APA (7th ed.) Citation

Isoyan, A., Jiang, F., Cheng, Y. C., Cerrina, F., Wachulak, P., Urbanski, L., . . . Marconi, M. (2009). Talbot lithography: Self-imaging of complex structures. Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 27(6), 2931-2937. https://doi.org/10.1116/1.3258144

Chicago Style (17th ed.) Citation

Isoyan, A., F. Jiang, Y. C. Cheng, F. Cerrina, P. Wachulak, L. Urbanski, J. Rocca, C. Menoni, and M. Marconi. "Talbot Lithography: Self-imaging of Complex Structures." Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures Processing, Measurement and Phenomena 27, no. 6 (2009): 2931-2937. https://doi.org/10.1116/1.3258144.

MLA (9th ed.) Citation

Isoyan, A., et al. "Talbot Lithography: Self-imaging of Complex Structures." Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures Processing, Measurement and Phenomena, vol. 27, no. 6, 2009, pp. 2931-2937, https://doi.org/10.1116/1.3258144.