Talbot lithography: Self-imaging of complex structures

• Published in: Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena Vol. 27; no. 6; pp. 2931 - 2937
• Main Authors: Isoyan, A., Jiang, F., Cheng, Y. C., Cerrina, F., Wachulak, P., Urbanski, L., Rocca, J., Menoni, C., Marconi, M.
• Format: Journal Article
• Language: English
• Published: American Vacuum Society 01.11.2009

The authors present a self-imaging lithographic technique, capable of patterning large area periodic structures of arbitrary content with nanoscale resolution. They start from the original concept of Talbot imaging of binary gratings—and introduce the generalized Talbot imaging (GTI) where periodic...