A memetic algorithm to solve an unrelated parallel machine scheduling problem with auxiliary resources in semiconductor manufacturing
In this paper, we propose a metaheuristic for solving an original scheduling problem with auxiliary resources in a photolithography workshop of a semiconductor plant. The photolithography workshop is often a bottleneck, and improving scheduling decisions in this workshop can help to improve indicato...
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| Published in | Journal of scheduling Vol. 19; no. 4; pp. 367 - 376 |
|---|---|
| Main Authors | , , , |
| Format | Journal Article |
| Language | English |
| Published |
New York
Springer US
01.08.2016
Springer Nature B.V Springer Verlag |
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| Online Access | Get full text |
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| Abstract | In this paper, we propose a metaheuristic for solving an original scheduling problem with auxiliary resources in a photolithography workshop of a semiconductor plant. The photolithography workshop is often a bottleneck, and improving scheduling decisions in this workshop can help to improve indicators of the whole plant. Two optimization criteria are separately considered: the weighted flow time (to minimize) and the number of products that are processed (to maximize). After stating the problem and giving some properties on the solution space, we show how these properties help us to efficiently solve the problem with the proposed memetic algorithm, which has been implemented and tested on large generated instances. Numerical experiments show that good solutions are obtained within a reasonable computational time. |
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| AbstractList | In this paper, we propose a metaheuristic for solving an original scheduling problem with auxiliary resources in a photolithography workshop of a semiconductor plant. The photolithography workshop is often a bottleneck, and improving scheduling decisions in this workshop can help to improve indicators of the whole plant. Two optimization criteria are separately considered: the weighted flow time (to minimize) and the number of products that are processed (to maximize). After stating the problem and giving some properties on the solution space, we show how these properties help us to efficiently solve the problem with the proposed memetic algorithm, which has been implemented and tested on large generated instances. Numerical experiments show that good solutions are obtained within a reasonable computational time. Issue Title: Multidisciplinary International Scheduling Conference: Theory and Applications (MISTA) 2013-Part 2 In this paper, we propose a metaheuristic for solving an original scheduling problem with auxiliary resources in a photolithography workshop of a semiconductor plant. The photolithography workshop is often a bottleneck, and improving scheduling decisions in this workshop can help to improve indicators of the whole