APA (7th ed.) Citation

Chen, A., & Guo, R. (2001). Age-based double EWMA controller and its application to CMP processes. IEEE transactions on semiconductor manufacturing, 14(1), 11-19. https://doi.org/10.1109/66.909650

Chicago Style (17th ed.) Citation

Chen, A., and Ruey-Shan Guo. "Age-based Double EWMA Controller and Its Application to CMP Processes." IEEE Transactions on Semiconductor Manufacturing 14, no. 1 (2001): 11-19. https://doi.org/10.1109/66.909650.

MLA (9th ed.) Citation

Chen, A., and Ruey-Shan Guo. "Age-based Double EWMA Controller and Its Application to CMP Processes." IEEE Transactions on Semiconductor Manufacturing, vol. 14, no. 1, 2001, pp. 11-19, https://doi.org/10.1109/66.909650.