03)00276-1 https://search.proquest.com/docview/27943583 |
Volume | 429 |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1Ba9swFH5kCYONUrZupWnXVIcdtoMT25Id6xhCS7bQHMLKyi5CsiUWWGQTp4de9tv7JDvNyhiFXWwQSDJP0vee5O97AviIIQeVqVSBNDQJGC9owE1mgpzzIpEYMBhP-b9epLMb9vU2ue3AdKeFcbTKFvsbTPdo3ZaMWmuOqtXKaXzRGYXuJM7trdwWqIfuiLEu9CZf5rPFIyBHcfxInnMV9kKephFf-Cmkn307QfQvF3VQyRoNZ5obL_4Cb--Rrt7AYRtKkknztW-ho-0RvP4jweARvPQEz7x-Bz-Wuva6K9KoQ8h6fzhIVpZsf-IjlxtVWmJWv9Y1UfdkKdfSEi_GdEkvy-qeSFsQK23psiw2qiX7Hm6uLr9NZ0F7r0KQM8q2wTjW1KBTMjzJoyxUPMMgw2QxxmK5TI3GhVjEDPchCMqJ9inmwyLimUtdyCKV0mPo2tLqEyAK9z9aqsgYGbJCG55KlidM8WKsChXqPgx3phRVkz5D7HlloeOVoe1FSIW3vYj6kO0MLp7MA4EQ_1zVwZMB2nfIMCxCX92Hi92ICVxE7s-ItLq8q0Xs0uQlGT39_97P4JXn-XlSzwfobjd3-hzjla0awIvh72jQzkr3ni-_zx8AXfrmyw |
link.rule.ids | 315,786,790,4521,24144,27955,27956,45618,45712 |
linkProvider | Elsevier |
linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1LS8QwEB5kRVREfOL6zMGDHqptk3abo4iyvvYgCuIlJG2CC266bNeD_95J2nUVEcFLD4EkZZJ8M5N-3xTgEEMOKlOpAmloEjBe0ICbzAQ550UiMWAwnvJ_10u7j-z6KXmagfOJFsbRKhvsrzHdo3XTctpY83TY7zuNLzqj0N3EudzKpUCzLOlEcQtmz65uur1PQI7i-JM85zpMhTz1IL7xKKTHfpwg-s1FLQ1lhYYz9R8vfoC390iXK7DchJLkrH7bVZjRdg0WvxQYXIM5T_DMq3V4vteV112RWh1CBtPLQdK3ZPyCj1yOVGmJ6b8OKqLeyb0cSEu8GNMVvSyH70TaglhpS1dlsVYt2Q14vLx4OO8GzX8VgpxRNg46saYGnZLhSR5loeIZBhkmizEWy2VqNB7EImaYhyAoJ9qXmA-LiGeudCGLVEo3oWVLq7eAKMx_tFSRMTJkhTY8lSxPmOJFRxUq1G04mZhSDOvyGWLKKwsdrwxtL0IqvO1F1IZsYnDxbR8IhPi_uu5_W6DphAzDIvTVbTiYrJjAQ-S-jEiry7dKxK5MXpLR7f_PfgDz3Ye7W3F71bvZgQXP-fMEn11ojUdveg9jl7Hab_bmB7Hh5xg |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Residual+stress+measurement+in+thin+carbon+films+by+Raman+spectroscopy+and+nanoindentation&rft.jtitle=Thin+solid+films&rft.au=Taylor%2C+Craig+A&rft.au=Wayne%2C+Mark+F&rft.au=Chiu%2C+Wilson+K.S&rft.date=2003-04-01&rft.issn=0040-6090&rft.volume=429&rft.issue=1-2&rft.spage=190&rft.epage=200&rft_id=info:doi/10.1016%2FS0040-6090%2803%2900276-1&rft.externalDBID=n%2Fa&rft.externalDocID=10_1016_S0040_6090_03_00276_1 |
thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0040-6090&client=summon |
thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0040-6090&client=summon |
thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0040-6090&client=summon |