plant. Two optimization criteria are separately considered: the weighted flow time (to minimize) and the number of products that are processed (to maximize). After stating the problem and giving some properties on the solution space, we show how these properties help us to efficiently solve the problem with the proposed memetic algorithm, which has been implemented and tested on large generated instances. Numerical experiments show that good solutions are obtained within a reasonable computational time. |
| Author | Bitar, Abdoul Roussel, Renaud Dauzère-Pérès, Stéphane Yugma, Claude |
| Author_xml | – sequence: 1 givenname: Abdoul surname: Bitar fullname: Bitar, Abdoul email: Bitar@emse.fr organization: Ecole Nationale Supérieure des Mines de Saint-Etienne, CMP Georges Charpak, Department of Manufacturing Sciences and Logistics, CNRS UMR 6158 LIMOS, Center of Microelectronics in Provence – sequence: 2 givenname: Stéphane surname: Dauzère-Pérès fullname: Dauzère-Pérès, Stéphane organization: Ecole Nationale Supérieure des Mines de Saint-Etienne, CMP Georges Charpak, Department of Manufacturing Sciences and Logistics, CNRS UMR 6158 LIMOS, Center of Microelectronics in Provence – sequence: 3 givenname: Claude surname: Yugma fullname: Yugma, Claude organization: Ecole Nationale Supérieure des Mines de Saint-Etienne, CMP Georges Charpak, Department of Manufacturing Sciences and Logistics, CNRS UMR 6158 LIMOS, Center of Microelectronics in Provence – sequence: 4 givenname: Renaud surname: Roussel fullname: Roussel, Renaud organization: STMicroelectronics Crolles |
| BackLink | https://hal-emse.ccsd.cnrs.fr/emse-01278268$$DView record in HAL |
| BookMark | eNp9kVFrFDEUhQepYFv9Ab4FfBFhNMlmkpnHpagtLPiiz-HunTvdlEyyJpmqP6D_26wjIgXNS8LlO5dzci6asxADNc1Lwd8Kzs27LPjQiZYL1fLNYFr9pDmvo6EVSnZnv96q1WKjnzUXOd9xznsjxXnzsGUzzVQcMvC3MblymFmJLEd_TwwCW0IiD4VGdoQE3pNnM-DBBWIZDzQu3oVbdkxx72lm36qewfLdeQfpB0uU45KQMnOBZZodxjAuWGKqS8IyAZYlVf3z5ukEPtOL3_dl8-XD-89X1-3u08ebq-2uRSW60kqQGyk6ibjnKDXhwHGkfiLYG9ij7MdRQacAcE-TmYTquBmF7sdBdVqi3lw2b9a9B_D2mNxcTdoIzl5vd5bmTJYLaXqp-3tR4dcrXMN9XSgXO7uM5D0Eiku2opddPcqYir56hN7V3KFGqRSXWuqh45USK4Up5pxo-mNBcHtq0a4tVhPKnlq0J8fmkQZdgeJiKAmc_69Srsp8PH0xpb88_VP0EyuiteQ |
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| Cites_doi | 10.1016/S0278-6125(98)80008-3 10.1016/j.ijpe.2008.09.003 10.1109/66.909654 10.1016/0166-218X(83)90012-4 10.1080/09537280601035836 10.1080/09537287.2010.490014 10.1109/TSM.2005.858502 10.1007/s10951-010-0222-9 |
| ContentType | Journal Article |
| Copyright | Springer Science+Business Media New York 2014 Springer Science+Business Media New York 2016 Distributed under a Creative Commons Attribution 4.0 International License |
| Copyright_xml | – notice: Springer Science+Business Media New York 2014 – notice: Springer Science+Business Media New York 2016 – notice: Distributed under a Creative Commons Attribution 4.0 International License |
