A Single-Crystal-Silicon Bulk-Acoustic-Mode Microresonator Oscillator

• Published in: IEEE electron device letters Vol. 29; no. 7; pp. 701 - 703
• Main Authors: Lee, J.E.-Y., Bahreyni, B., Yong Zhu, Seshia, A.A.
• Format: Journal Article
• Language: English
• Published: New York, NY IEEE 01.07.2008; Institute of Electrical and Electronics Engineers; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Acoustic sensors; Acoustic wave devices, piezoelectric and piezoresistive devices; Allan deviation; Applied sciences; bulk acoustic resonators; Circuit properties; Deviation; Electric, optical and optoelectronic circuits; Electronic circuits; Electronics; Exact sciences and technology; Feedback loop; Foundries; high quality factor; MEMS oscillator; Micro- and nanoelectromechanical devices (mems/nems); Microcavities; Micromechanical devices; Oscillators; Oscillators, resonators, synthetizers; Q factor; Quality factor; Resonant frequencies; Resonant frequency; Resonators; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Silicon; Single crystals; single-crystal silicon (SCS); Time measurements; Timing; Silicon on insulator technology; Acoustic wave resonator; Micromechanical resonators; MEMS oscillator; Q factor; Allan deviation; Oscillator; Resonance frequency; bulk acoustic resonators; high quality factor; single-crystal silicon (SCS); Microelectromechanical device

A timing reference incorporating a single-crystal-silicon micromechanical resonator with a quality factor of larger than one million and a resonant frequency of 2.18 MHz is demonstrated. The resonator is excited in the square extensional bulk acoustic mode at 4 mtorr, and it has been fabricated in a...