Ultra compact triplexing filters based on SOI nanowire AWGs

An ultra compact triplexing filter was designed based on a silicon on insulator（SOI） nanowire arrayed waveguide grating（AWG） for fiber-to-the-home FTTH.The simulation results revealed that the design performed well in the sense of having a good triplexing function.The designed SOI nanowire AWGs were...

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Published inJournal of semiconductors Vol. 32; no. 4; pp. 89 - 92
Main Author 张家顺 安俊明 赵雷 宋世娇 王亮亮 李建光 王红杰 吴远大 胡雄伟
Format Journal Article
LanguageEnglish
Published IOP Publishing 01.04.2011
Subjects
AWG
Deviation
Lithography
Nanocomposites
Nanomaterials
Nanostructure
Nanowires
Semiconductors
SOI
Waveguides
Wavelengths
光纤到户
滤波器
硅纳米线
等离子体刻蚀
超小型
阵列波导光栅
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ISSN1674-4926
DOI10.1088/1674-4926/32/4/044009

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Summary:An ultra compact triplexing filter was designed based on a silicon on insulator（SOI） nanowire arrayed waveguide grating（AWG） for fiber-to-the-home FTTH.The simulation results revealed that the design performed well in the sense of having a good triplexing function.The designed SOI nanowire AWGs were fabricated using ultraviolet lithography and induced coupler plasma etching.The experimental results showed that the crosstalk was less than -15 dB,and the 3 dB-bandwidth was 11.04 nm.The peak wavelength output from ports a,c,and b were 1455,1510 and 1300 nm,respectively,which deviated from our original expectations.The deviation of the wavelength is mainly caused by 45 nm width deviation of the arrayed waveguides during the course of the fabrication process and partly caused by material dispersion.
Bibliography:TN929.11
triplexer； FTTH； nanowire； AWG； wavelength division multiplexing（WDM）
11-5781/TN
TN304.12
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ISSN:1674-4926
DOI:10.1088/1674-4926/32/4/044009