| DBID | AAYXX CITATION 3V. 7TA 7TB 7WY 7WZ 7X7 7XB 87Z 88C 8AL 8AO 8FD 8FE 8FG 8FI 8FJ 8FK 8FL ABUWG AFKRA ARAPS AZQEC BENPR BEZIV BGLVJ CCPQU DWQXO FR3 FRNLG FYUFA F~G GHDGH GNUQQ HCIFZ JG9 JQ2 K60 K6~ K7- K9. L.- L.0 M0C M0N M0S M0T P5Z P62 PHGZM PHGZT PJZUB PKEHL PPXIY PQBIZ PQBZA PQEST PQGLB PQQKQ PQUKI PYYUZ Q9U 1XC |
| DOI | 10.1007/s10951-014-0397-6 |
| DatabaseName | CrossRef ProQuest Central (Corporate) Materials Business File Mechanical & Transportation Engineering Abstracts ABI/INFORM Collection ABI/INFORM Global (PDF only) Health & Medical Collection ProQuest Central (purchase pre-March 2016) ABI/INFORM Global (Alumni Edition) Healthcare Administration Database (Alumni) Computing Database (Alumni Edition) ProQuest Pharma Collection Technology Research Database ProQuest SciTech Collection ProQuest Technology Collection Hospital Premium Collection Hospital Premium Collection (Alumni Edition) ProQuest Central (Alumni) (purchase pre-March 2016) ABI/INFORM Collection (Alumni) ProQuest Central (Alumni) ProQuest Central UK/Ireland Advanced Technologies & Aerospace Collection ProQuest Central Essentials - QC ProQuest Central Business Premium Collection Technology Collection ProQuest One ProQuest Central Korea Engineering Research Database Business Premium Collection (Alumni) Proquest Health Research Premium Collection ABI/INFORM Global (Corporate) Health Research Premium Collection (Alumni) ProQuest Central Student SciTech Premium Collection Materials Research Database ProQuest Computer Science Collection ProQuest Business Collection (Alumni Edition) ProQuest Business Collection Computer Science Database ProQuest Health & Medical Complete (Alumni) ABI/INFORM Professional Advanced ABI/INFORM Professional Standard ABI/INFORM Global Computing Database ProQuest Health & Medical Collection Healthcare Administration Database Advanced Technologies & Aerospace Database ProQuest Advanced Technologies & Aerospace Collection ProQuest Central Premium ProQuest One Academic (New) ProQuest Health & Medical Research Collection ProQuest One Academic Middle East (New) ProQuest One Health & Nursing ProQuest One Business ProQuest One Business (Alumni) ProQuest One Academic Eastern Edition (DO NOT USE) ProQuest One Applied & Life Sciences ProQuest One Academic ProQuest One Academic UKI Edition ABI/INFORM Collection China ProQuest Central Basic Hyper Article en Ligne (HAL) |
| DatabaseTitle | CrossRef Materials Research Database ProQuest Business Collection (Alumni Edition) Computer Science Database ProQuest Central Student ProQuest Advanced Technologies & Aerospace Collection ProQuest Central Essentials ProQuest Computer Science Collection SciTech Premium Collection ABI/INFORM Complete Materials Business File ProQuest One Applied & Life Sciences Health Research Premium Collection Health & Medical Research Collection ProQuest Central (New) Advanced Technologies & Aerospace Collection Business Premium Collection ABI/INFORM Global ProQuest One Academic Eastern Edition ProQuest Hospital Collection ProQuest Technology Collection Health Research Premium Collection (Alumni) ProQuest Business Collection ProQuest Hospital