Fabrication and Evaluation of Nanometer-Sized Metal Oxide Structures on Composite Metal Thin Films Using Scanning Near-Field Optical Microscope

• Published in: Japanese Journal of Applied Physics Vol. 41; no. Part 1, No. 10; pp. 6256 - 6263
• Main Authors: Onuki, Teppei, Watanabe, Yuuichi, Nishio, Keishi, Tsuchiya, Toshio, Tani, Toshirou, Tokizaki, Takashi
• Format: Journal Article
• Language: English
• Published: 2002

Nanometer-scale metal-oxide structures with optical transparency have been fabricated on metal films by anodic oxidation using a probe tip of a scanning near-field optical microscope (SNOM). Authors discuss the thickness and the optical transparency of the oxides depending on the bias voltage applie...