Fabrication of two- and three-dimensional periodic structures by multi-exposure of two-beam interference technique

• Published in: Optics express Vol. 13; no. 23; pp. 9605 - 9611
• Main Authors: Lai, Ngoc Diep, Liang, Wen Ping, Lin, Jian Hung, Hsu, Chia Chen, Lin, Cheng Hsiung
• Format: Journal Article
• Language: English
• Published: United States Optical Society of America - OSA Publishing 14.11.2005
• Subjects: Optics; Physics; Quantum Physics
• ISSN: 1094-4087; 1094-4087
• DOI: 10.1364/opex.13.009605

A simple and efficient optical interference method for fabricating high quality two- and three-dimensional (2D and 3D) periodic structures is demonstrated. Employing multi-exposure of two-beam interference technique, different types of periodic structures are created depending on the number of exposure and the rotation angle of the sample for each exposure. Square and hexagonal 2D structures are fabricated by a multi-exposure of two-beam interference pattern with a rotation angle of 90 masculine and 60 masculine between two different exposures, respectively. Three-exposure, in particular, results in different kinds of 3D structures, with close lattice constants in transverse and longitudinal directions, which is difficult to be obtained by the commonly used multi-beam interference technique. The experimental results obtained with SU-8 photoresist are well in agreement with the theoretical predictions. Multi-exposure of two-beam interference technique should be very useful for fabrication of photonic crystals.