Collection (Alumni) ProQuest Health & Medical Complete ProQuest One Academic UKI Edition ProQuest Health Management (Alumni Edition) Engineering Research Database ProQuest One Academic ProQuest One Academic (New) ABI/INFORM Global (Corporate) ProQuest One Business Technology Collection Technology Research Database ProQuest One Academic Middle East (New) Mechanical & Transportation Engineering Abstracts ProQuest Health & Medical Complete (Alumni) ProQuest Central (Alumni Edition) ProQuest One Community College ProQuest One Health & Nursing ProQuest Pharma Collection ProQuest Central ABI/INFORM Professional Advanced ProQuest Health & Medical Research Collection Health and Medicine Complete (Alumni Edition) ABI/INFORM Professional Standard ProQuest Central Korea ABI/INFORM Complete (Alumni Edition) ProQuest Computing ABI/INFORM Global (Alumni Edition) ProQuest Central Basic ProQuest Computing (Alumni Edition) ProQuest Health Management ABI/INFORM China ProQuest SciTech Collection Advanced Technologies & Aerospace Database ProQuest One Business (Alumni) ProQuest Central (Alumni) Business Premium Collection (Alumni) |
| DatabaseTitleList | Materials Research Database Materials Research Database |
| Database_xml | – sequence: 1 dbid: 8FG name: ProQuest Technology Collection url: https://search.proquest.com/technologycollection1 sourceTypes: Aggregation Database |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Engineering Computer Science Business |
| EISSN | 1099-1425 |
| EndPage | 376 |
| ExternalDocumentID | oai_HAL_emse_01278268v1 4112403451 10_1007_s10951_014_0397_6 |
| GroupedDBID | -57 -5G -BR -EM -Y2 -~C .4S .86 .DC .VR 06D 0R~ 0VY 1N0 1OC 203 29L 2J2 2JN 2JY 2KG 2LR 2P1 2VQ 2~H 30V 31~ 3V. 4.4 406 408 409 40D 40E 5GY 5VS 67Z 6NX 7WY 7X7 8-1 8AO 8FE 8FG 8FI 8FJ 8FL 8TC 8UJ 95- 95. 95~ 96X AAAVM AABHQ AACDK AAHNG AAIAL AAJBT AAJKR AANZL AARHV AARTL AASML AATNV AATVU AAUYE AAWCG AAYIU AAYQN AAYTO AAYZH ABAKF ABBBX ABBXA ABDZT ABECU ABFTD ABFTV ABHLI ABHQN ABIJN ABJNI ABJOX ABKCH ABKTR ABMNI ABMQK ABNWP ABQBU ABQSL ABSXP ABTEG ABTHY ABTKH ABTMW ABULA ABUWG ABWNU ABXPI ACAOD ACBXY ACDTI ACGFS ACHSB ACHXU ACIWK ACKNC ACMDZ ACMLO ACOKC ACOMO ACPIV ACXQS ACZOJ ADBBV ADHHG ADHIR ADINQ ADKNI ADKPE ADRFC ADTPH ADURQ ADYFF ADZKW AEBTG AEFQL AEGAL AEGNC AEJHL AEJRE AEKMD AEMSY AENEX AEOHA AEPYU AESKC AETLH AEVLU AEXYK AFBBN AFBPY AFGCZ AFKRA AFLOW AFQWF AFWTZ AFZJQ AFZKB AGAYW AGDGC AGJBK AGMZJ AGQEE AGQMX AGRTI AGWIL AGWZB AGYKE AHAVH AHBYD AHMBA AHSBF AHYZX AIAKS AIGIU AIIXL AILAN AITGF AJAOE AJBLW AJRNO AJZVZ ALIPV ALMA_UNASSIGNED_HOLDINGS ALWAN AMKLP AMXSW AMYLF AMYQR AOCGG AQUVI ARAPS ARCSS ARMRJ ASPBG AVWKF AXYYD AYQZM AZFZN AZQEC B-. BA0 BAPOH BDATZ BENPR BEZIV BGLVJ BGNMA BPHCQ BSONS BVXVI CAG CCPQU COF CS3 CSCUP DDRTE DL5 DNIVK DPUIP DU5 DWQXO EBLON EBS EDO EHE EIOEI EJD ESBYG FEDTE FERAY FFXSO FIGPU FINBP FNLPD FRNLG FRRFC FSGXE FWDCC FYUFA GGCAI GGRSB GJIRD GNUQQ GNWQR GQ6 GQ7 GQ8 GROUPED_ABI_INFORM_COMPLETE GXS H13 HCIFZ HF~ HG5 HG6 HLICF HMCUK HMJXF HQYDN HRMNR HVGLF HZ~ I-F I09 IHE IJ- IKXTQ ITM IWAJR IXC IXE IZIGR IZQ I~X I~Z J-C J0Z J9A JBSCW JCJTX JZLTJ K60 K6V K6~ K7- KDC KOV LAK LAW LH4 LLZTM M0C M0N M0T M4Y MA- N2Q NB0 NPVJJ NQJWS NU0 O9- O93 O9G O9J OAM OVD P2P P62 P9M PF0 PQBIZ PQBZA PQQKQ PROAC PT4 Q2X QOS R89 R9I RNI ROL RPX RSV RZC RZD S16 S1Z S27 S3B SAP SBE SDH SHX SISQX SJYHP SNE SNPRN SNX SOHCF SOJ SPISZ SRMVM SSLCW STPWE SZN T13 TEORI TSG TSK TSV TUC TUS U2A UG4 UKHRP UOJIU UTJUX UZXMN VC2 VFIZW W23 W48 W99 WK8 XPP XV2 YLTOR Z45 Z7X Z83 Z88 ZMTXR ~A9 AAPKM AAYXX ABBRH ABDBE ABFSG ACSTC ADHKG AEZWR AFDZB AFHIU AFOHR AGQPQ AHPBZ AHWEU AIXLP AMVHM ATHPR AYFIA CITATION PHGZM PHGZT 7TA 7TB 7XB 8AL 8FD 8FK ABRTQ FR3 JG9 JQ2 K9. L.- L.0 PJZUB PKEHL PPXIY PQEST PQGLB PQUKI PUEGO Q9U 1XC |
| ID | FETCH-LOGICAL-c415t-2a232152ccb0c26ec90cde8feab7abc28dd4a54aacbef7f14507d168d94562c63 |
| IEDL.DBID | U2A |
| ISSN | 1094-6136 |
| IngestDate | Fri May 09 12:28:23 EDT 2025 Tue Aug 05 09:31:21 EDT 2025 Sat Aug 23 14:35:25 EDT 2025 Thu Apr 24 22:59:46 EDT 2025 Tue Jul 01 00:43:06 EDT 2025 Fri Feb 21 02:36:56 EST 2025 |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | 4 |
| Keywords | Parallel machines Memetic algorithm Scheduling Auxiliary resources Semiconductor Manufacturing Setups |
| Language | English |
| License | Distributed under a Creative Commons Attribution 4.0 International License: http://creativecommons.org/licenses/by/4.0 |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-LOGICAL-c415t-2a232152ccb0c26ec90cde8feab7abc28dd4a54aacbef7f14507d168d94562c63 |
| Notes | ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 14 content type line 23 |
| ORCID | 0000-0002-3566-3248 |
| PQID | 1802626950 |
| PQPubID | 43675 |
| PageCount | 10 |
| ParticipantIDs | hal_primary_oai_HAL_emse_01278268v1 proquest_miscellaneous_1825555477 proquest_journals_1802626950 crossref_primary_10_1007_s10951_014_0397_6 crossref_citationtrail_10_1007_s10951_014_0397_6 springer_journals_10_1007_s10951_014_0397_6 |
| ProviderPackageCode | CITATION AAYXX |
| PublicationCentury | 2000 |
| PublicationDate | 2016-08-01 |
| PublicationDateYYYYMMDD | 2016-08-01 |
| PublicationDate_xml | – month: 08 year: 2016 text: 2016-08-01 day: 01 |
| PublicationDecade | 2010 |
| PublicationPlace | New York |
| PublicationPlace_xml | – name: New York |
| PublicationTitle | Journal of scheduling |
| PublicationTitleAbbrev | J Sched |
| PublicationYear | 2016 |
| Publisher | Springer US Springer Nature B.V Springer Verlag |
| Publisher_xml | – name: Springer US – name: Springer Nature B.V – name: Springer Verlag |
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| References_xml | – volume: 17 start-page: 37 issue: 1 year: 1998 end-page: 51 ident: CR6 article-title: Scheduling a single batch processing machine with secondary resource constraints publication-title: Journal of Manufacturing Systems doi: 10.1016/S0278-6125(98)80008-3 – volume: 116 start-page: 251 issue: 2 year: 2008 end-page: 262 ident: CR7 article-title: Scheduling with processing set restrictions: A survey