Measuring the dielectric constant of materials from valence EELS
Valence EELS combined with STEM provides an approach to determine the dielectric constant of materials in the optical range of frequencies. The paper describes the experimental procedure and discusses the critical aspects of valence electron energy-loss spectroscopy (VEELS) treatment. In particular,...
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Published in | Micron (Oxford, England : 1993) Vol. 40; no. 2; pp. 262 - 268 |
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Main Authors | , , , |
Format | Journal Article |
Language | English |
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Elsevier Ltd
01.02.2009
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Abstract | Valence EELS combined with STEM provides an approach to determine the dielectric constant of materials in the optical range of frequencies. The paper describes the experimental procedure and discusses the critical aspects of valence electron energy-loss spectroscopy (VEELS) treatment. In particular, the relativistic losses might affect strongly the results, and therefore they have to be subtracted from the spectra prior the analysis. The normalization of the energy-loss function is performed assuming an uniform thickness of the investigated area, which is reasonably fulfilled for carefully prepared FIB samples. This procedure requires the presence of at least one reference material with known dielectric properties to determine the absolute thickness. Examples of measuring the dielectric constant for several materials and structures are presented. |
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AbstractList | Valence EELS combined with STEM provides an approach to determine the dielectric constant of materials in the optical range of frequencies. The paper describes the experimental procedure and discusses the critical aspects of valence electron energy-loss spectroscopy (VEELS) treatment. In particular, the relativistic losses might affect strongly the results, and therefore they have to be subtracted from the spectra prior the analysis. The normalization of the energy-loss function is performed assuming an uniform thickness of the investigated area, which is reasonably fulfilled for carefully prepared FIB samples. This procedure requires the presence of at least one reference material with known dielectric properties to determine the absolute thickness. Examples of measuring the dielectric constant for several materials and structures are presented. |
Author | Engelmann, H.-J. Zschech, E. Potapov, P.L. Stöger-Pollach, M. |
Author_xml | – sequence: 1 givenname: P.L. surname: Potapov fullname: Potapov, P.L. email: pavel.potapov@amd.com organization: AMD Saxony Fab36 LLC & Co. KG, Wilschdorfer Landstr. 101, D-01109 Dresden, Germany – sequence: 2 givenname: H.-J. surname: Engelmann fullname: Engelmann, H.-J. organization: AMD Saxony Fab36 LLC & Co. KG, Wilschdorfer Landstr. 101, D-01109 Dresden, Germany – sequence: 3 givenname: E. surname: Zschech fullname: Zschech, E. organization: AMD Saxony Fab36 LLC & Co. KG, Wilschdorfer Landstr. 101, D-01109 Dresden, Germany – sequence: 4 givenname: M. surname: Stöger-Pollach fullname: Stöger-Pollach, M. organization: Institute of Solid State Physics, University Service Centre for TEM (USTEM), Vienna University of Technology, Wiedner Hauptstr. 8-10/138, A-1040 Vienna, Austria |
BackLink | https://www.ncbi.nlm.nih.gov/pubmed/18755592$$D View this record in MEDLINE/PubMed |
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Keywords | Kramers–Kronig transformation VEELS Cherenkov effect Dielectric constant Relativistic losses Dielectric properties Optical properties Valence EELS High-resolution EELS |
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SubjectTerms | Cherenkov effect Dielectric constant Dielectric properties High-resolution EELS Kramers–Kronig transformation Optical properties Relativistic losses Valence EELS VEELS |
Title | Measuring the dielectric constant of materials from valence EELS |
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