The effects of low temperature buffer layer on the growth of pure Ge on Si(001) - Shin, Keun Wook; Kim, Hyun-Woo; Kim, Jungsub; Yang, Changjae; Lee, Sangsoo; Yoon, Euijoon (Thin solid films, 2010)
Keywords: Buffer layers; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Defects and impurities: doping, implantation, distribution, concentration, etc; Density; Exact sciences and technology; Germanium; Low temperature; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Physics; Silicon; Silicon germanides; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Theory and models of film growth; Thickness; Thin film structure and morphology; Thin films; Threading dislocations; Two step growth; UHVCVD; Thickness; Germanium; UHVCVD; Two step growth; Low temperature; Buffer layer; Dislocation density; Threading dislocation; Ge-Si alloys; Growth mechanism; Silicon