publication-title: International Journal of Production Economics doi: 10.1016/j.ijpe.2008.09.003 – volume: 14 start-page: 48 issue: 1 year: 2001 end-page: 56 ident: CR1 article-title: Cycle time improvements for photolithography process in semiconductor manufacturing publication-title: IEEE Transaction of Semiconductor Manufacturing doi: 10.1109/66.909654 – volume: 5 start-page: 11 issue: 1 year: 1983 end-page: 24 ident: CR2 article-title: Scheduling subject to resource constraints: Classification and complexity publication-title: Discrete Applied Mathematics doi: 10.1016/0166-218X(83)90012-4 – volume: 18 start-page: 217 issue: 3 year: 2007 end-page: 225 ident: CR3 article-title: Parallel machine scheduling subject to auxiliary resource constraints publication-title: Production Planning and Control doi: 10.1080/09537280601035836 – volume: 22 start-page: 4 issue: 1 year: 2011 end-page: 24 ident: CR11 article-title: A survey of dispatching rules for operational control in wafer fabrication publication-title: Production Planning & Control doi: 10.1080/09537287.2010.490014 – ident: CR8 – volume: 18 start-page: 622 issue: 4 year: 2005 end-page: 632 ident: CR5 article-title: Evaluating the impacts of reticle requirements in semiconductor wafer fabrication publication-title: IEEE Transactions on Semiconductor Manufacturing doi: 10.1109/TSM.2005.858502 – year: 2012 ident: CR9 publication-title: Production planning and control for semiconductor wafer fabrication facilities: Modeling, analysis, and systems – volume: 14 start-page: 583 issue: 6 year: 2011 end-page: 599 ident: CR10 article-title: A survey of problems, solution techniques, and future challenges in scheduling semiconductor manufacturing operations publication-title: Journal of Scheduling doi: 10.1007/s10951-010-0222-9 – volume: 3 start-page: 119 issue: 1–2 year: 2008 end-page: 139 ident: CR4 article-title: Taboo search methods for scheduling a burn-in oven with non-identical job sizes and secondary resource constraints publication-title: International Journal of Operational Research – volume: 116 start-page: 251 issue: 2 year: 2008 ident: 397_CR7 publication-title: International Journal of Production Economics doi: 10.1016/j.ijpe.2008.09.003 – volume: 22 start-page: 4 issue: 1 year: 2011 ident: 397_CR11 publication-title: Production Planning & Control doi: 10.1080/09537287.2010.490014 – volume: 5 start-page: 11 issue: 1 year: 1983 ident: 397_CR2 publication-title: Discrete Applied Mathematics doi: 10.1016/0166-218X(83)90012-4 – volume: 18 start-page: 217 issue: 3 year: 2007 ident: 397_CR3 publication-title: Production Planning and Control doi: 10.1080/09537280601035836 – volume: 17 start-page: 37 issue: 1 year: 1998 ident: 397_CR6 publication-title: Journal of Manufacturing Systems doi: 10.1016/S0278-6125(98)80008-3 – volume: 18 start-page: 622 issue: 4 year: 2005 ident: 397_CR5 publication-title: IEEE Transactions on Semiconductor Manufacturing doi: 10.1109/TSM.2005.858502 – volume: 3 start-page: 119 issue: 1–2 year: 2008 ident: 