UTA versus line emission for EUVL: studies on xenon emission at the NIST EBIT

Spectra from xenon ions have been recorded at the NIST electron beam ion trap (EBIT) and the emission into a 2% bandwidth at 13.5 nm arising from 4d - > 5p transitions compared with those from 4d - > 4f and 4p - > 4d transitions in Xe XI and also with that obtained from the unresolved trans...

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Published inJournal of physics. D, Applied physics Vol. 37; no. 23; pp. 3225 - 3232
Main Authors Fahy, K, Dunne, P, McKinney, L, O'Sullivan, G, Sokell, E, White, J, Aguilar, A, Pomeroy, J M, Tan, J N, Blagojević, B, LeBigot, E-O, Gillaspy, J D
Format Journal Article
LanguageEnglish
Published IOP Publishing 07.12.2004
Subjects
Atomic Physics
Physics
Quantum Physics
UTA
spectrum
EUV
EBIT
xenon
ions
light source
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Summary:Spectra from xenon ions have been recorded at the NIST electron beam ion trap (EBIT) and the emission into a 2% bandwidth at 13.5 nm arising from 4d - > 5p transitions compared with those from 4d - > 4f and 4p - > 4d transitions in Xe XI and also with that obtained from the unresolved transition array (UTA) observed to peak just below 11 nm. It was found that an improvement of a factor of 5 could be gained in photon yield using the UTA rather than the 4d - > 5p emission. The results are compared with atomic structure calculations and imply that a significant gain in efficiency should be obtained using tin, in which the emission at 13.5 nm comes from a similar UTA, rather than xenon, as an EUVL source material.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:0022-3727
1361-6463
DOI:10.1088/0022-3727/37/23/003