Subsurface damage from helium ions as a function of dose, beam energy, and dose rate - Livengood, Richard; Tan, Shida; Greenzweig, Yuval; Notte, John; McVey, Shawn (Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2009)
Keywords: Helium Ion; Gallium; Implant Damage; Sub-surface damage; Focused Ion Beam; Helium; Helium Ion Microscope; Silicon dislocations; FIB