Influence of Excitation Frequency on the Electron Distribution Function in Capacitively Coupled Discharges in Argon and Helium

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Bibliographic Details
Published inJapanese Journal of Applied Physics Vol. 42; no. Part 1, No. 10; pp. 6569 - 6577
Main Authors Abdel-Fattah, Essam, Sugai, Hideo
Format Journal Article
LanguageEnglish
Published 01.10.2003
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ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.42.6569