Bias effects on structure and piezoresistive properties of DLC:Ag thin films

In present study silver containing diamond like carbon (DLC:Ag) films deposited by reactive unbalanced magnetron sputtering of silver target in argon and acetylene gas ambient were investigated. Structure of the deposited films was studied by multiwavelength Raman spectroscopy, and chemical composit...

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Published inSurface & coatings technology Vol. 255; pp. 84 - 89
Main Authors Meškinis, Š., Vasiliauskas, A., Šlapikas, K., Gudaitis, R., Andrulevičius, M., Čiegis, A., Niaura, G., Kondrotas, R., Tamulevičius, S.
Format Journal Article Conference Proceeding
LanguageEnglish
Published Amsterdam Elsevier B.V 25.09.2014
Elsevier
Subjects
Cross-disciplinary physics: materials science; rheology
Exact sciences and technology
Materials science
Methods of deposition of films and coatings; film growth and epitaxy
Multiwavelength Raman spectroscopy
Physics
Piezoresistive properties
Silver containing diamond like carbon (DLC:Ag) films
Substrate bias effects
Surface treatments
X-ray photoelectron spectroscopy
XRD
Substrate bias effects
Silver containing diamond like carbon (DLC:Ag) films
XRD
Piezoresistive properties
Multiwavelength Raman spectroscopy
X-ray photoelectron spectroscopy
Synthetic diamond
Surface treatments
Raman spectroscopy
Diamond structure
Carbon
Thin films
Silver
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Abstract In present study silver containing diamond like carbon (DLC:Ag) films deposited by reactive unbalanced magnetron sputtering of silver target in argon and acetylene gas ambient were investigated. Structure of the deposited films was studied by multiwavelength Raman spectroscopy, and chemical composition — by X-ray photoelectron spectroscopy (XPS). The X-ray diffraction (XRD) as well as transmission electron microscopy was employed in the analysis of films. The effects of the substrate bias on structure, chemical composition and piezoresistive properties of DLC:Ag films were investigated. Silver and oxygen atomic concentrations in the DLC:Ag films decreased with the increase of the negative substrate bias. Relationship between the structure of DLC:Ag films and substrate bias was observed, too. Dependence of the piezoresistive gauge factor of DLC:Ag films on the substrate bias was resonance type with the highest gauge factor values observed in 50–100V negative voltages range. It was found that gauge factor of the DLC:Ag films is related both with structure of the diamond like carbon matrix and silver atomic concentration and size of the silver clusters in the deposited films. •Silver containing diamond like carbon (DLC:Ag) films were investigated.•DLC:Ag films were deposited by reactive unbalanced magnetron sputtering.•Structure and composition of the films depend on substrate bias.•Piezoresistive gauge factor (k) of DLC:Ag films depends on substrate bias.•k is related with structure of DLC:Ag films, Ag amount and size of Ag clusters.
AbstractList In present study silver containing diamond like carbon (DLC:Ag) films deposited by reactive unbalanced magnetron sputtering of silver target in argon and acetylene gas ambient were investigated. Structure of the deposited films was studied by multiwavelength Raman spectroscopy, and chemical composition — by X-ray photoelectron spectroscopy (XPS). The X-ray diffraction (XRD) as well as transmission electron microscopy was employed in the analysis of films. The effects of the substrate bias on structure, chemical composition and piezoresistive properties of DLC:Ag films were investigated. Silver and oxygen atomic concentrations in the DLC:Ag films decreased with the increase of the negative substrate bias. Relationship between the structure of DLC:Ag films and substrate bias was observed, too. Dependence of the piezoresistive gauge factor of DLC:Ag films on the substrate bias was resonance type with the highest gauge factor values observed in 50–100V negative voltages range. It was found that gauge factor of the DLC:Ag films is related both with structure of the diamond like carbon matrix and silver atomic concentration and size of the silver clusters in the deposited films. •Silver containing diamond like carbon (DLC:Ag) films were investigated.•DLC:Ag films were deposited by reactive unbalanced magnetron sputtering.•Structure and composition of the films depend on substrate bias.•Piezoresistive gauge factor (k) of DLC:Ag films depends on substrate bias.•k is related with structure of DLC:Ag films, Ag amount and size of Ag clusters.
Author Vasiliauskas, A.
Kondrotas, R.
Meškinis, Š.
Čiegis, A.
Andrulevičius, M.
Niaura, G.
Tamulevičius, S.
Gudaitis, R.
Šlapikas, K.
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  organization: Kaunas University of Technology, Institute of Materials Science, Savanorių str. 271, Kaunas LT50131, Lithuania
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Keywords Substrate bias effects
Silver containing diamond like carbon (DLC:Ag) films
XRD
Piezoresistive properties
Multiwavelength Raman spectroscopy
X-ray photoelectron spectroscopy
Synthetic diamond
Surface treatments
Raman spectroscopy
Diamond structure
Carbon
Thin films
Silver
Language English
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Snippet In present study silver containing diamond like carbon (DLC:Ag) films deposited by reactive unbalanced magnetron sputtering of silver target in argon and...
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StartPage 84
SubjectTerms Cross-disciplinary physics: materials science; rheology
Exact sciences and technology
Materials science
Methods of deposition of films and coatings; film growth and epitaxy
Multiwavelength Raman spectroscopy
Physics
Piezoresistive properties
Silver containing diamond like carbon (DLC:Ag) films
Substrate bias effects
Surface treatments
X-ray photoelectron spectroscopy
XRD
Title Bias effects on structure and piezoresistive properties of DLC:Ag thin films
URI https://dx.doi.org/10.1016/j.surfcoat.2014.01.026
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