Fabrication of thin-film silicon on insulator by separation by implanted oxygen layer transfer - Wei, Xing; Wu, Ai Min; Chen, Meng; Chen, Jing; Zhang, Miao; Wang, Xi; Lin, Cheng Lu (Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 2008)
Keywords: Oxide; Silicon on Insulator; Silicon