Measuring the dielectric constant of materials from valence EELS

Valence EELS combined with STEM provides an approach to determine the dielectric constant of materials in the optical range of frequencies. The paper describes the experimental procedure and discusses the critical aspects of valence electron energy-loss spectroscopy (VEELS) treatment. In particular,...

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Published inMicron (Oxford, England : 1993) Vol. 40; no. 2; pp. 262 - 268
Main Authors Potapov, P.L., Engelmann, H.-J., Zschech, E., Stöger-Pollach, M.
Format Journal Article
LanguageEnglish
Published England Elsevier Ltd 01.02.2009
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Abstract Valence EELS combined with STEM provides an approach to determine the dielectric constant of materials in the optical range of frequencies. The paper describes the experimental procedure and discusses the critical aspects of valence electron energy-loss spectroscopy (VEELS) treatment. In particular, the relativistic losses might affect strongly the results, and therefore they have to be subtracted from the spectra prior the analysis. The normalization of the energy-loss function is performed assuming an uniform thickness of the investigated area, which is reasonably fulfilled for carefully prepared FIB samples. This procedure requires the presence of at least one reference material with known dielectric properties to determine the absolute thickness. Examples of measuring the dielectric constant for several materials and structures are presented.
AbstractList Valence EELS combined with STEM provides an approach to determine the dielectric constant of materials in the optical range of frequencies. The paper describes the experimental procedure and discusses the critical aspects of valence electron energy-loss spectroscopy (VEELS) treatment. In particular, the relativistic losses might affect strongly the results, and therefore they have to be subtracted from the spectra prior the analysis. The normalization of the energy-loss function is performed assuming an uniform thickness of the investigated area, which is reasonably fulfilled for carefully prepared FIB samples. This procedure requires the presence of at least one reference material with known dielectric properties to determine the absolute thickness. Examples of measuring the dielectric constant for several materials and structures are presented.
Author Engelmann, H.-J.
Zschech, E.
Potapov, P.L.
Stöger-Pollach, M.
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Cites_doi 10.1007/BF01390952
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Issue 2
Keywords Kramers–Kronig transformation
VEELS
Cherenkov effect
Dielectric constant
Relativistic losses
Dielectric properties
Optical properties
Valence EELS
High-resolution EELS
Language English
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Snippet Valence EELS combined with STEM provides an approach to determine the dielectric constant of materials in the optical range of frequencies. The paper describes...
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SubjectTerms Cherenkov effect
Dielectric constant
Dielectric properties
High-resolution EELS
Kramers–Kronig transformation
Optical properties
Relativistic losses
Valence EELS
VEELS
Title Measuring the dielectric constant of materials from valence EELS
URI https://dx.doi.org/10.1016/j.micron.2008.07.006
https://www.ncbi.nlm.nih.gov/pubmed/18755592
https://search.proquest.com/docview/66729137
Volume 40
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