397_CR4 publication-title: International Journal of Operational Research – ident: 397_CR8 – volume: 14 start-page: 48 issue: 1 year: 2001 ident: 397_CR1 publication-title: IEEE Transaction of Semiconductor Manufacturing doi: 10.1109/66.909654 – volume-title: Production planning and control for semiconductor wafer fabrication facilities: Modeling, analysis, and systems year: 2012 ident: 397_CR9 – volume: 14 start-page: 583 issue: 6 year: 2011 ident: 397_CR10 publication-title: Journal of Scheduling doi: 10.1007/s10951-010-0222-9 |
| SSID | ssj0008721 |
| Score | 2.3800066 |
| Snippet | In this paper, we propose a metaheuristic for solving an original scheduling problem with auxiliary resources in a photolithography workshop of a semiconductor... Issue Title: Multidisciplinary International Scheduling Conference: Theory and Applications (MISTA) 2013-Part 2 In this paper, we propose a metaheuristic for... |
| SourceID | hal proquest crossref springer |
| SourceType | Open Access Repository Aggregation Database Enrichment Source Index Database Publisher |
| StartPage | 367 |
| SubjectTerms | Algorithms Artificial Intelligence Batch processing Business and Management Calculus of Variations and Optimal Control; Optimization Computer Science Criteria Employment Engineering Sciences Genetic algorithms Linear programming Manufacturing Micro and nanotechnologies Microelectronics Operations Research Operations Research/Decision Theory Optimization Photolithography Preventive maintenance Production scheduling Release dates Scheduling Semiconductors Solution space Studies Supply Chain Management Workshops |
| SummonAdditionalLinks | – databaseName: Health & Medical Collection dbid: 7X7 link: http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1Nb9QwEB3RIiE4FFhApLTICE6giGQ3iZMTWqFWKwScqLQ3y3YmdKV8lE1SwQ_gfzOTONsFiZ7jeJMdO_OeZ-YNwBss5mgzjHwMkQgKxpFvCPf70uShtLGJZca1w1--JquL6NM6XrsDt9alVU7fxOFDnTeWz8jfs1IZge8sDj5c_fC5axRHV10LjQO4y9JlnNIl1zvCFaRyrLsiCkMUaZFMUc2xdI4bzBNB8ANyyX7yl186uOSsyD3I-U-UdHA-54_gyKFGsRzN_BjuYD2De1PS-gweTs0ZhNurM3iwpzT4BH4vRYUVFywKXX6n9-ouK9E1glbeNQpdi74eqlowFywGXpZYimrIs0RB_Jf8EZetC9d-RvDprdD9z0250dtfYutiAK3Y1KLldPumZh3ZZkuT1D0XTwzVkE_h4vzs28eV7zow-JYce-fPNQEu8vDWmsDOE7JqYHNMC9RGamPnaZ5HOo60tgYLWYQRocs8TNI8Y2Jlk8UzOKybGp-DKIwuUpphUSRFZPI4yyTZJzVZRhzOFLEHwfT_K-vkyblLRqluhJXZZIpMpthkKvHg7e6Wq1Gb47bBr8mou3Gsqr1aflZYtag4_E40K70OPTiZjK7cZm7VzdLz4NXuMm1Djq3oGpuexxA3I2gmpQfvpsWyN8X_Huv49h98AfcJoSVjxuEJHHbbHk8JBXXm5bDU_wBQlQW_ priority: 102 providerName: ProQuest |
| Title | A memetic algorithm to solve an unrelated parallel machine scheduling problem with auxiliary resources in semiconductor manufacturing |
| URI | https://link.springer.com/article/10.1007/s10951-014-0397-6 https://www.proquest.com/docview/1802626950 https://www.proquest.com/docview/1825555477 https://hal-emse.ccsd.cnrs.fr/emse-01278268 |
