Review-Silicon Nitride and Silicon Nitride-Rich Thin Film Technologies: State-of-the-Art Processing Technologies, Properties, and Applications - Kaloyeros, Alain E.; Pan, Youlin; Goff, Jonathan; Arkles, Barry (ECS journal of solid state science and technology, 2020)
Keywords: Atomic layer deposition; Chemical Vapor Deposition; Dielectrics; Metal Organic Chemical Vapor deposition; PECVD; silicon nitride; Thin film growth