Setup for photolithography on microscopic flakes of 2D materials by combining simple-geometry mask projection with writing - Jindal, Vishwas; Sugunakar, Vasam; Ghosh, Sandip (Review of scientific instruments, 2022)
Keywords: Automation; Flakes; Masks; Optical filters; Photolithography; Photoresists; Projection; Scientific apparatus & instruments; Substrates; Two dimensional materials