| Volume | 19 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwlV3dj5NAEJ_Yu8Togx9VI-fZrNEnDQmlwMIjmvYaPy7G2KQ-kd1luGtCwfBxOf8A_29nKNRq1MQXeGDZEGaX-f2Y-c0AvMDMRROhZ-MUiaCg79macL8tdTqVxte-jFg7_OE8WK68t2t_3eu46yHbfQhJdl_qA7Ebt4QnSG875ETtYATHPlN3WsQrN95_fkO5E1sRbyFeNAuGUOafpvjFGY0uORXyAGf-FhrtPM7iHtzpoaKId7a9DzewGMPNIVN9DHeHjgyi36BjuH1QXvABfI_FFresUhQqvyirTXO5FU0paLldoVCFaItOyoKp4ArgeY652HbJlSiI9JITYq266HvOCP5lK1R7vck3qvomqv7Hfy02hag5x74suHhsWdEkRcuKiU4C-RBWi_nnN0u7b7tgG_Lmje0qQlnk1o3RjnEDMqVjUgwzVFoqbdwwTT3le0oZjZnMph5BynQahGnEbMoEs0dwVJQFPgaRaZWFNMMsCzJPp34USbJPqKOIiJvOfAuc4f0npq9Jzq0x8uRnNWU2WUImS9hkSWDBy_0tX3cFOf41-DkZdT-OS2kv4_cJbmtMOOZO3Cq8mlpwOhg96XdwnXBlPCJ7ke9Y8Gx_mfYeB1RUgWXLY4iQER6T0oJXw2I5mOJvj3XyX6OfwC1CacEu6_AUjpqqxaeEhBo9gZFcSzqGi7MJHMdnX97N6fx6fv7x06TbFT8ALzcHRw |
| linkProvider | Springer Nature |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwtV3JbtRAEC0lQWI5sAwgDAEaAReQhfflgNAIGCZkklMi5eZ0t8tkJC9hPA7kA_gdvpEqL5MBidxydrttuaqr3nNtAK8wc1DH6JloIxEU9D1TEe43Q5XaofaVH8ZcO7y3H0wPva9H_tEG_B5qYTitcrCJraFOK83_yN9xpzIC37FvfTj9bvLUKI6uDiM0OrXYxfMfRNnq9zufSL6vHWfy-eDj1OynCpianNXSdCSBCPJaWitLOwG9qaVTjDKUKpRKO1GaetL3pNQKszCzPUJMqR1EacxkQQcu7bsJ1zzXjflERZMvK8sfhV2dF1EmomRuMERRu1I9HmhPhMS0CAKYwV9-cPOEszDXIO4_UdnW2U3uwu0epYpxp1b3YAPLEVwfkuRHcGcYBiF62zCCW2udDe_Dr7EosOACSSHzb_QdlyeFWFaCNP0MhSxFU7ZVNJgKbj6e55iLos3rREF8m_wfl8mLftyN4L_FQjY_5_lcLs7Foo851GJeiprT-6uS-9ZWC9qkbLhYo62-fACHVyKbh7BVViU-ApEpmUW0g5sFmadSP45Dkk-k4pg4o8p8A6zh-ye6b4fOUzny5KKRM4ssIZElLLIkMODN6pbTrhfIZYtfklBX67iL93Q8S7CoMeFwP9G66Mw2YHsQetIbjzq5UHUDXqwu07HnWI4ssWp4DXFBgoJhaMDbQVnWtvjfaz2-_IHP4cb0YG-WzHb2d5_ATUKHQZftuA1by0WDTwmBLdWzVu0FHF_1OfsDvENEdw |
| linkToPdf | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwtV1Lb9NAEB61RargwCNQYSiwCLiArNqO7bUPCEWUKKWl4kCl3Mzuekwj-VESp9AfwJ_i1zHjRxqQ6K1nr9eWZ3bm-zwvgJeYeWhi9G10kQgKBr6tCffbUqeuNIEOZMy1w5-Ow8mJ_3EaTDfgd18Lw2mVvU1sDHVaGf5Hvsedygh8x4Gzl3VpEZ_3x-_Ovts8QYojrf04jVZFDvHiB9G3xduDfZL1K88bf_jyfmJ3EwZsQ46rtj1FgII8mDHaMV5Ib-2YFKMMlZZKGy9KU18FvlJGYyYz1yf0lLphlMZMHEw4pH034YYcBi6fMTldkT0nkm3NF9EnomfDsI-otmV7PNyeyIntEByww7984uYpZ2Suwd1_IrSN4xvfhdsdYhWjVsXuwQaWA9juE-YHcKcfDCE6OzGAW2tdDu_Dr5EosOBiSaHyb_Qd69NC1JUgrT9HoUqxLJuKGkwFNyLPc8xF0eR4oiDuTb6QS-ZFN_pG8J9joZY_Z_lMzS_EvIs_LMSsFAtO9a9K7mFbzWmTcsmFG00l5gM4uRbZ7MBWWZX4EESmVRbRDsMszHydBnEsST6RjmPijzoLLHD675-YrjU6T-jIk8umziyyhESWsMiS0ILXq1vO2r4gVy1-QUJdreOO3pPRUYLFAhMO_RPFi85dC3Z7oSedIVkkl2pvwfPVZTIBHNdRJVZLXkO8kGChlBa86ZVlbYv_vdajqx_4DLbphCVHB8eHj-EmAcWwTXzcha16vsQnBMZq_bTRegFfr_uY_QGcmEik |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=A+memetic+algorithm+to+solve+an+unrelated+parallel+machine+scheduling+problem+with+auxiliary+resources+in+semiconductor+manufacturing&rft.jtitle=Journal+of+scheduling&rft.au=Bitar%2C+Abdoul&rft.au=Dauzere-Peres%2C+Stephane&rft.au=Yugma%2C+Claude&rft.au=Roussel%2C+Renaud&rft.date=2016-08-01&rft.issn=1094-6136&rft.eissn=1099-1425&rft.volume=19&rft.issue=4&rft.spage=367&rft.epage=376&rft_id=info:doi/10.1007%2Fs10951-014-0397-6&rft.externalDBID=NO_FULL_TEXT |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=1094-6136&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=1094-6136&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=1094-6136&client=summon |