Electrical and optical properties of copper oxide thin films prepared by DC magnetron sputtering

• Published in: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena Vol. 38; no. 1
• Main Authors: Shukor, Anmar H., Alhattab, Haider A., Takano, Ichiro
• Format: Journal Article
• Language: English; Japanese
• Published: American Vacuum Society 01.01.2020
• ISSN: 2166-2746; 2166-2754
• DOI: 10.1116/1.5131518

Copper oxides (CuO, Cu2O) have promising application potential in sensors or solar cells. In this study, copper oxide thin films were prepared by reactive DC magnetron sputtering using helicon plasma. A pure copper target was sputtered with Ar gas in an O2 atmosphere with a DC sputtering power in th...