Fabrication of nanopores for biomacromolecule detection

• Published in: Journal of nanoscience and nanotechnology Vol. 10; no. 11; p. 7300
• Main Authors: Yao, Zong-Ni, Wang, Kai-Ge, Jin, Ai-Zi, Li, Jun-Jie, Yang, Hai-Fang, Zhang, Yi-Guang, Gu, Chang-Zhi
• Format: Journal Article
• Language: English
• Published: United States 01.11.2010
• Subjects: DNA - analysis; Microscopy, Electron, Transmission; Nanopores

Nanopores embedded in a thin membrane with diameter below 10 nm are suitable for the biomacromolecule detection. For such purpose, in this study, we developed a technique of how to obtain small nanopores in silicon nitride films using a focused-ion-beam (FIB) system. By changing the process paramete...